Techniques for print ink droplet measurement and control to deposit fluids within precise tolerances

ABSTRACT

An ink printing process employs per-nozzle droplet volume measurement and processing software that plans droplet combinations to reach specific aggregate ink fills per target region, guaranteeing compliance with minimum and maximum ink fills set by specification. In various embodiments, different droplet combinations are produced through different printhead/substrate scan offsets, offsets between printheads, the use of different nozzle drive waveforms, and/or other techniques. These combinations can be based on repeated, rapid droplet measurements that develop understandings for each nozzle of means and spreads for expected droplet volume, velocity and trajectory, with combinations of droplets being planned based on these statistical parameters. Optionally, random fill variation can be introduced so as to mitigate Mura effects in a finished display device. The disclosed techniques have many possible applications.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. Utility patent applicationSer. No. 15/716,753 filed on Sep. 27, 2017, which in turn is acontinuation of U.S. Utility patent application Ser. No. 15/135,380,filed on Apr. 21, 2016 (issued as U.S. Pat. No. 9,802,403 on Oct. 31,2017); which in turn is a continuation of U.S. Utility patentapplication Ser. No. 14/340,403, filed on Mar. 10, 2014 (issued as U.S.Pat. No. 9,352,561 on May 31, 2016); each of these applications isentitled “Techniques For Print Ink Droplet Volume Measurement AndControl Over Deposited Fluids Within Precise Tolerances,” and each wasfiled on behalf of first named inventor Nahid Harjee. U.S. Utilitypatent application Ser. No. 14/340,403 in turn claims priority to eachof U.S. Provisional Patent Application No. 61/950,820 for “TechniquesFor Print Ink Droplet Volume Measurement And Control Over DepositedFluids Within Precise Tolerances,” filed on behalf of first namedinventor Nahid Harjee on Mar. 10, 2014 and Taiwan Patent Application No.103114950 for “Techniques For Print Ink Droplet Volume Measurement AndControl Over Deposited Fluids Within Precise Tolerances,” filed onbehalf of first named inventor Nahid Harjee on Apr. 25, 2014. U.S.Utility patent application Ser. No. 14/340,403 is also a continuationin-part of each of PCT Patent Application No. PCT/US14/35193 for“Techniques for Print Ink Droplet Measurement and Control to DepositFluids within Precise Tolerances,” filed on behalf of first namedinventor Nahid Harjee on Apr. 23, 2014 and U.S. Utility patentapplication Ser. No. 14/162,525 for “Techniques for Print Ink VolumeControl To Deposit Fluids Within Precise Tolerances,” filed on behalf offirst named inventor Nahid Harjee on Jan. 23, 2014 (and issued on Apr.21, 2015 as U.S. Pat. No. 9,010,899). U.S. Utility patent applicationSer. No. 14/162,525 in turn claims priority to Taiwan Patent ApplicationNo. 102148330, filed for “Techniques for Print Ink Volume Control ToDeposit Fluids Within Precise Tolerances” on behalf of first namedinventor Nahid Harjee on Dec. 26, 2013, and further is a continuation ofP.C.T. Patent Application No. PCT/US2013/077720, filed for “Techniquesfor Print Ink Volume Control To Deposit Fluids Within PreciseTolerances” on behalf of first named inventor Nahid Harjee on Dec. 24,2013. P.C.T. Patent Application No. PCT/US2013/077720 claims priority toeach of: U.S. Provisional Patent Application No. 61/746,545, for “SmartMixing,” filed on behalf of first named inventor Conor Francis Madiganon Dec. 27, 2012; U.S. Provisional Patent Application No. 61/822,855 for“Systems and Methods Providing Uniform Printing of OLED Panels,” filedon behalf of first named inventor Nahid Harjee on May 13, 2013; U.S.Provisional Patent Application No. 61/842,351 for “Systems and MethodsProviding Uniform Printing of OLED Panels,” filed on behalf of firstnamed inventor Nahid Harjee on Jul. 2, 2013; U.S. Provisional PatentApplication No. 61/857,298 for “Systems and Methods Providing UniformPrinting of OLED Panels,” filed on behalf of first named inventor NahidHarjee on Jul. 23, 2013; U.S. Provisional Patent Application No.61/898,769 for “Systems and Methods Providing Uniform Printing of OLEDPanels,” filed on behalf of first named inventor Nahid Harjee on Nov. 1,2013; and U.S. Provisional Patent Application No. 61/920,715 for“Techniques for Print Ink Volume Control To Deposit Fluids WithinPrecise Tolerances,” filed on behalf of first named inventor NahidHarjee on Dec. 24, 2013. PCT Patent Application No. PCT/US14/35193claims the benefit of U.S. Provisional Patent Application No. 61/816,696for “OLED Printing Systems and Methods Using Laser Light Scattering forMeasuring Ink Drop Size, Velocity and Trajectory” filed on behalf offirst named inventor Alexander Sou-Kang Ko on Apr. 26, 2013, and of U.S.Provisional Patent Application No. 61/866,031 for “OLED Printing Systemsand Methods Using Laser Light Scattering for Measuring Ink Drop Size,Velocity and Trajectory” filed on behalf of first named inventorAlexander Sou-Kang Ko on Aug. 14, 2013. Priority is claimed to each ofthe aforementioned patent applications, and each of the aforementionedpatent applications is hereby incorporated by reference.

This disclosure relates to techniques for measuring ink jet dropletvolumes used for organic light-emitting diode (“OLED”) devicefabrication with a high degree of statistical accuracy, to use of aprinting process to transfer droplets of a fluid ink to target regionsof a substrate in precise aggregate quantities, and to related methods,devices, improvements and systems. In one non-limiting application,techniques provided by this disclosure can be applied to a manufacturingprocess for OLED display panels.

BACKGROUND

In a printing process where a printhead has multiple nozzles, not everynozzle reacts to a standard drive waveform the same way, i.e., eachnozzle can produce a droplet of slightly different volume. In situationswhere the nozzles are relied upon to deposit fluid droplets intorespective fluid deposition areas (“target regions”), lack ofconsistency can lead to problems. This is particularly the case formanufacturing applications, where the ink transports a material thatwill become a permanent thin-film structure within an electronic device.One example application where this issue arises is in a manufacturingprocess applied to the fabrication of displays, such as organiclight-emitting diode (“OLED”) displays, as used for small and largeelectronic devices (e.g., for portable devices, large scalehigh-definition television panels and other devices). Where a printingprocess is used to deposit an ink carrying light-generating materials ofsuch displays, the volume discrepancy across rows or columns of pixelscontributes to visible lighting or color defects in a displayed image.Note that “ink” as used herein refers to any fluid applied to asubstrate by nozzles of a printhead irrespective of colorcharacteristics; for example, in the mentioned OLED display fabricationapplication, ink is typically deposited in place and then processed,dried or cured in order to directly form a permanent material layer, andthis process might be repeated with the same ink or a different ink toform several such layers.

FIG. 1A is used to introduce this nozzle-droplet inconsistency issue,with an illustrative diagram generally referenced using numeral 101. InFIG. 1A, a printhead 103 is seen to have five ink nozzles, which areeach depicted using small triangles at the bottom of the printhead, eachrespectively numbered (1)-(5). Note that in a typical manufacturingapplication, there can be many more than five nozzles, e.g., 24-10,000,depending on application; in the case of FIG. 1A, five nozzles arereferenced simply for ease of understanding. It should be assumed thatin an example application, it is desired to deposit fifty picoliters(50.00 pL) of a fluid into each of five specific target regions of anarray of such regions, and further, that each of five nozzles of aprinthead is supposed to eject ten picoliters (10.00 pL) of fluid witheach relative movement (“pass” or “scan”) between the printhead and asubstrate into each of the various target regions. The target regionscan be any surface areas of the substrate, including adjoiningunseparated areas (e.g., such that deposited fluid ink partially spreadsto blend together between regions), or respective, fluidically-isolatedregions. These regions are generally represented in FIG. 1A using ovals104-108, respectively. Thus, it might be assumed that exactly fivepasses of the printhead are necessary as depicted to fill each of thefive specific target regions. However, printhead nozzles will inpractice have some minor variations in structure or actuation, such thata given drive waveform applied to respective nozzle transducers yieldsslightly different droplet volumes for each nozzle. As depicted in FIG.1A, for example, the firing of nozzle (1) yields a droplet volume of9.80 picoliters (pL) with each pass, with five 9.80 pL droplets beingdepicted within oval 104. Note that each of the droplets is representedin the figure by a distinct location within the target region 104, butin practice, the location of each of the droplets may be the same or mayoverlap. Nozzles (2)-(5), by contrast, yield slightly different,respective droplet volumes of 10.01 pL, 9.89 pL, 9.96 pL and 10.03 pL.With five passes between printhead and substrate where each nozzledeposits fluid on a mutually-exclusive basis into the target regions104-108, this deposition would result in a total deposited ink volumevariation of 1.15 pL across the five target regions; this can beunacceptable for many applications. For example, in some applications,discrepancy of as little as one percent (or even much less) in depositedfluid can cause issues; in the case of OLED display fabrication, suchvariation can potentially result in image artifacts observable in afinished display.

Manufacturers of televisions and other forms of displays will thereforeeffectively specify precise volume ranges that must be observed with ahigh-degree of precision, e.g., 50.00 pL, ±0.25 pL in order for aresultant product to be considered acceptable; note that in thisexemplary case, the specified tolerance must be within one-half percentof the target of 50.00 pL. In an application where each nozzlerepresented by FIG. 1A was to deposit into pixels in respectivehorizontal lines of a high-definition television (“HDTV”) screen, thedepicted variation of 49.02 pL-50.17 pL might therefore yieldunacceptable quantity, because this would represent about a ±1.2%variation (e.g., instead of the desired maximum tolerance of ±0.5%variation). While display technologies have been cited as an example, itshould be understood that the nozzle-droplet inconsistency problem canarise in other contexts.

In FIG. 1A, nozzles are specifically aligned with target regions (e.g.,wells) such that specific nozzles print into specific target regions. InFIG. 1B, an alternate case 151 is shown in which the nozzles are notspecially aligned, but in which nozzle density is high relative totarget region density; in such a case, whichever nozzles happen totraverse specific target regions during a scan or pass are used to printinto those target regions, with potentially several nozzles traversingeach target region in each pass. In the example shown, the printhead 153is seen to have five ink nozzles and the substrate is seen to have twotarget regions 154-155, each located such that nozzles (1) and (2) willtraverse target region 154, nozzles (4) and (5) will traverse targetregion 155, and nozzle (3) will not traverse either target region. Asshown, in each pass, one or two droplets are deposited into each well,as depicted. Note that once again, the droplets can be deposited in amanner that is overlapping or at discrete points within each targetregion, and that the particular illustration in FIG. 1B is illustrativeonly; as with the example presented in FIG. 1A, it is once again assumedthat it is desired to deposit fifty picoliters (50.00 pL) of a fluidinto each of target regions 154-155, and that each nozzle has a nominaldroplet volume of approximately 10.00 pL. Utilizing the same per nozzledroplet volume variation as observed in connection with the example ofFIG. 1A, and assuming that each nozzle that overlaps with a targetregion on a given pass will deliver a droplet into that target region upuntil a total of five droplets have been delivered, it is observed thatthe target regions are filled in three passes and there is a totaldeposited ink volume variation from the target of 50.00 pL of 0.58 pLacross the two target regions, and further a discrepancy outside ofspecified tolerance; again, this can be unacceptable for manyapplications.

It is noted that in connection with the examples above, the dropletconsistency issue is further exacerbated by the issue that dropletvolumes can statistically vary, even for a given nozzle and given drivewaveform. Thus, in the examples discussed above, it was assumed thatnozzle (1) of the printhead from FIGS. 1A and 1B would produce a dropletvolume of 9.80 pL in response to a given drive waveform but, inpractice, in a real world case, droplet volume can be assumed to varysomewhat depending on various factors, for example, process, voltage,temperature, printhead age and many other factors, such that actualdroplet volume may not be precisely known.

While techniques have been proposed to address the droplet consistencyproblem, generally speaking, these techniques either still do notreliably provide fill volumes that stay within the desired tolerancerange or they dramatically increase manufacturing time and cost, i.e.,they are inconsistent with a goal of having high quality with a lowconsumer price-point; such quality and low price-point can be key forapplications where commodity products, such as HDTVs, are concerned.

What is therefore needed are techniques useful in depositing fluid intotarget regions of a substrate using a printhead with nozzles. Morespecifically, what is needed are techniques for precisely controllingdeposited fluid volumes in respective target regions of a substratenotwithstanding variations in nozzle-droplet ejection volumes, ideallyon a cost-effective basis that permits fast fluid deposition operationsand thus improves the speed of device fabrication. The techniquesdescribed below satisfy these needs and provide further, relatedadvantages.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a diagram that presents a hypothetical problem of depositingink in target regions of a substrate where a printhead with five nozzlesis used to deposit a target fill of 50.00 pL in each of five specifictarget regions.

FIG. 1B is another diagram that presents a hypothetical problem ofdepositing ink in target regions of a substrate where a printhead withfive nozzles is used to deposit a target fill of 50.00 pL in each of twospecific target regions.

FIG. 2A is an illustrative diagram that shows a droplet measurementsystem capable of measuring droplet volumes for each nozzle of a largeprinthead assembly.

FIG. 2B is a method diagram that shows various processes and optionsassociated with measurement of droplet volumes for each nozzle.

FIG. 2C is a method diagram that shows various processes and optionsassociated with measurement of droplet volumes for each nozzle, toachieve a high-confidence understanding of expected droplet volume.

FIG. 2D is a schematic diagram that shows layout of various componentsused in one embodiment to perform droplet measurement.

FIG. 2E is a schematic diagram that shows layout of various componentsused in another embodiment to perform droplet measurement.

FIG. 3A provides an illustrative view showing a series of optionaltiers, products or services that can each independently embody thetechniques introduced earlier.

FIG. 3B is an illustrative diagram showing a hypothetical arrangement ofa printer and substrate, in an application where the substrate isultimately to form a display panel having pixels.

FIG. 3C is a cross-sectional close-up view of the printhead andsubstrate of FIG. 3B, taken from the perspective of lines C-C from FIG.3B.

FIG. 4A is a diagram similar to FIG. 1A, but illustrates the use ofcombinations of droplet volumes to reliably produce ink fill volumes foreach target region within a predetermined tolerance range; in oneoptional embodiment, different droplet volume combinations are producedfrom a set of predetermined nozzle firing waveforms, and in anotheroptional embodiment, different droplet volume combinations are producedfrom respective nozzles of the printhead using relative motion (405)between printhead and substrate.

FIG. 4B is a diagram used to illustrate relative printhead/substratemotion and the ejection of different droplet volume combinations intorespective target regions of a substrate.

FIG. 4C is a diagram used to illustrate use of different nozzle drivewaveforms at each nozzle to produce different droplet volumecombinations into respective target regions of a substrate.

FIG. 4D is a diagram similar to FIG. 1B, but illustrates the use ofcombinations of droplet volumes to reliably produce ink fill volumes foreach target region within a predetermined tolerance range; in oneoptional embodiment, different droplet volume combinations are producedfrom a set of predetermined nozzle firing waveforms, and in anotheroptional embodiment, different droplet volume combinations are producedfrom respective nozzles of the printhead using relative motion (472)between printhead and substrate.

FIG. 5 provides a block diagram showing a method of planningcombinations of droplets for each target region of a substrate; thismethod can be applied to any of the optional embodiment introduced byFIGS. 4A-D.

FIG. 6A provides a block diagram for choosing particular sets ofacceptable droplet combinations for each target region of the substrate,usable for example with any of the embodiments introduced earlier.

FIG. 6B provides a block diagram for iteratively planningprinthead/substrate motion and using of nozzles based on combinations ofdroplets for each print region.

FIG. 6C provides a block diagram that illustrates further optimizationof printhead/substrate motion and the use of nozzles, specifically, toorder scans in a manner that printing can be performed as efficiently aspossible.

FIG. 6D is a hypothetical plan view of a substrate that will ultimatelyproduce multiple flat panel display devices (e.g., 683); as denoted byregion 687, printhead/substrate motion can be optimized for a particularregion of a single flat panel display device, with optimizations beingused on a repeatable or periodic basis across each display device (suchas the four depicted flat panel display devices).

FIG. 7 provides a block diagram for deliberately varying fill volumeswithin acceptable tolerances in order to reduce visual artifacts in adisplay device.

FIG. 8A provides a block diagram showing how a droplet measurement canbe used to accommodate statistical variation of droplet volume pernozzle and per drive waveform, and yet permit precise aggregate inkfills within a given target region.

FIG. 8B provides a block diagram showing how droplet measurement can beplanned so as to accommodate statistical variation of droplet volume pernozzle and per drive waveform, and yet permit precise aggregate inkfills within a given target region.

FIG. 9A provides a graph that shows variation in target region fillvolume without adjustments for nozzle-to-nozzle droplet volume variationof a printhead.

FIG. 9B provides a graph that shows variation in target region fillvolume where different nozzles are randomly used to statisticallycompensate for nozzle-to-nozzle droplet volume variation of a printhead.

FIG. 9C provides a graph that shows variation in target region fillvolume where one or more droplets of different volumes are used toachieve target region fill volume within precise tolerances on a plannedbasis.

FIG. 10A provides a graph that shows variation in target region fillvolume without adjustments for nozzle-to-nozzle droplet volume variationof a printhead.

FIG. 10B provides a graph that shows variation in target region fillvolume where different nozzles are randomly used to statisticallycompensate for nozzle-to-nozzle droplet volume variation of a printhead.

FIG. 100 provides a graph that shows variation in target region fillvolume where one or more droplets of different volumes are used toachieve target region fill volume within precise tolerances on a plannedbasis.

FIG. 11 shows a plan view of a printer used as part of a fabricationapparatus; the printer can be within a gas enclosure that permitsprinting to occur in a controlled atmosphere.

FIG. 12 provides a block diagram of a printer; such a printer can beoptionally employed for example in the fabrication apparatus depicted inFIG. 11.

FIG. 13A shows an embodiment where multiple printheads (each withnozzles) are used to deposit ink on a substrate.

FIG. 13B shows rotation of the multiple printheads to better alignnozzles of the respective printheads with the substrate.

FIG. 13C shows offset of individual ones of the multiple printheads inassociation with intelligent scanning, to deliberately produce specificdroplet volume combinations.

FIG. 13D shows a cross-section of a substrate, including layers that canbe used in an organic light-emitting diode (OLED) display.

FIG. 14A shows a number of different ways of customizing or varying anozzle firing waveform.

FIG. 14B shows a way of defining a waveform according to discretewaveform segments.

FIG. 15A shows an embodiment where different droplet volume combinationscan be achieved using different combinations of predetermined nozzlefiring waveforms.

FIG. 15B shows circuitry associated with generating and applying aprogrammed waveform at a programmed time (or position) to a nozzle of aprinthead; this circuitry provides one possible implementation of eachof circuits 1523/1531, 1524/1532 and 1525/1533 from FIG. 15A, forexample.

FIG. 15C shows a flow diagram of one embodiment that uses differentnozzle firing waveforms.

FIG. 15D shows a flow diagram associated with nozzle or nozzle-waveformqualification.

FIG. 16 shows a perspective view of an industrial printer.

FIG. 17 shows another perspective view of an industrial printer.

FIG. 18A presents a schematic diagram which shows the layout ofcomponents in an embodiment of a shadowgraphy-based droplet measurementsystem.

FIG. 18B presents a schematic diagram which shows the layout ofcomponents in an embodiment of an interferometry-based dropletmeasurement system.

FIG. 19 shows a flow diagram associated with one illustrative processthat integrates a droplet measurement system with an industrial printer,optionally used for OLED device fabrication.

FIG. 20 shows another, more detailed flow diagram, associated withanother embodiment of droplet measurement.

The subject matter defined by the enumerated claims may be betterunderstood by referring to the following detailed description, whichshould be read in conjunction with the accompanying drawings. Thisdescription of one or more particular embodiments, set out below toenable one to build and use various implementations of the technologyset forth by the claims, is not intended to limit the enumerated claims,but to exemplify their application. Without limiting the foregoing, thisdisclosure provides several different examples of techniques used tofabricate a materials layer by planning printhead movement so as tomaintain deposited ink volume within predetermined allowances while notexcessively increasing the number of printhead passes (and thus the timeneeded to complete a deposited layer). In connection with thesetechniques, accurate droplet measurement can be performed so as toaccurately plan composite ink fills in any target region, withmeasurement highly integrated with production printing. The varioustechniques can be embodied as software for performing these techniques,in the form of a computer, printer or other device running suchsoftware, in the form of control data (e.g., a print image) for forminga materials layer, as a deposition mechanism, or in the form of anelectronic or other device (e.g., a flat panel device or other consumerend product) fabricated as a result of these techniques. While specificexamples are presented, the principles described herein may also beapplied to other methods, devices and systems as well.

DETAILED DESCRIPTION

This disclosure relates to use of a printing process to transfer layermaterial to a substrate, techniques for droplet measurement with a highdegree of accuracy, and related methods, improvements, devices andsystems.

The nozzle consistency issue introduced above can be addressed bymeasuring droplet volume per nozzle (or variation in droplet volumeacross nozzles) of a printhead for a given nozzle firing waveform. Thispermits planning of printhead firing patterns and/or motion to depositprecise aggregate fill volumes of ink in each target region. With anunderstanding of how droplet volume varies across nozzles,printhead/substrate positional offsets and/or droplet firing patternscan be planned in a manner that accommodates differences in dropletvolumes but that still optimizes concurrent printing in adjacent targetregions with each pass or scan. Viewed from a different perspective,rather than normalizing or averaging out nozzle-to-nozzle variation indroplet volumes, the specific droplet volume characteristics of eachnozzle are measured and used in a planned manner to concurrently achievespecific in-range aggregate volumes for each of multiple target regionsof the substrate; in many embodiments, this planning is performed usinga process that reduces the number of scans or printhead passes independence on one or more optimization criteria.

A number of different embodiments will be presented below thatcontribute to achieving these results. Each embodiment can be used inisolation and it is also expressly contemplated that features of anyembodiment can be optionally mixed and matched with features of adifferent embodiment.

One embodiment presents systems and techniques that provide forindividualized droplet measurement over a very large printhead assembly(e.g., having hundreds to thousands of nozzles, or more). Logisticaldifficulties associated with positioning of optics are resolved usingbelow-deposition-plane-measurement techniques (i.e., by redirectinglight to away from the vicinity of the printhead, beyond the relativedistance at which a substrate would normally be positioned fordeposition), for example, using an optics assembly that can be actuatedin up to three dimensions, such that a large printhead assembly (e.g.,within a confined space) can optionally be parked (e.g., at a printerservice station) and a droplet measurement device precisely articulatedrelative to the large printhead assembly. Precise placement of abelow-deposition-plane optics assembly enables drop volume measurementof a packed nozzle array at the required distance from the nozzle plate(the printhead assembly typically operates on the order of onemillimeter from a substrate surface), notwithstanding the confinedspace. In one optional embodiment, the optics system employsshadowgraphy and repeated measurement of droplets emanating fromspecific nozzles (and optionally, varied nozzle drive waveforms) toincrease statistical confidence of expected droplet volume. In anotheroptional embodiment, the optics system employs interferometry andrepeated measurement of droplets emanating from specific nozzles (andoptionally, varied nozzle drive waveforms) to increase statisticalconfidence of expected droplet volume.

Note that in a production line, it is typically desired to have aslittle downtime in production as possible, in order to maximizeproductivity and to minimize manufacturing cost. In another optionalembodiment, droplet measurement times are therefore “hidden” or“stacked” behind other line processes. For example, in an optional flatpanel display fabrication production line, as each new substrate isbeing loaded or otherwise handled, processed or transferred, a printheadassembly of the printer is analyzed using droplet measurement processesto facilitate an accurate statistical understanding of per-nozzle(and/or per-nozzle, per-drive waveform) droplet volumes. For a printheadassembly having tens of thousands of nozzles, repeated dropletmeasurement (e.g., dozens of droplet measurements per nozzle, per drivewaveform if multiple drive waveforms are used) can take substantialtime; optional system control processes and related software cantherefore optionally perform droplet measurement on a dynamic,incremental basis. For example, if a hypothetical load/unload processrequires, e.g., 30 seconds, with each print process taking 90 seconds,the printhead assembly could be measured during the load/unload processin two minute cycles, updating droplet measurements to obtain per-nozzledroplet volume means and confidence intervals using a sliding window ofnozzles/droplets analyzed during the load/unload process associated witheach two minute cycle. Note that many other processes are possible andthat a continuous, dynamic process is not required for all embodiments.However, it is believed in practice that not only will droplet volumefor a given nozzle and drive waveform vary relative to other nozzles anddrive waveforms but, further, that typical values will change over time,owing to factors such as subtle variation in ink properties, nozzle ageand degradation, and other factors; a process which thereforeperiodically updates measurements, e.g., every few hours to days, cantherefore advantageously further improve reliability.

In yet another optional embodiment, a droplet measurement system usesinterferometry and non-imaging techniques to obtain very fast dropletmeasurements, for example, performing per droplet measurement inmicroseconds and repeated droplet measurement across a printheadassembly with thousands of nozzles in less than thirty minutes. Ascontrasted with imaging techniques (which use a camera and capturedimage pixel processing techniques to derive volume measurement),interferometry techniques can provide accurate droplet volumemeasurement by detecting interference pattern spacing using multiplelight sensors, representative of droplet shape, and by correlating thisspacing with droplet volume. In one implementation, a laser sourceand/or related optics and/or sensors are mechanically mounted for belowdeposition plane measurement and effective articulation relative to alarge printhead assembly. Owing to the very rapid measurementsobtainable with such a system, interferometry techniques are especiallyuseful in an embodiment that performs dynamic, incremental measurement,as just described, and with such techniques, with each printing cycle,dozens to hundreds of nozzles can be subjected to repeated dropletmeasurements (e.g., measurement of thirty droplets per nozzle) toachieve high statistical confidence around each expected droplet volume.

In yet another optional embodiment, many droplet measurements are takenper nozzle and per nozzle drive waveform (for embodiments that usevaried nozzle drive waveforms). As the number of measurements increases,the mean and standard deviation (assuming normal random distribution)for each nozzle-waveform combination becomes more resolute. Usingmathematical processes implemented by software, statistical models foreach droplet can be created and accurately combined to develop astatistical model for composite ink fill per target region. To providean example, many measurements are taken for each nozzle for each drivewaveform. If a given single measurement of droplet volume is expected tobe accurate with a standard deviation of two percent, then by takingmany measurements, a statistically accurate mean is obtained with areduced variance or standard deviation; that is, again assuming a normalrandom distribution, the standard deviation is decreased by the numberof measurements n according to σ/(n)^(1/2) such that four measurementsof a droplet volume would reduce standard deviation by half, and soforth. Thus, in one embodiment, software is used to achieve a muchhigher confidence interval around expected droplet volume throughspecifically planned, repeated measurements that help substantiallyreduce measurement error. Many different statistical measures can beused, but for example, for an embodiment where composite fills areexpected to fall within a range of ±x % (e.g., ±0.5% of a target fill),then droplet measurements can be taken to ensure that for each nozzle,and for each different drive waveform, a 3σ (99.73%) confidence intervalis obtained around expected droplet volume within the same range (e.g.,±0.5%) of a mean droplet volume. Perhaps otherwise stated, with anaccurate statistical model built for each different droplet, knowntechniques can be used to plan droplet combinations based onmathematical combinations of associated statistical models to develop ahigher degree of accuracy around aggregate per-target region ink fills(notwithstanding nozzle-to-nozzle or waveform-to-waveform droplet volumevariation). Note that while a normal random distribution is used forselect embodiments, any statistical model can be used (e.g., Poisson,Student's-T, etc), where individual distributions can be combined (e.g.,by software) to obtain an aggregate distribution representingcombination of different droplets. Also note that while in someembodiments, a 3σ (99.73%) measure is used, in other contemplatedembodiments, other types of statistical measures are used, such as 4σ,5σ or 6σ, or a measure not specifically associated with randomdistributions.

Note that similar techniques can be applied to develop models of dropletvelocity and flight trajectory for each nozzle-waveform combination.These variables can be further applied in other optional embodiments.

Any permutation or subset of the techniques and embodiments describedabove can be applied to accurately plan for aggregate ink fills in atarget region, that is, in a manner that plans for specific compositevolumes based on per-nozzle droplet volume variations. That is, ratherthan trying to average out volume differences across nozzles, thesedifferences are understood and specifically used in print controlprocesses to combine different droplets (e.g., from different nozzles orusing different drive waveforms) and obtain very precise ink fills.

In one optional embodiment, the printhead and/or the substrate are“stepped” in variable amounts so as to change, as appropriate, thenozzle or nozzles used for each target region in various passes to ejectspecifically desired droplet volumes. For example, a droplet from onenozzle (e.g., with a mean droplet volume of 9.95 pL) can be combinedwith a droplet from a second nozzle (e.g., with a mean droplet volume of10.05 pL, to obtain an aggregate composite of 20.00 pL) by selectivelyoffsetting a printhead or printhead assembly relative to a substrate.Multiple passes are planned so that each target region receives aspecific aggregate fill matching a desired target fill. That is, eachtarget region (for example, each well in a row of wells that will formpixelated components of a display) receives a planned combination of oneor more droplet volumes to achieve an aggregate volume within aspecified tolerance range using different geometric steps of printheadrelative to substrate. In more detailed features of this embodiment,given the nozzles' positional relationships to one another, a paretooptimal solution can be computed and applied, such that a tolerableamount of volume variation in each target region is permitted, withinspecification, but at the same time, the printhead/substrate movement isplanned to maximize average concurrent use of nozzles for respectivetarget deposition regions. The statistical techniques discussed abovecan be used to ensure that a statistical model of composite (i.e.,multi-droplet) ink fills falls within any desired tolerance range. Inone optional refinement, a function is applied to reduce and evenminimize the number of printhead/substrate passes needed for printing toachieve these ends. Reflecting briefly upon these various features,fabrication cost is substantially reduced as the printing of layers ofmaterial on a substrate can be performed quickly and efficiently.

Note that in a typical application, the target regions that receive inkare arrayed, that is, laid out in rows and columns, where a swathdescribed by relative printhead/substrate motion will deposit ink in asubset of all of the rows (of target regions of the array), but in amanner that covers all columns of the array in a single pass; also, thenumber of rows, columns and printhead nozzles can be quite large, e.g.,involving hundreds or thousands of rows, columns and/or printheadnozzles.

Another optional embodiment addresses the nozzle consistency issue in aslightly different manner. A set of multiple, prearranged, alternatenozzle firing waveforms with known (and different) droplet volumecharacteristics is made available to each nozzle; for example, a set offour, eight or another number of alternate waveforms can be hard-wiredor otherwise predefined to provide a corresponding set of selectable,slightly-different droplet volumes. Per-nozzle volume data (ordifference data) and any associated statistical models are then used toplan for concurrent deposition of multiple target regions by determiningsets of nozzle-waveform combinations for each target region of thesubstrate. Once again, the specific volume characteristics of eachnozzle (and in this case, each nozzle-waveform combination) andassociated distributions, confidence intervals and so forth are reliedupon to achieve specific fill volumes with high confidence; that is,rather than attempting to correct per-nozzle volume variation, thevariation is specifically used in combinations to obtain specific fillvolumes within a well understood statistical range. Note that there willtypically be a large number of alternate combinations that could be usedto deposit droplets in reach a desired range in each target region ofthe substrate in order to meet these ends. In a more detailedembodiment, a “common set” of nozzle waveforms can be shared across some(or even all) nozzles of a printhead, with per-nozzle droplet volumesstored and available for mixing and matching different droplet volumesto achieve specific fills. As a further option, a calibration phase canbe used to select different waveforms in an off-line process (e.g., thedynamic, incremental measurement process introduced above), with a setof specific nozzle firing waveforms being selected based on calibrationto achieve a set of respective, specifically-desired volumecharacteristics. Once again, in further detailed embodiments,optimization can be performed to plan printing in a way that improvesprinting time, for example, by minimizing the number of scans orprinthead passes, by maximizing concurrent nozzle use, or by optimizingsome other criteria.

Yet another embodiment relies on the use of multiple printheads in aprinthead assembly, where each printhead and its nozzles can be offsetrelative to one another (or equivalently, a print structure havingmultiple rows of nozzles that can each be offset relative to oneanother). Using such deliberate offset, per-nozzle volume variations canbe intelligently combined across printheads (or rows of nozzles) witheach pass or scan. Again, there will typically be a large number ofalternate combinations that could be used to deposit droplets to reach adesired range in each target region of the substrate and, in detailedembodiments, optimization is performed to plan the use of offsets in away that improves printing time, for example, by minimizing the numberof scans or printhead passes, or by maximizing concurrent nozzle use,and so forth.

Note that one benefit of the techniques described above is that byliving with droplet volume variations but combining them to achievespecific, predetermined target region fill volumes, one can achieve ahigh degree of control over not only the ability to satisfy a desiredfill tolerance range, but also over precise volume amounts anddeliberately controlled (or injected) variation in such amounts. Mura,or the presence of geometric patterns from the deposition process thatcould give rise to observable patterns, can be mitigated through anumber of the techniques presented herein. That is, even a slightdiscrepancy in target fill volumes at low spatial frequency canintroduce unintended geometric artifacts which are visible to the humaneye and which are therefore undesirable. It is therefore desired in someembodiments to deliberately but randomly vary the composite fill volumeof each target region, or the specific combination of droplets used toachieve a composite fill, in a manner still within specification. Usingan exemplary tolerance of 49.75 pL-50.25 pL, rather than simplyarbitrarily ensuring that all target region fills are at a value withinthis tolerance range, it can for example be desired for suchapplications to introduce intentional variation within this range, suchthat any pattern of variation or difference is not observable to thehuman eye as a pattern in a finished, operating display. Applied to acolor display, one exemplary embodiment deliberately adds such fillvolume variation in a manner statistically independent for at least oneof (a) an x dimension (e.g., along the direction of a row of targetregions), (b) a y dimension (e.g., along the direction of a column oftarget regions), and/or (c) across one or more color dimensions (e.g.,independently for red versus blue, blue versus green, red versus greentarget regions). In one embodiment, variation is statisticallyindependent across each of these dimensions. Such variation is believedto render any fill volume variations imperceptible to the human eye andthus to contribute to high image quality of such displays. Note that forembodiments which use planned combinations of droplets from differentnozzles, produced through a repeatable set of “geometric steps” oroffsets in scan path, the use of subtle but deliberate droplet volumevariation for each nozzle (i.e., produced through the use of multiple,alternate firing waveforms for each nozzle) provides a powerfultechnique for suppressing the potential for Mura without having to varyscan path. In one contemplated embodiment, for example, each nozzle isassigned a set of alternate waveforms that produce respective meanvolumes within ±10.0% of an ideal volume; droplet combinations fromdifferent nozzles can then be planned according to precise means (i.e.,to achieve precise intended fills) with Mura suppressed through the useof injected variation of droplet patterns (either through plannedcombinations of droplet volumes from different nozzle-waveform pairings,or through waveform variation injected after selection/planning ofnozzle-droplet combinations to achieve specific fills). In otherembodiments, deliberately-different composite droplet volumes can beprearranged for each target region to produce an aggregate fill, ordifferent nozzle-droplet combinations can be applied along scan path, ornon-linear scan paths can be used, all to the same effect. Othervariations are also possible.

Also, whereas conventional droplet measurement techniques might takemany hours or days, and thus lead to errors in a printing process due topossible variation in drop characteristics during the long measurementcycle, the use of fast techniques such as the interferometry techniquesand associated structures (introduced above) facilitates a moreup-to-date, and therefore more accurate, dynamic understanding ofnozzle-to-nozzle and droplet-to-droplet volume variations, permittingthe use of planned combinations as described previously with highconfidence. For example, while conventional droplet measurementtechniques might take many hours to perform, through the use ofnon-imaging techniques (such as interferometry), droplet measurement canbe kept continuously up-to-date and thus made to accurately trackprocess, voltage and temperature (PVT variations), printhead nozzledegradation, ink changes, and other dynamic processes that can affectthe accuracy of measurement. Through the use of a rolling measurementprocess, for example that hides incremental droplet measurement insubstrate loading and unloading times as mentioned previously, it isexpected that droplet measurements can be retaken and updated almostcontinuously (e.g., for each nozzle less than every 3-4 hours) and thusmade to present accurate models enabling composite fill planning asdescribed previously. In one embodiment, droplets produced by everynozzle or nozzle-waveform pairing are re-measured (e.g., ab initio) on aperiodic basis, e.g., once every 2 hours to 24 hour period, andpreferably at a shorter time interval such as two hours. Note that arolling process is not required for all embodiments, i.e., in oneembodiment, measurements can be taken (or retaken) for all nozzlesduring a dedicated calibration process, during which printing isinterrupted. To provide one example, in one possible embodiment, aprinthead assembly having 6,000 nozzles and 24,000 nozzle-waveformcombinations could be measured for 15 seconds during a substrate loadingand unloading phase for each 90 second print cycle, as a continualmatter that with each iteration examines a different, rolling subset ofthe 24,000 nozzle-waveform combinations. The iterations proceed untilall nozzle-waveform combinations have been processed, and then theprocess is then repeated on a circular basis. In an embodiment that usesa dedicated “offline” calibration process (e.g., every three hours),such a printhead assembly could be parked for a period (e.g., 30minutes) to develop statistical models for all nozzle-waveformcombinations before returning to active printing. Note also that thesetechniques can also be used for other print head processes includingwithout limitation any type of nozzle maintenance process, e.g., with alarge print head assembly having thousands of nozzles, a rolling processcan be used to perform “online” maintenance in between print operations(such as during loading and/or unloading of successive substrates in amanufacturing line).

Note again that each of the optional techniques and embodimentsintroduced above are to be considered optional to one another, andconversely, it is contemplated that such techniques can optionally becombined in any possible permutation or combination in variousembodiments. As an example, measurements of per-nozzle/drive waveformdroplet velocity and/or flight angle can be used to disqualify“erroneous” droplets for a given nozzle-waveform combination based on adetermination that the particular nozzle-waveform combination producesan aberrant droplet “mean,” or based on a determination that theparticular nozzle-waveform combination produces a droplet statisticalspread exceeding a threshold. To provide another non-limiting example,interferometry or other non-imaging techniques can be used todynamically update velocity and/or flight angle behavior byincrementally and dynamically performing such measurements on variouswindows of nozzle-waveform combinations at intermittent intervals, i.e.,as a printhead assembly is “parked” during loading and/or unloading of asubstrate. Clearly, many combinations and permutations are possiblebased on the permutations introduced above.

An example will help introduce some concepts relating to intelligentplanning of fill volumes per target region. Per-nozzle volume data (ordifference data) for a given nozzle firing waveform can be used to planfor concurrent deposition of multiple target regions by determiningpossible nozzle-droplet volume sets for each target region of thesubstrate. There will typically be a large number of possiblecombinations of nozzles and/or drive waveforms that can be used depositink droplets in multiple passes to fill each target region to a desiredfill volume within a narrow tolerance range that meets specification.Returning briefly to the hypothetical introduced using FIG. 1A, ifacceptable fill volumes according to specification were between 49.75 pLand 50.25 pL (i.e., within a range of 0.5% of target), acceptable fillvolumes could also be achieved using many different sets ofnozzles/passes, including without limitation: (a) five passes of nozzle2 (10.01 pL) for a total of 50.05 pL; (b) a single pass of nozzle 1(9.80 pL) and four passes of nozzle 5 (10.03 pL), for a total of 49.92pL; (c) a single pass of nozzle 3 (9.89 pL) and four passes of nozzle 5(10.03 pL), for a total of 50.01 pL; (d) a single pass of nozzle 3 (9.89pL), three passes of nozzle 4 (9.96 pL), and a single pass of nozzle 5(10.03 pL) for a total of 49.80 pL; and (e) a single pass of nozzle 2(10.01 pL), two passes of nozzle 4 (9.96 pL) and two passes of nozzle 5(10.03 pL) for a total of 49.99 pL. Other combinations are clearly alsopossible. Droplet measurement techniques introduced above can be used toobtain these expected (e.g., mean) droplet volumes notwithstandingrelatively larger statistical error associated with a single dropletmeasurement (e.g., ±2% of volume). Thus, even if only one choice ofnozzle drive waveform was available for each nozzle (or all nozzles),the first embodiment introduced above could be used to offset theprinthead relative to the substrate in a series of planned offsets or“geometric steps” that apply as many nozzles as possible during eachscan to deposit droplets (e.g., in different target regions), but thatcombine deposited droplets for each target region in aspecifically-intended manner. That is, many combinations ofnozzle-droplet volumes in this hypothetical could be used to achievedesired fill volumes within a well understood range of statisticalvariance that conforms to specification tolerance; a specific embodimenteffectively selects a particular one of the acceptable dropletcombinations for each target region (i.e., a particular set for eachregion) through its selection of scanning motion and/or nozzle drivewaveforms, so as to facilitate concurrent fills of different rows and/orcolumns of target regions using respective nozzles. By choosing thepattern of relative printhead/substrate motion in a way that minimizesthe time over which printing occurs, this first embodiment provides forsubstantially-enhanced manufacturing throughput. Note that thisenhancement can optionally be embodied in the form of minimizing thenumber of printhead/substrate scans or “passes,” in a manner thatminimizes the raw distance of relative printhead/substrate movement orin a manner that otherwise minimizes overall printing time. That is tosay, the printhead/substrate movement (e.g., scans) can be preplannedand used to fill target regions in a manner that meets predefinedcriteria, such as minimal printhead/substrate passes or scans, minimalprinthead and/or substrate movement in a defined dimension ordimension(s), printing in a minimal amount of time, or other criteria.

The same approaches all apply equally to the hypothetical of FIG. 1B inwhich the nozzles are not specially aligned to respective targetregions. Again, if acceptable fill volumes according to specificationwere between 49.75 pL and 50.25 pL (i.e., within a range of 0.5% ofeither side of target), acceptable fill volumes could also be achievedmany different sets of nozzles/passes, including without limitation, allof the examples listed above for FIG. 1A as well as additional examplesparticular to the hypothetical of FIG. 1B in which two adjacent nozzlesare used in a single pass to fill a particular target region, forexample, two passes of nozzle (4) (9.96 pL) and of nozzle (5) (10.03pL), and one pass of nozzle (2) (10.01 pL) for a total of 49.99 pL. Onceagain, each such volume can be equated with a statistical mean based onmany droplet measurements. For example, if nozzles (4), (5) and (2) inthis example were associated with statistical models featuring therecited mean and a 3σ value equal to or less than 0.5% of the recitedmean, the aggregate fill would also have a 3σ value equal to or lessthan ±0.5% of 49.99 pL, generally meeting specified tolerance with ahigh degree of statistical accuracy. Note that for a high definitionOLED display (i.e., with millions of pixels), a 3σ (99.73%) value whichclosely matches fill tolerance may be insufficient, e.g., thisstatistically indicates that potentially thousands of pixels can stillbe outside desired tolerance; for this reason, in many embodiments, alarger spread measure (e.g., 6σ) is matched to composite fill tolerance,effectively guaranteeing that virtually every pixel of a high definitiondisplay conforms to manufacturer specification.

These same principles also apply to a multiple-per-nozzle-drive-waveformembodiment. For example, in the hypothetical presented by FIG. 1A, eachof the nozzles could be driven by five different firing waveforms,identified as firing waveforms A through E, such that the resultingvolume characteristics of the different nozzles for the different firingwaveforms are described by Table 1A, below. Considering only targetregion 104 and only nozzle (1), it would be possible to deposit the50.00 pL target in five passes, for example, with a first printhead passusing predefined firing waveform D (to generate from nozzle (1) a 9.96pL droplet), and with four subsequent passes using predefined firingwaveform E (to generate from nozzle (1) a 10.01 pL droplet), all withoutany offset in scan path. Similarly, different combinations of firingwaveforms can be used concurrently in each pass for each nozzle togenerate volumes in each of the target regions that is close to thetarget values without any offset in scan path.

TABLE 1A Nozzle Waveform (1) (2) (3) (4) (5) A 9.80 10.01 9.89 9.9610.03 B 9.70 9.90 9.81 9.82 9.94 C 9.89 10.10 9.99 10.06 10.13 D 9.9610.18 10.07 10.15 10.25 E 10.01 10.23 10.12 10.21 10.31

These same approaches all apply equally to the hypothetical of FIG. 1B.For example, considering only target region 154 and nozzles (1) and (2)(i.e. the two nozzles that overlap target region 154 during a scan), itis possible to achieve 50.00 pL in three passes, for example, with afirst printhead pass using nozzle (1) and predefined waveform B (for adroplet volume of 9.70 pL) and nozzle (2) and predefined waveform C (fora droplet volume of 10.10 pL), a second printhead pass using nozzle (1)and predefined waveform E (for a droplet volume of 10.01 pL) and nozzle(2) and predefined waveform D (for a droplet volume of 10.18 pL), and athird printhead pass using nozzle (1) and predefined waveform E (for adroplet volume of 10.01 pL.)

Note that in both the hypothetical of FIG. 1A and the hypothetical ofFIG. 1B, it is possible to deposit each target volume in a single row oftarget regions in a single pass; for example, it would be possible torotate the printhead by ninety degrees and deposit exactly 50.00 pL witha single droplet from each nozzle for each target region in a row, forexample, using waveform (E) for nozzle (1), waveform (A) for nozzles(2), (4) and (5) and waveform (C) for nozzle (3) (10.01 pL+10.01 pL+9.99pL+9.96 pL+10.03 pL=50.00 pL). It might also be possible to deposit allof the drops necessary to achieve the target volume in one pass evenwithout rotating the print head. For example, nozzle (1) may be able todispense a drop with waveform D and 4 drops from waveform E into region104 in a single pass.

These same principles also apply to the printhead offset embodimentintroduced above. For example, for the hypothetical presented by FIG.1A, the volume characteristics can reflect the nozzles for a firstprinthead (e.g., “printhead A”), with this first printhead beingintegrated together with four additional printheads (e.g., printheads“B” through “E”), each being driven by a single firing waveform andhaving respective per-nozzle droplet volume characteristics. Theprintheads are collectively organized such that in executing a scan passeach of the nozzles identified as nozzle (1) for a printhead is alignedto print into a target region (e.g., target region 104 from FIG. 1A),each of the nozzles identified as nozzle (2) from the various printheadsare aligned to print into a second target region (e.g., target region105 from FIG. 1A), and so on, with the volume characteristics of thedifferent nozzles for the different printheads described by Table 1B,below. Optionally, the respective printheads can be offset from oneanother using a motor that adjusts spacing, e.g., in between scans.Considering only target region 104 and the nozzle (1) on each printhead,it would be possible to deposit the 50.00 pL in a four passes, forexample, with a first printhead pass in which printhead D and printheadE both fire a droplet into the target region, and three subsequentpasses in which only printhead E fires a droplet into the target region.Other combinations are possible using even fewer passes that can stillgenerate volumes in the target region close to the 50.00 pL target, forexample, within a range of 49.75 pL and 50.25 pL. Considering again onlytarget region 104 and the nozzle (1) on each printhead, it would bepossible to deposit 49.83 pL in two passes, for example, with a firstprinthead pass in which printheads C, D, and E all fire a droplet intothe target region, and a second printhead pass in which printheads D andE both fire a droplet into the target region. Similarly, differentcombinations of nozzles from different printheads can be usedconcurrently in each pass to generate volumes in each of the targetregions that is close to the target values without any offset in scanpath. Therefore, using multiple passes in this manner would beadvantageous for embodiments where it is desired to concurrently depositdroplets in different target regions (i.e., in different rows of pixelsfor example). Once again, statistical accuracy can be ensured byplanning droplet measurement in a manner calculated to obtain desiredstatistical characteristics associated with per-nozzle and/or per-drivewaveform droplet volumes and associated means.

TABLE 1B Nozzle Printhead (1) (2) (3) (4) (5) A 9.80 10.01 9.89 9.9610.03 B 9.70 9.90 9.81 9.82 9.94 C 9.89 10.10 9.99 10.06 10.13 D 9.9610.18 10.07 10.15 10.25 E 10.01 10.23 10.12 10.21 10.31

All of the same approaches apply equally to the hypothetical of FIG. 1B.Again considering only target region 154 and the nozzles (1) and (2) oneach printhead (i.e. the nozzles that overlap with target region 154during a scan), it is possible to deposit 50.00 pL in two passes, forexample, with a first printhead pass in which printheads C and E firenozzle (1) and printheads B and C fire nozzle (2), and a secondprinthead pass in which printhead C fires nozzle (2). It is alsopossible to deposit 49.99 pL (clearly within an example target range of49.75 pL and 50.25 pL with high statistical accuracy) in a single pass,for example, with a printhead pass in which printheads C, D, and E firenozzle (1) and printheads B and E fire nozzle (2).

It should also be apparent that, optionally combined with scan pathoffsets, the use of alternate nozzle firing waveforms dramaticallyincreases the number of droplet volume combinations that can be achievedfor a given printhead, and these options are yet further increased bythe use of multiple printheads (or equivalently, multiple rows ofnozzles) as described above. For example, in the hypothetical exampleconveyed by the discussion of FIG. 1 above, a combination of fivenozzles with respective inherent ejection characteristics (e.g., dropletvolumes) and eight alternate waveforms could provide literally manythousands of different sets of possible droplet volume combinations.Optimizing sets of nozzle-waveform combinations, and selecting aparticular set of nozzle-waveform combinations for each target region(or for each row of print wells in an array) enables furtheroptimization of printing according to the desired criteria. Inembodiments that use multiple printheads (or rows of printhead nozzles),the ability to selectively offset those printheads/rows also furtherenhances the number of combinations that can be applied perprinthead/substrate scan. Once again, for these embodiments, given thatmultiple sets (of one or more) nozzle-waveform combinations canalternatively be used to achieve specified fill volumes, this embodimentselects a particular one of the “acceptable” sets for each targetregion, with this selection of the particular one across target regionsgenerally corresponding to the concurrent printing of multiple targetregions using multiple nozzles. That is, by varying parameters tominimize the time over which printing occurs, these embodiments eachenhance manufacturing throughput, and facilitate minimizing the numberof required printhead/substrate scans or “passes,” the raw distance ofrelative printhead/substrate movement along a particular dimension(s),or that help satisfy some other criteria.

Many other processes can be used or combined with the various techniquesintroduced above. For example, it is possible to “tune” the nozzle drivewaveform on a per-nozzle basis to reduce variation in per-nozzle dropletvolumes (e.g., shaping of the drive pulse, by changing drive voltage,rise or fall slopes, pulse width, decay time, number and respectivelevels of pulses used per droplet, and so forth).

While certain applications discussed in this document refer to fillvolumes in discrete fluid receptacles or “wells,” it is also possible touse the mentioned techniques to deposit a “blanket coating” having largegeographies relative to other structures of the substrate (e.g., such asrelative to transistors, pathways, diodes and other electroniccomponents). In such a context, fluidic ink carrying layer materials(e.g., that will be cured, dried or hardened in situ to form a permanentdevice layer) will spread to a certain extent, but will (given inkviscosity and other factors) still retain specific characteristicsrelative to other target deposition regions of the substrate. It ispossible to use the techniques herein in this context, for example, todeposit blanket layers such as encapsulation or other layers withspecific, localized control over ink fill volumes for each targetregion. The techniques discussed herein are not limited by thespecifically-presented applications or embodiments.

Other variations, advantages and applications from the techniquesintroduced above will be readily apparent to those skilled in the art.This is to say, these techniques can be applied to many different areasand are not limited to the fabrication of display devices or pixelateddevices. A print “well” as used herein refers to any receptacle of asubstrate that is to receive deposited ink, and thus has chemical orstructural characteristics adapted to constrain the flow of that ink. Aswill be exemplified for OLED printing below, this can include situationswere respective fluid receptacles are to each receive a respectivevolume of ink and/or a respective type of ink; for example, in a displayapplication where the mentioned techniques are used to deposit lightemitting materials of different colors, successive printing processescan be performed for each color, using respective printheads andrespective inks—in this case, each process could deposit “every thirdwell” in an array (e.g., for every “blue” color component), orequivalently, every well in a third array (which intersperses wells withoverlapping arrays for other color components). Each print well is anexample of one possible type of target region. Other variations are alsopossible. Note also that “rows” and “columns” are used in thisdisclosure without implying any absolute direction. For example, a “row”of print wells could extend the length of or width of a substrate, or inanother manner (linear or non-linear); generally speaking, “rows” and“columns” will be used herein to refer to directions that each representat least one independent dimension, but this need not be the case forall embodiments. Also, note that because modern printers can userelative substrate/printhead motion that involves multiple dimensions,relative movement does not have to be linear in path or speed, which isto say, printhead/substrate relative motion does not have to follow astraight or even a continuous path or constant velocity. Thus, a “pass”or “scan” of a printhead relative to a substrate simply refers to aniteration of depositing droplets using multiple nozzles over multipletarget regions that involves relative printhead/substrate motion. Inmany embodiments described below for a OLED printing process, however,each pass or scan can be a substantially continuous, linear motion, witheach ensuing pass or scan being parallel to the next, offset by ageometric step relative to one another. This offset, or geometric step,can be a difference in pass or scan starting position, average position,finishing position, or some other type of positional offset, and doesnot imply necessarily parallel scan paths. It is also noted that variousembodiments discussed herein speak of “concurrent” use of differentnozzles to deposit in different target regions (e.g., different rows oftarget regions); this term “concurrent” does not require simultaneousdroplet ejection, but rather, merely refers to the notion that duringany scan or pass, different nozzles or groups of nozzles can be used tofire ink into respective target regions on a mutually-exclusive basis.For example, a first group of one or more nozzles can be fired during agiven scan to deposit first droplets in a first row of fluid wells,while a second group of one or more nozzles can be fired during thissame given scan to deposit second droplets into a second row of fluidwells. The term “printhead” refers to a unitary or modular device havingone or more nozzles that are used to print (eject) ink toward asubstrate. A “printhead assembly” by contrast refers to an assembly ormodular element that supports one or more printheads as a group forcommon positioning relative to a substrate; thus, a printhead assemblyin some embodiments can include only a single printhead, whereas inother embodiments, such an assembly includes six or more printheads. Insome implementations, individual printheads can be offset relative toone another within such an assembly. Note that in a typical embodimentused for large scale manufacturing processes (e.g., television flatpanel displays), the printhead assembly can be quite large, encompassingmany thousands of print nozzles; depending on implementation, such anassembly can be large, with droplet measurement mechanisms discussedherein designed to articulate around such an assembly to obtain perdroplet measurements. For example, with a printhead assembly having sixprintheads and approximately 10,000 or more print nozzles, the printheadassembly can be “parked” within the printer, within anoff-(printing)axis service station, for various support operationsincluding droplet measurement.

With principal parts of several different embodiments thus laid out,this disclosure will be roughly organized as follows. FIGS. 2A-2E willbe used to introduce certain droplet measurement configurations forimaging large-scale printhead assemblies. These configurations canoptionally be integrated within a printer, for example, a flat paneldisplay fabrication device that prints ink material that will form apermanent thin film layer on a flat panel device substrate. In optionalimplementations, these configurations can use three dimensionalarticulation of part or all of the optics associated with dropletmeasurement, e.g., to articulate about a printhead assembly withmultiple printheads and thousands of ink jet nozzles which has beenparked in a service station of a printer. FIGS. 3A-4D will be used tointroduce some general principles relating to the nozzle consistencyissue, OLED printing/fabrication, and how embodiments address the nozzleconsistency issue. These techniques can optionally be used with thementioned droplet measurement configurations. FIGS. 5-7 will be used toexemplify software processes that can be used to plan dropletcombinations for each target region of the substrate. FIGS. 8A-B areused to illustrate principles associated with building a statisticalmodel of droplet volume for each nozzle/waveform combination, and forusing these models to produce a statistical model of aggregate ink fillfor each target region. These principles can optionally be used inconjunction with droplet measurement to reliably produce composite inkfills (i.e., through the use of planned droplet combinations) that meetspecified tolerance ranges with quantifiable certainty (e.g., with a 99%or better confidence per target region), notwithstanding nozzleconsistency issues. FIGS. 9A-10C are used to present some empiricaldata, that is, which demonstrates effectiveness of the mentioned planneddroplet combination techniques in improving target region fillconsistency. FIGS. 11-12 will be used to discuss an exemplaryapplication to OLED panel fabrication, and associated printing andcontrol mechanisms. FIGS. 13A-13C are used to discuss printhead offsetsthat can be used to vary droplet combinations that can be deposited witheach scan. FIGS. 14A-15D are used to further discuss different,alternate nozzle firing waveforms, applied to provide for differentdroplets volumes or combinations. FIGS. 16-17 will provide additionaldetail on the structure and configuration of an industrial printer whichincludes a droplet measurement device. FIGS. 18A and 18B willrespectively be used to discuss certain detailed embodiments of adroplet measurement system, for example, integrated with such anindustrial printer. FIG. 19 will be used to discuss techniques forhiding droplet measurement times behind other system processes, so as tomaximize production time. Finally, FIG. 20 will be used to discussanother embodiment of droplet measurement, including some specificprinciples relating to z-axis offset from a printhead and relatedcalibration, and measurement and correction of nozzle bow.

FIGS. 2A-2E are used to generally introduce techniques for per-nozzledroplet measurement.

More particularly, FIG. 2A provides an illustrative view depicting anoptics system 201 and a relatively large print head assembly 203; theprint head assembly has multiple printheads (205A/205B) each with amultitude of individual nozzles (e.g., 207), with hundreds-to-thousandsof nozzles present. An ink supply (not shown) is fluidically connectedwith each nozzle (e.g., nozzle 207), and a piezoelectric transducer(also not shown) is used to jet droplets of ink under the control of aper-nozzle electric control signal. The nozzle design maintains slightlynegative pressure of ink at each nozzle (e.g., nozzle 207) to avoidflooding of the nozzle plate, with the electric signal for a givennozzle being used to activate the corresponding piezoelectrictransducer, pressurize ink for the given nozzle, and thereby expeldroplets from the given nozzle.

In one embodiment, the control signal for each nozzle is normally atzero volts, with a positive pulse or signal level at a given voltageused for a specific nozzle to eject droplets (one per pulse) for thatnozzle; in another embodiment, different, tailored pulses (or other,more complex waveforms) can be used nozzle-to-nozzle. In connection withthe example provided by FIG. 2A, however, it should be assumed that itis desired to measure a droplet volume produced by a specific nozzle(e.g., nozzle 207) where a droplet is ejected downward from theprinthead (i.e., in the direction “h,” representing z-axis heightrelative to a three-dimensional coordinate system 208) to be collectedby a spittoon 209. Note that in a typical application, the dimension of“h” is typically on the order of one millimeter or less and that thereare thousands of nozzles (e.g., 10,000 nozzles) that are to haverespective droplets individually measured in this manner within anoperating printer. Thus, in order to optically measure each droplet withprecision (i.e., droplets originating from a specific one of thousandsof nozzles in a large printhead assembly environment, within theapproximately millimeter measurement window, as just described), certaintechniques are used in disclosed embodiments to precisely positionelements of the optics assembly 201, the printhead assembly 203, or bothrelative to one another for optical measurement.

In one embodiment, these techniques utilize a combination of (a) x-ymotion control (211A) of at least part of the optical system (e.g.,within dimensional plane 213) to precisely position a measurement area215 immediately adjacent to any nozzle that is to produce a droplet foroptical calibration/measurement and (b) below plane optical recovery(211B) (e.g., thereby permitting easy placement of the measurement areanext to any nozzle notwithstanding a large printhead surface area).Thus, in an exemplary environment having about 10,000 or more printnozzles, this motion system is capable of positioning at least part ofthe optical system in (e.g.) 10,000 or so discrete positions proximateto the discharge path of each respective nozzle of the printheadassembly. As will be discussed below, two contemplated opticalmeasurement techniques include shadowgraphy and interferometry. Witheach, optics are typically adjusted in position so that precise focus ismaintained on the measurement area so as to capture droplets in-flight(e.g., to effectively image the droplet's shadow in the case ofshadowgraphy). Note that a typical droplet may be on the order ofmicrons in diameter, so the optical placement is typically fairlyprecise, and presents challenges in terms of relative positioning of theprinthead assembly and measurement optics/measurement area. In someembodiments, to assist with this positioning, optics (mirrors, prisms,and so forth) are used to orient a light capture path for sensing belowthe dimensional plane 213 originating from the measurement area 215,such that measurement optics can be placed close to the measurement areawithout interfering with relative positioning of the optics system andprinthead. This permits effective positional control in a manner that isnot restricted by the millimeter-order deposition height h within whicha droplet is imaged or the large scale x and y width occupied by a printhead under scrutiny. With interferometry-based droplet measurementtechniques, separate light beams incident from different angles on asmall droplet creates interference patterns detectable from aperspective generally orthogonal to the light paths; thus, optics insuch a system capture light from an angle of approximatelyninety-degrees off of paths of the source beams, but also in a mannerthat utilizes below plane optical recovery so as to measure dropletparameters. Other optical measurement techniques can also be used. Inyet another variant of these systems, the motion system 211A isoptionally and advantageously made to be an xyz-motion system, whichpermits selective engagement and disengagement of the dropletmeasurement system without moving the printhead assembly during dropletmeasurement. Briefly introduced, it is contemplated in an industrialfabrication device having one or more large print head assemblies that,to maximize manufacturing uptime, each printhead assembly will be“parked” in a service station from time to time to perform one or moremaintenance functions; given the sheer size of the printhead and numberof nozzles, it can be desired to perform multiple maintenance functionsat once on different parts of the printhead. To this effect, in such anembodiment, it can be advantageous to move measurement/calibrationdevices around the printhead, rather than vice-versa. [This then permitsengagement of other non-optical maintenance processes as well, e.g.,relating to another nozzle if desired.] To facilitate these actions, theprinthead assembly can be optionally “parked,” with the systemidentifying a specific nozzle or range of nozzles that are to be thesubject of optical calibration. Once the printhead assembly or a givenprinthead is stationary, the motion system 211A is engaged to move atleast part of the optics system relative to the “parked” printheadassembly, to precisely position the measurement area 215 at a positionsuitable for detecting a droplet jetted from a specific nozzle; the useof a z-axis of movement permits selective engagement of light recoveryoptics from well below the plane of the printhead, facilitating othermaintenance operations in lieu of or in addition to optical calibration.Perhaps otherwise stated, the use of an xyz-motion system permitsselective engagement of a droplet measurement system independent ofother tests or test devices used in a service station environment. Notethat this structure is not required for all embodiments; for example, inconnection with FIGS. 16-17 below, a mechanism will be described thatpermits motion of both the measurement assembly and the printheadassembly, e.g. z-axis motion of the printhead assembly relative to ameasurement assembly having x-y motion for purposes of dropletmeasurement. Other alternatives are also possible, in which only theprinthead assembly moves and the measurement assembly is stationary orin which no parking of the printhead assembly is necessary.

Generally speaking, the optics used for droplet measurement will includea light source 217, an optional set of light delivery optics 219 (whichdirect light from the light source 217 to the measurement area 215 asnecessary), one or more light sensors 221, and a set of recovery optics223 that direct light used to measure the droplet(s) from themeasurement area 215 to the one or more light sensors 221. The motionsystem 211A optionally moves any one or more of these elements togetherwith spittoon 209 in a manner that permits the direction of post-dropletmeasurement light from the measurement area 215 around spittoon 209 to abelow-plane location, while also providing a receptacle (e.g., spittoon209) to collect jetted ink. In one embodiment, the light delivery optics219 and/or the light recovery optics 223 use mirrors that direct lightto/from measurement area 215 along a vertical dimension parallel todroplet travel, with the motion system moving each of elements 217, 219,221, 223 and spittoon 209 as an integral unit during dropletmeasurement; this setup presents an advantage that focus need not berecalibrated relative to measurement area 215. As noted by numeral 211C,the light delivery optics are also used to optionally supply sourcelight from a location below the dimensional plane 213 of the measurementarea, e.g., with both light source 217 and light sensor(s) 221 directinglight on either side of spittoon 209 for purposes of measurement, asgenerally illustrated. As noted by numerals 225 and 227, the opticssystem can optionally include lenses for purposes of focus, as well asphotodetectors (e.g., for non-imaging techniques that do not rely onprocessing of a many-pixeled “picture”). Note once again that theoptional use of z-motion control over the optics assembly and spittoonpermits optional engagement and disengagement of the optics system, andprecise positioning of measurement area 215 proximate to any nozzle, atany point in time while the printhead assembly is “parked.” Such parkingof the printhead assembly 203 and xyz-motion of the optics system 201 isnot required for all embodiments. For example, in one embodiment, laserinterferometry is used to measure droplet characteristics, with eitherthe printhead assembly (and/or the optics system) is moved within orparallel to the deposition plane (e.g., within or parallel to plane 213)to image droplets from various nozzles; other combinations andpermutations are also possible.

FIG. 2B provides flow of a process associated with droplet measurementfor some embodiments. This process flow is generally designated usingnumeral 231 in FIG. 2B. More specifically, as indicated by referencenumeral 233, in this particular process, the printhead assembly is firstparked, for example, in a service station (not shown) of a printer ordeposition apparatus. A droplet measurement device is then engaged (235)with the printhead assembly, for example, by selective engagement ofpart or all of an optics system through movement from below a depositionplane into a position where the optics system is capable of measuringindividual droplets. Per numeral 237, this motion relative of one ormore optics-system components relative to a parked printhead canoptionally be performed in x, y and z dimensions.

As alluded to previously, even a single nozzle and associated nozzlefiring drive waveform (i.e., pulse(s) or signal level(s) used to jet adroplet) can produce droplet volume, trajectory, and velocity thatvaries slightly from droplet to droplet. In accordance with teachingsherein, in one embodiment, the droplet measurement system, as indicatedby numeral 239, obtains n measurements per droplet of a desiredparameter, to derive statistical confidence regarding the expectedproperties of that parameter. In one implementation, the measuredparameter can be volume, whereas for other implementations, the measuredparameter can be flight velocity, flight trajectory or anotherparameter, or a combination of multiple such parameters. In oneimplementation, “n” can vary for each nozzle, whereas in anotherimplementation, “n” can be a fixed number of measurements (e.g., “24”)to be performed for each nozzle; in still another implementation, “n”refers to a minimum number of measurements, such that additionalmeasurements can be performed to dynamically adjust measured statisticalproperties of the parameter or to refine confidence. Clearly, manyvariations are possible. For the example provided by FIG. 2B, it shouldbe assumed that droplet volume is being measured, so as to obtain anaccurate mean representing expected droplet volume from a given nozzleand a tight confidence interval. This enables optional planning ofdroplet combinations (using multiple nozzles and/or drive waveforms)while reliably maintaining distributions of composite ink fills in atarget region about an expected target (i.e., relative to a composite ofdroplet means). As noted by optional process boxes 241 and 243,interferometry or shadowgraphy are contemplated optical measurementprocesses that ideally enable instantaneous or near instantaneousmeasurement and calculation of volume (or other desired parameter); withsuch fast-measurement, it becomes possible to frequently and dynamicallyupdate volume measurements, for example, to account for changes overtime in ink properties (including viscosity and constituent materials),temperature, power supply fluctuation and other factors. Building onthis point, shadowgraphy typically features capture of an image of adroplet, for example, using a high resolution CCD camera as a lightsensor mechanism; while droplets can be accurately imaged in a singleimage capture frame at multiple positions (e.g., using a strobed lightsource), image processing software typically involves a finite amount oftime to calculate droplet volume, such that imaging of a sufficientdroplet population from a large printhead assembly (e.g., with thousandsof nozzles) can take hours. Interferometry, which relies on multiplebinary light detectors and detection of interference pattern spacingbased on output of such detectors, is a non-imaging technique (i.e.,that does not require image analysis) and so produces droplet volumemeasurements many orders of time faster (e.g., 50×) than shadowgraphy orother techniques; for example, with a 10,000 nozzle printhead assembly,it is expected that large measurement populations for each of thethousands of nozzles can be obtained in minutes, rendering it feasibleto frequently and dynamically perform droplet measurement. As notedearlier, in one optional embodiment, droplet measurement (or measurementof other parameters, such as trajectory and/or velocity) can beperformed as a periodic, intermittent process, with the dropletmeasurement system being engaged according to a schedule, or in betweensubstrates (e.g., as substrates are being loaded or unloaded), orstacked against other assembly and/or other printhead maintenanceprocesses. Note that for embodiments that permit alternate nozzle drivewaveforms to be used in a manner specific to each nozzle, a rapidmeasurement system (e.g., interferometric system) readily permitsstatistical population development for each nozzle and for eachalternative drive waveform for that nozzle, thereby facilitating planneddroplet combinations of droplets produced by various nozzle-waveformpairings, as alluded to earlier. Per numerals 245 and 247, by measuringexpected droplet volume nozzle-by-nozzle (and/or by nozzle-waveformpairing-by-pairing) to a precision of better than 0.01 pL, it becomespossible to plan for very precise droplet combinations per targetdeposition region, where composite fills can also be planned to 0.01 pLresolution, and where target volumes can be kept within a specifiederror (e.g., tolerance) range of 0.5% of target volume or better; asindicated by numeral 247, the measurement populations for each nozzle oreach nozzle-waveform pairing are in one embodiment planned so as toproduce reliability distribution models for each such nozzle ornozzle-waveform pairing, i.e., with 3σ confidence (or other statisticalmeasure, such as 4σ, 5σ, 6σ, etc.) that is less than the specificationmaximum fill error. Once sufficient measurements are taken for variousdroplets, fills involving combinations of those droplets can beevaluated and used to plan printing (248) in the most efficient mannerpossible. As indicated by separation line 249, droplet measurement canbe performed with intermittent switching back and forth between activeprinting processes and measurement and calibration processes.

FIG. 2C illustrates flow 251 of one possible process associated with theplanning of droplet measurements per-nozzle (or per-nozzle-waveformpairing) and/or initialization of statistical data with which to modelbehavior of each nozzle. As indicated by numeral 253, data is in thisprocess first received that specifies a desired tolerance range, whichfor example can be established according to manufacturer specification.In one embodiment, for example, this tolerance or acceptability rangecan be specified as ±5.0% of a given target; in another embodiment,another range such as ±2.5%, ±2.0%, ±1.0%, ±0.6% or ±0.5% of a desiredtarget droplet size can be used. It is also possible to specify a rangeor a set of acceptable values in an alternate manner. Irrespective ofmethod of specification, dependent on the desired tolerance and dropletsystem measurement error, a threshold number of measurements is thenidentified (255). Note that as indicated above, this number can beselected to achieve a number of objectives: (a) obtaining a large enoughpopulation of droplet measurements so as to provide a reliable measureof the expected droplet parameter (e.g., mean volume, velocity ortrajectory); (b) obtaining a large enough population of dropletmeasurements so as to model variation in the droplet parameter (e.g.,standard deviation or a for the given parameter); and/or (c) obtainingenough data so as to identify nozzles or nozzle-waveform pairings withlarger than expected error for purposes of disqualifying the use ofparticular nozzles/nozzle-waveform pairings during a print process. Withany planned number of droplet measurements or desired measurementcriteria or related minimums thus defined, measurements are thenperformed (257) using a droplet measurement system 259 (for example,using optical techniques as discussed herein). The measurements for eachnozzle (or nozzle-waveform) are then performed until the specifiedcriteria are met, per process decision block 261. If the number ofmeasurements meets planned criteria, the method then ends per processblock 269. If additional measurements need to be performed, themeasurement process loops until sufficient measurements have beenobtained, as referenced in FIG. 2C.

FIG. 2C shows a number of exemplary process variations. First, asindicated by numeral 263, this measurement process is optionally appliedto all nozzles of a printhead assembly (and/or all possiblenozzle/waveform combinations). This need not be the case for allembodiments. For example, in one embodiment (see the discussion of FIGS.14A-15C, below), a potentially limitless number of drive waveformvariations can be used to influence parameters of a jetted droplet for agiven nozzle; instead of exhaustively testing each possible waveform, adroplet measurement process can experiment with a set of predeterminedwaveforms representing a wide distribution of the possible waveforms,with an iterative, interpolative search process used to select a smallnumber of waveforms (e.g., likely to produce a mean droplet volumespanning a range of ±10% of a desired droplet size). In anotherembodiment, if based on initial measurements, a given nozzle is deemeddefective (e.g., droplet volume having greater than 20% distributionfrom a desired mean), that nozzle (or nozzle-waveform pairing) can beoptionally excluded from further consideration. In yet another example,if print scans in practice are planned that do not use certain nozzles,it can be advantageous to perform dynamic additional dropletmeasurements for only nozzles that are actively used in plannedscanning, at least until some type of error or variance criteria isreached. Once again, many possibilities exist; function block 263 simplyindicates that applied processes do not have to involve all nozzles (ornozzle-waveform pairings). Second, numeral 265 indicates that in oneembodiment, the minimum criteria can involve a minimum threshold thatcan differ for each nozzle or nozzle-waveform pairing. To cite a fewexamples pertinent to this function, in one embodiment, dropletmeasurements are performed for a given nozzle or nozzle-waveformpairing, and a distribution spread measure (e.g., variance, standarddeviation or another measure) is computed, with measurements beyond araw threshold performed until the spread measure satisfies apredetermined criteria; as should be appreciated, if the minimum is,e.g., 10 droplet measurements per nozzle, and if 10 droplet measurementsfor a particular nozzle yields a larger than expected variance,additional measurements could uniquely be performed for the given nozzleuntil the desired spread is achieved (e.g., 3σ≤1.0% of mean volume) oruntil some maximum number of measurements had been performed. Such anembodiment for example, can result in different numbers of measurementsper nozzle, i.e., with measurement iterations planned to achieve someminimum criteria (e.g., minimum number of measurements and the spreadmeasure less than a threshold in this example). Third, as indicated bynumeral 267, it is also possible to use dead-reckoning in dropletmeasurement planning, e.g., to obtain “exactly 24” droplet measurementsper nozzle (or nozzle-waveform), or to obtain x number of measurementsper hour, and so forth. Finally, irrespective of measurements managementtechniques, it is possible to apply measurements to qualify (pass) ordisqualify certain nozzles or nozzle-waveform combinations. Again citinga possible implementation option, following performance of a thresholdnumber of measurements, certain nozzles or nozzle-waveforms could bequalified or disqualified based on measurement data, per numeral 270.For example, if an ideal droplet volume is 10.00 pL in one application,nozzles/nozzle-waveform pairings not producing a mean droplet volume of9.90 pL-10.10 pL could be immediately disqualified; the same approachcan be taken for statistical spread, e.g., following a minimum number ofmeasurements, any nozzle/nozzle-waveform pairing producing dropletspread (e.g., variance, standard deviation, etc.) of greater than 0.5%could be immediately disqualified, and so forth. Once again, manyimplementation examples exist.

FIG. 2D is a schematic view of one implementation of a dropletmeasurement system predicated on optical techniques, generallyreferenced by numeral 271. More particularly, a printhead 273 isillustrated in cross-section as having five enumerated print nozzles,arranged as a row of nozzles that will jet fluidic ink downward in thez-direction (as indicated by reference legend 274). A light source 275Ais arranged to the side of the printhead so as to illuminate ameasurement area 278 through which a droplet will pass for measurement;in the case of FIG. 2D, this measurement area (and part or all of theoptics system) are arranged so as to measure droplets originating fromnozzle (3) of the printhead. The light source 275A is depicted externalto one lateral side of the printhead 273 so as to generate a light path277 that will direct light into the light measurement area (i.e., withinmillimeter-order height, represented by the variable h, to illuminateany of multiple nozzles without interfering with the printhead 273. Asrepresented by numeral 275B, in one embodiment, the light source canalso instead be advantageously mounted below deposition plane 289 (andthe upper periphery of spittoon 286) so as to provide for relativelyeasy fixed-distance positioning of optics relative to the droplet pathfrom any nozzle; again, while five nozzles are depicted in FIG. 2D, inone embodiment, there are hundreds to thousands of nozzles, or more.Below deposition plane light generation, with optics used to directillumination to the droplet measurement area 278, facilitates easypositioning of the optics system relative to any nozzle of the depictedprinthead 273 and for selective engagement and disengagement of thedroplet measurement system (e.g., relative to an optional servicestation, as previously described). In the depicted example, a mirror285A is used to redirect light from the light source 275B so as to beincident with droplets within the measurement area 278 traveling fromthe printhead 273 toward the spittoon 286. Other means of positioningthe optics path relative to the light source 275B can also be used, suchas by way of non-limiting example, prisms, fiber optic cables and soforth. For an implementation where an imaging measurement technique isused (e.g., shadowgraphy), the light source 275A/275B can be a strobedthermal light source or a monochromatic source. Note that FIG. 2D alsoshows a light from a third originating position directed along path 275Cwhere the source is outside of the drawing page and directs light intoor out of the drawing page with or without the assistance of light pathrouting optics (e.g., along the y dimension depicted by the referencelegend 274); such a positioning framework can be used for example whereinterferometry is relied upon, with detection of an interference patternoccurring from a direction orthogonal to (or at another angle to) anillumination path. Irrespective of the relative arrangement of theillumination source, it should be noted that light is directed along alight path 277 and illumination plane 290 which is intermediate to theposition of the printhead 273 and the deposition plane 290, and thatmeasurement light (i.e., from the measured droplet) is routed by lightpath routing optics 285B from the imaging plane to a light detectormounted below deposition plane 289. Once again, this permits narrowdirection and focus of light notwithstanding a large printhead size andrelatively small height h. Also, as with light path routing optics 285A,mirrors, prisms, fiber optics, or other light redirection devices andtechniques can be used to effectuate this below-deposition-plane routingof light recovery. As seen in FIG. 2D, the measurement light is directedto focusing optics 279 (e.g., a lens) and on to a light detector 280.The distance of the light path between the focusing optics and themeasurement area is identified by the distance f, representing the focallength of the optics system. As alluded to earlier, it is desired thatdroplet measurement (depending on optics technology) provide precisefocus needed to properly image droplets and, to this effect, for thesystem represented by FIG. 2D, the light path routing optics 285B, thefocusing optics 279, the droplet measurement area 278, and the spittoon286 lens are all moved as an integral unit to measure droplets fromdifferent nozzles, as represented by depicted connection to a commonchassis 283. The light source 275A/275B and light source directionoptics, depending on embodiment, can optionally also be coupled to thischassis.

Note that in an interferometry-based system, also representedconceptually by FIG. 2D, the light source 275A/275B (or producing lightpath 275C) can be a laser, with beams split at some point along theoptical path into two or more different components, used to produce aninterference pattern. Additional specifics as to these optics, and theuse of multiple beams to create an interference pattern, will bediscussed further below in connection with FIG. 18B; for the time being,a laser source (including a light source for interferometry) should beassumed as encompassed by references 275A/275B/275C.

FIG. 2E illustrates another schematic view of an implementation of adroplet measurement system predicated on optical techniques, generallyreferenced by numeral 291. More specifically, the implementation seen inFIG. 2E relies on interferometry to measure droplet parameters (such asvolume). As before, this configuration relies upon a printhead 273 ameasurement area 278, σ chassis 283 and a spittoon 286. In thisembodiment, however, a laser is specifically used as the light source292 to generate light beams directed to the measurement area viaillumination path 293. Note that typically two or more beams aredirected in this manner, as will be explained further below. Aninterference pattern is generated in a droplet in the measurement area278, and this interference pattern is observed from a directionsubstantially orthogonal to the illumination path 293, as represented bynumeral 297. This same relationship (measurement from a direction notparallel with the illumination path) was also represented by FIG. 2D(e.g., using path 275C), but in FIG. 2E, the divergent measurement angleis such that measurement light is natively directed downward, below theplane of the measurement area 278. Note that a light detector 295 isnon-imaging in the sense that (while multiple light detectors aretypically used) the use of a camera is not required, and the use ofimage processing to identify droplet contours within a pixelated imageis not required, substantially improving speed of detection andmeasurement; that is, the interferometric approach simply measureschanges in an interference pattern as a droplet passes through a regionof coincident light beams, with droplet volume derivable from obtainedresults. The use of more than two light beams (or an increased number ofdetectors) facilitates measurement of droplet trajectory and velocityand other parameters. As before, the light source 292, spittoon 286 andlight detector 295 can be moved as one (i.e., with common chassis 283),facilitating preservation of precise optical path parameters. In oneimplementation, motion of the optics system is once again performed inthree dimensions relative to a “parked” printhead assembly, toselectively engage and disengage a droplet measurement device while theprinthead assembly is in a service station, and to easily and preciselyposition a droplet measurement device to measure any of thousands ofnozzle of a large scale printhead.

As noted earlier, with suitable configuration of a droplet measurementdevice or system, an industrial printer (e.g., used for OLED devicefabrication) can have nozzles and their consequent droplets repeatedlycalibrated, permitting the planning of very precise droplet combinationsin any target region. That is, the measurement device can be used toquickly develop accurate, tightly-grouped statistical distributions ofvolume for each nozzle and each waveform used for a nozzle, whichenables accurate planning of droplet combinations used to achievecomposite fills. In other embodiments, these same techniques are used tobuild models for droplet velocity and flight angle, such that models forthese parameters can be applied in the printing process.

Note that any of these various techniques (and any of the printing orcomposite fill techniques introduced in this disclosure) can bemanifested in different products and/or different manufacturing tiers.For example, FIG. 3A represents a number of different implementationtiers, collectively designated by reference numeral 301; each one ofthese tiers represents a possible discrete implementation of thetechniques introduced above. First, the techniques introduced above canbe embodied as instructions stored on non-transitory machine-readablemedia, as represented by graphic 303 (e.g., software for controlling acomputer or a printer). Second, per computer icon 305, these techniquescan be implemented as part of a computer or network, for example, withina company that designs or manufactures components for sale or use inother products. For example, the techniques introduced above can beimplemented as design software by a company that consults to, orperforms design for, a high definition television (HDTV) manufacturer;alternatively, these techniques could be used directly by such amanufacturer to make televisions (or display screens). Third, asintroduced earlier and exemplified using a storage media graphic 307,the techniques introduced earlier can take the form of printerinstructions, e.g., as stored instructions or data that, when actedupon, will cause a printer to fabricate one or more layers of acomponent dependent on the use of planned droplet aggregationtechniques, per the discussion above. Fourth, as represented by afabrication device icon 309, the techniques introduced above can beimplemented as part of a fabrication apparatus or machine, or in theform of a printer within such an apparatus or machine. For example, afabrication machine could be sold or customized in a manner wheredroplet measurement, and conversion of externally-supplied “layer data”is automatically converted by the machine (e.g., through the use ofsoftware) into printer instructions that will print using the techniquesdescribed here to transparently optimize/speed-up the printing process.Such data can also be computed off-line, and then reapplied on areproducible basis in a scalable, pipelined manufacturing process thatmanufactures many units. It is noted that the particular depiction ofthe fabrication device icon 309 represents one exemplary printer devicethat will be discussed below (e.g., in reference to FIGS. 11-12). Thetechniques introduced above can also be embodied as an assembly such asan array 311 of multiple components that will be separately sold; inFIG. 3 for example, several such components are depicted in the form ofan array of semi-finished flat panel devices, which will later beseparated and sold for incorporation into end consumer products. Thedepicted devices may have, for example, one or more layers (e.g., colorcomponent layers, semiconductor layers, encapsulation layers or othermaterials) deposited in dependence on the methods introduced above. Thetechniques introduced above can also be embodied in the form ofend-consumer products as referenced, e.g., in the form of displayscreens for portable digital devices 313 (e.g., such as electronic padsor smart phones), as television display screens 315 (e.g., HDTVs), orother types of devices. For example, FIG. 3A uses a solar panel graphic317 to denote that the processes introduced above can be applied toother forms of electronic devices, e.g., to deposit per-target regionstructures (such as one or more layers of individual cells that make upan aggregate device) or blanket layers (e.g., an encapsulation layer fora TV or solar panel). Clearly, many examples are possible.

The techniques introduced above, without limitation, can be applied toany of the tiers or components illustrated in FIG. 3A. For example, oneembodiment of the techniques disclosed herein is an end consumer device;a second embodiment of the techniques disclosed herein is an apparatuscomprising data to control the fabrication of a layer using combinationsof specific nozzle volumes to obtain specific per-target region fills;nozzle volumes can be determined in advance, or measured and applied insitu. Yet another embodiment is a deposition machine, for example, thatuses a printer to print one or more inks using techniques introducedabove. These techniques can be implemented on one machine or more thanone machine, e.g., a network or series of machines where different stepsare applied at different machines. All such embodiments, and others, canindependently or collectively make use of techniques introduced by thisdisclosure.

As represented by FIG. 3B, in one application, a printing process can beused to deposit one or more layers of material onto a substrate. Thetechniques discussed above can be used to generate printer controlinstructions (e.g., an electronic control file that can be transferredto a printer) for subsequent use in fabricating a device. In onespecific application, these instructions can be geared for an inkjetprinting process useful in printing a layer of a low-cost, scalableorganic light-emitting diode (“OLED”) display. More specifically, thementioned techniques can be applied to deposit one or morelight-emitting or other layers of such an OLED device, for example,“red” “green” and “blue” (or other) pixelated color components or otherlight-emitting layers or components of such a device. This exemplaryapplication is non-limiting, and the mentioned techniques can be appliedto fabrication of many other types of layers and/or devices, whether ornot those layers are light-emitting and whether or not the devices aredisplay devices. In this exemplary application, various conventionaldesign constraints of inkjet printheads provide challenges to theprocess efficiency and film coating uniformity of various layers of anOLED stack that can be printed using various inkjet printing systems.Those challenges can be addressed through the teachings herein.

More specifically, FIG. 3B is a plan view of one embodiment of a printer321. The printer includes a printhead assembly 323 that is used todeposit fluidic ink onto a substrate 325. Unlike printers that printtext and graphics, the printer 321 in this example is used in amanufacturing process to deposit fluidic ink that will have a desiredthickness. That is, in a typical manufacturing application, the inkcarries a material that will be used to form a permanent layer of afinished device, where that layer has a specifically-desired thickness.The thickness of the layer produced by deposition of fluidic ink isdependent on the volume of applied ink. The ink typically features oneor more materials that will form part of the finished layer, formed asmonomer, polymer, or a material carried by a solvent or other transportmedium. In one embodiment, these materials are organic. Followingdeposition of the ink, the ink is dried, cured or hardened to form thepermanent layer; for example, some applications use an ultraviolet (UV)cure process to convert a liquid monomer into a solid polymer, whileother processes dry the ink to remove the solvent and leave thetransported materials in a permanent location. Other processes are alsopossible. Note that there are many other variations that differentiatethe depicted printing process from conventional graphics and textapplications; for example, in some embodiments, deposition of thedesired materials layers is performed in an environment controlled toeither regulate the ambient atmosphere to be something other than air,or otherwise to exclude unwanted particulates. For example, as will bedescribed further below, one contemplated application uses a fabricationmechanism that encloses the printer 321 within a gas chamber, such thatprinting can be performed in the presence of a controlled atmospheresuch as an inert environment including, for example, but not limited by,nitrogen, any of the noble gases, and any combination thereof.

As further seen in FIG. 3B, the printhead assembly 323 includes a numberof nozzles, such as nozzle 327. Note that in FIG. 3B, for ease ofillustration, the printhead assembly 323 and nozzles are depicted asopening out of the top of the page, but in fact, these nozzles facedownward toward the substrate and are hidden from view from theperspective of FIG. 3B (i.e., FIG. 3B shows what in effect is a cut-awayview of the printhead assembly 323). The nozzles are seen to be arrangedin rows and columns (such as exemplary row 328 and column 329), althoughthis is not required for all embodiments, i.e., some implementations useonly a single row of nozzles (such as row 328). In addition, it ispossible for rows of nozzles to be disposed on respective printheads,with each printhead being (optionally) individually offsettable relativeto one another, as introduced above. In an application where the printeris used to fabricate part of a display device, for example, materialsfor each of respective red, green and blue color components of a displaydevice, the printer will typically use dedicated printhead assembliesfor each different ink or material, and the techniques discussed hereincan be separately applied to each corresponding printhead or printheadassembly.

FIG. 3B illustrates one printhead assembly 323 (i.e., with one or moreindividual printheads not separately depicted). The printer 321 includesin this example two different motion mechanisms that can be used toposition the printhead assembly 323 relative to the substrate 325.First, a traveler or carriage 331 can be used to mount the printheadassembly 323 and to permit relative motion as denoted by arrows 333.This motion mechanism also can optionally convey the printhead assembly323 to a service station, if present; such a service station isrepresented by numeral 334 in FIG. 3B. Second, however, a substratetransport mechanism can be used to move the substrate relative to thetraveler, along one or more dimensions. For example, as denoted byarrows 335, the substrate transport mechanism can permit movement ineach of two orthogonal directions, such as in accordance with x and yCartesian dimensions (337), and can optionally support substraterotation. In one embodiment, the substrate transport mechanism comprisesa gas floatation table used to selectively secure and permit movement ofthe substrate on a gas bearing. Note further that the printer optionallypermits rotation of the printhead assembly 323 relative to the traveler331, as denoted by rotation graphic 338. Such rotation permits theapparent spacing and relative configuration of the nozzles 327 to bechanged relative to the substrate; for example, where each target regionof the substrate is defined to be a specific area, or to have a spacingrelative to another target region, rotation of the printhead assemblyand/or the substrate can change the relative separation of the nozzlesin a direction along or perpendicular to a scan direction. In anembodiment, the height of the printhead assembly 323 relative to thesubstrate 325 can also be changed, for example, along a z Cartesiandimension that is into and out of the direction of view of FIG. 3B.

Two scan paths are respectively illustrated by directional arrows 339and 340 in FIG. 3B. Briefly, the substrate motion mechanism moves thesubstrate back and forth in the direction of arrows 339 and 340 as theprinthead moves in geometric steps or offsets in the direction of arrows333. Using these combinations of movements, the nozzles of the printheadassembly can reach any desired region of the substrate to deposit ink.As referenced earlier, the ink is deposited on a controlled basis intodiscrete target regions of the substrate. These target regions can bearrayed, that is, arranged in rows and columns such as optionally alongthe depicted y and x dimensions, respectively. Note that the rows ofnozzles (such as row 328) are seen in this FIG. perpendicular to therows and columns of target regions, i.e., such that a row of nozzlessweeps with each scan along the direction of rows of target regions,traversing each of the columns of target regions of the substrate (forexample, along direction 339). This need not be the case for allembodiments. For efficiency of motion, the subsequent scan or pass thenreverses this direction of motion, addressing the columns of targetregions in reverse order, that is, along direction 340.

Arrangement of the target regions in this example is depicted by ahighlighted region 341, which is seen in expanded view to the right sideof the FIG. That is, two rows of pixels, each pixel having red, greenand blue color components, are each represented by numeral 343, whereascolumns of pixels orthogonal to the scan direction (339/340) are eachrepresented by numeral 345. In the upper left-most pixel, the red, greenand blue color components are seen to occupy distinct target regions347, 349 and 351 as part of respective, overlapping arrays of regions.Each color component in each pixel can also have associated electronics,for example as represented by numeral 353. Where the device to befabricated is a backlit display (for example, as part of aconventional-type LCD television), these electronics can controlselective masking of light that is filtered by the red, green and blueregions. Where the device to be fabricated is a newer type display, thatis where red, green and blue regions directly generate their own lighthaving corresponding color characteristics, these electronics 353 caninclude patterned electrodes and other material layers that contributeto the desired light generation and light characteristics.

FIG. 3C provides a close-up, cross-sectional view of a printhead 373 andsubstrate 375, taken relative to the printhead assembly of FIG. 3B fromthe perspective of lines C-C. More specifically, numeral 371 generallydenotes the printer, while numeral 378 represents a row of print nozzles377. Each nozzle is designated using a parenthetical number, e.g., (1),(2), (3), etc. A typical printhead typically has plural such nozzles,for example, 64, 128 or another number; in one embodiment, there can be1,000-10,000 nozzles, or more, arranged in one or more rows. As notedearlier, the printhead in this embodiment is moved relative to thesubstrate to effectuate geometric steps or offsets between scans, in thedirection referenced by arrows 385. Depending on the substrate motionmechanism, the substrate can be moved orthogonal to this direction(e.g., into and out of the page, relative to the view of FIG. 3C) and insome embodiments, also in the direction represented by arrows 385. Notethat FIG. 3C also shows a column 383 of respective target regions 379 ofthe substrate, in this case, arranged as “wells” that will receivedeposited ink and retain the deposited ink within structural confines ofthe respective well. It will be assumed for purposes of FIG. 3C thatonly one ink is represented (e.g., each depicted well 379 representsonly one color of a display, such as the red color component, with othercolor components and associated wells not being shown). Note that thedrawing is not true to scale, e.g., the nozzles are seen to be numberedfrom (1) to (16) while the wells are seen to be lettered from (A) to(ZZ), representing 702 wells. In some embodiments, the nozzles willalign to respective wells, such that the depicted printhead with 16nozzles would deposit ink in the direction of arrows 381 in as many as16 wells at the same time using scans of relative printhead/substratemotion that are into and out of the page from the perspective of FIG.3C. In other embodiments, as mentioned earlier (e.g., with reference toFIG. 1B), nozzle density will be much greater than target regiondensity, and with any scan or pass, a subset of nozzles (e.g., a groupof one to many, dependent on which nozzles traverse each target region)will be used for deposition into each respective target region. Forexample, again using an illustrative example of sixteen nozzles, itcould be that nozzles (1)-(3) can be used to deposit ink in a firsttarget region and nozzles (7-10) can be concurrently used to deposit inkin a second target region, on a mutually-exclusive basis for the givenpass.

Conventionally, a printer might be operated to use the depicted sixteennozzles to concurrently deposit ink in as many as sixteen rows of wells,moving back and forth with ensuing scans as necessary, until e.g. fivedroplets were deposited in each well, with the printhead being advancedas necessary using a fixed step that is an integer multiple of a widthof the swath traversed by the scan. The techniques provided by thisdisclosure, however, make use of the inherent variation in dropletvolumes produced by different nozzles, in combinations calculated toproduce a specific fill volume for each well. Different embodiments relyon different techniques to achieve these combinations. In oneembodiment, the geometric step is varied to achieve the differentcombinations, and is free to be something other than an integer multipleof the width described by the printhead swath. For example, ifappropriate to depositing selected sets of droplet combinations in therespective wells 379 of FIG. 3C, the geometric step could be 1/160^(th)of the swath of the printhead, in effect, representing a relativedisplacement between printhead and substrate of a spacing of one tenthof a one row of wells in this example. The next offset or geometric stepcould be different, as appropriate to the particular combination ofdroplets desired in each well, for example, a hypothetical offset of5/16ths of the printhead swath, corresponding to an integer spacing ofwells; this variation could continue with both positive and negativesteps as necessary to deposit ink to obtain the desired fill volumes.Note that many different types or sizes of offsets are possible and thatstep size need not be fixed from scan-to-scan or be a specific fractionof well spacing. In many manufacturing applications, however, it isdesired to minimize printing time, in order to maximize rate ofproduction and minimize per-unit manufacturing costs as much aspossible; to this end, in specific embodiments, printhead motion isplanned and sequenced in a manner to minimize the total number of scans,the total number of geometric steps, the size of offsets or geometricsteps, and the cumulative distance traversed by the geometric steps.These or other measures can be used individually, together, or in anydesired combination to minimize total printing time. In embodimentswhere independently offsettable rows of nozzles are used (e.g., multipleprintheads), the geometric step can be expressed in part by the offsetbetween printheads or nozzle rows; such offset, combined with overalloffset of the printhead component (e.g., a fixed step for a printheadassembly) can be used to effectuate variable-size geometric steps andthus deposit droplet combinations into each well. In embodiments wherevariation in nozzle drive waveform is used alone, conventional, fixedsteps can be used, with droplet volume variation effectuated usingmultiple printheads and/or multiple printhead passes. As will be notedbelow, in one embodiment, nozzle drive waveforms can be programmed foreach nozzle in between droplets, thus permitting each nozzle to produceand contribute respective droplet volumes per well within a row ofwells.

FIGS. 4A-4D are used to provide additional detail regarding reliance onspecific droplet volumes in achieving desired fill volumes.

FIG. 4A presents an illustrative view 401 of a printhead 404 and tworelated diagrams seen below the printhead 401. The printhead isoptionally used in an embodiment that provides non-fixed geometric stepsof printhead relative to substrate, and so numeral 405 is used to denoteoffsets that align specific printhead nozzles (e.g., 16 total nozzleswith nozzles (1)-(5) depicted in the FIG.) with different target regions(five in this example, 413, 414, 415, 416 and 417). Harkening back tothe example of FIG. 1A, if nozzles (1)-(16) respectively produce dropletvolumes of 9.80, 10.01, 9.89, 9.96, 10.03, 9.99, 10.08, 10.00, 10.09,10.07, 9.99, 9.92, 9.97, 9.81, 10.04 and 9.95 pL of fluidic ink (e.g.,mean droplet volumes), and if it is desired to deposit 50.00 pL pertarget region, ±0.5 percent of this value, the printhead could be usedto deposit droplets in five passes or scans, respectively usinggeometric steps of 0, −1, −1, −2 and −4, resulting in (expected mean)total fill values per region of 49.82, 49.92, 49.95, 49.90 and 50.16 pL,as depicted in the FIG; this is clearly within the desired tolerancerange of 49.75-50.25 pL for each of the depicted target regions. Everystep in this example is expressed on an incremental basis relative toprevious position, although it is possible to use other measures aswell. Depending on variation in expected per-droplet volumes, it isstill possible to virtually guarantee that fills will conform to thedesired tolerance range; for example, by taking many dropletmeasurements as referenced above (e.g., 20-30 droplet measurements pernozzle, or more), the expected variance of each droplet volume can bemade quite small, permitting high confidence in the distribution ofexpected composite volume. Thus, as seen, the combining of droplets in adeliberate manner that depends on respective droplet volumes and thedesired fill for each target region can be used to achieve precise,regulated fills, with a high degree of reliability.

Note that this same FIG. can be used to represent nozzle drive waveformvariation and/or the use of multiple printheads. For example, if thenozzle references (1)-(16) refer to droplet volumes for a single nozzleproduced by sixteen different drive waveforms (i.e., using waveforms1-16), the per-region fill volumes can in theory be obtained simply byusing different drive waveforms, for example, waveform nos. 1, 2, 3, 5and 9 for target region 413. In practice, since process variations canresult in different per-nozzle characteristics, the system would measuredroplet volumes for each nozzle for each waveform, and wouldintelligently plan droplet combinations on this basis. In an embodimentwhere the nozzle references (1)-(15) refer to multiple printheads (e.g.,references (1)-(5) referring to a first printhead, references (6)-(10)referring to a second printhead and references (11)-(15) referring to athird printhead), offsets between printheads can be used to reduce thenumber of passes or scans; for example, the right-most target region 417could have three droplets deposited in one pass, including dropletvolumes of 10.03, 10.09 and 9.97 pL (printhead (1), 0 offset; printhead(2), +1 offset; and printhead (3), +2 offset). It should be apparentthat the combination of these various techniques facilitates manypossible combinations of specific volume droplets to achieve specificfill volumes within a tolerance range. Note in FIG. 4A that the variancein the aggregate ink fill volumes amongst target regions is small andwithin tolerance, i.e., within a range of 49.82 pL to 50.16 pL.

FIG. 4B shows an illustrative view 421 of a series of printhead scans,with each scan perpendicular to the direction of arrows 422, withnozzles represented by a different rectangle or bar, such as referencedby numerals 423-430. In connection with this FIG., it should be assumedprinthead/substrate relative motion is advanced in a sequence ofvariable-size geometric steps. Note again that, typically, each stepwill designate a scan that sweeps multiple columns of target regions(e.g., pixels) beyond a single column of five regions represented on theplane of the drawing page (and represented by numerals 413-417). Scansare shown in order from top-to-bottom, including a first scan 423 wherethe printhead is seen displaced to the right relative to the substrate,such that only nozzles (1) and (2) are aligned with target regions 416and 417, respectively. Within each print scan depiction (such as box423), circles represent each nozzle either with a solid black fill, todenote that the nozzle is to be fired when that nozzle is over thespecifically-depicted target region during the scan, or “hollow,” thatis, with a white fill, to denote that the nozzle is not to be fired atthe pertinent time (but may be for other target regions encountered onthe scan). Note that, in this embodiment, each nozzle is fired on abinary basis, i.e., each nozzle is either fired or not according to anyadjustable parameters, e.g., to deposit for each target regionencountered during the scan a predetermined droplet volume. This“binary” firing scheme can optionally be employed for any of theembodiments described herein (that is, e.g., in embodiments wheremultiple firing waveforms are used, with waveform parameters beingadjusted in between droplets). In the first pass 423, it is seen thatnozzle (1) is fired to deposit a 9.80 pL droplet into thesecond-to-right-most target region while nozzle (2) is fired to deposita 10.01 pL droplet into right-most target region 417. The scan continuesto sweep other columns of target regions (e.g., other rows of pixelwells), depositing ink droplets as appropriate. After the first pass 423is completed, the printhead is advanced by a geometric step of −3, whichmoves the printhead left relative to the substrate, such that nozzle (1)will now traverse target region 413 during a second scan 424 in adirection opposite to the first scan. During this second scan 424,nozzles (2), (3), (4) and (5) will also respectively traverse regions414, 415, 416 and 417. It is seen by the black-filled circles that, atthe appropriate time, nozzles (1), (2), (3) and (5) will be fired torespectively deposit droplet volumes of 9.80 pL, 10.01 pL, 9.89 pL and10.03 pL, corresponding to inherent characteristics of nozzles (1), (2),(3) and (5). Note also that in any one pass, the nozzles in a row ofnozzles used to deposit ink will do so on a mutually-exclusive basisinto respective target regions, e.g., for pass 424, nozzle (1) is usedto deposit ink into target region 413 (but none of target regions414-417), nozzle (2) is used to deposit ink in target region 414 (butnone of regions 413 or 415-417), nozzle (3) is used to deposit ink intarget region 415 (but none of regions 413-414 or 416-417) and nozzle(5) is used to deposit ink in target region 417 (but none of regions413-416). A third scan, denoted using numeral 425, advances theprinthead effectively by one row of target regions (−1 geometric step),such that nozzles (2), (3), (4), (5) and (6) will traverse regions 413,414, 415, 416 and 417, respectively during the scan; solid-fill nozzlegraphics denote that during this pass, each of nozzles (2)-(6) will beactuated to fire droplets, respectively producing expected dropletvolumes of 10.01, 9.89, 9.96, 10.03 and 9.99 pL.

If the print process was stopped at this point in time, region 417 wouldfor example have a fill of 30.03 pL (10.01 pL+10.03 pL+9.99 pL)corresponding to three droplets, whereas region 413 would have a fill of19.81 pL (9.80 pL+10.01 pL), corresponding to two droplets. Note thatthe scan pattern in one embodiment follows the back and forth patternrepresented by arrows 339 and 340 of FIG. 3B. Ensuing passes 426-430across these target regions (or scans of multiple columns of multiplesuch regions) respectively deposit: (a) 10.01 pL, 0.00 pL, 0.00 pL,10.08 pL and 10.09 pL droplets in region 413, corresponding to passes bynozzles (2), (3), (4), (7) and (9) in successive scans; (b) 0.00 pL,0.00 pL, 10.03 pL, 10.00 pL and 10.07 pL droplets in region 414,corresponding to respective passes by nozzles (3), (4), (5), (8) and(10) in successive scans; (c) 9.89 pL, 9.96 pL, 10.03 pL, 9.99 pL, 10.09pL and 0.00 pL droplets in region 415, corresponding to passes bynozzles (4), (5), (6), (9) and (11) in successive scans; (d) 0.00 pL,9.99 pL, 10.08 pL, 10.07 pL and 0.00 pL droplets in region 416,corresponding to passes by nozzles (5), (6), (7), (10) and (12) insuccessive scans; and (e) 9.99 pL, 0.00 pL, 10.00 pL, 0.00 pL and 0.00pL droplets in region 417, corresponding to passes by nozzles (6), (7),(8), (11) and (13) in successive scans. Again, note that nozzles in thisexample are used with only a single firing waveform (i.e., such thattheir droplet volume characteristics do not change from scan to scan)and on a binary basis, e.g., in the fifth scan 427, nozzle (7) is notfired, producing no droplet (0.00 pL) for region 417, while on theensuing scan, it is fired, producing a 10.08 pL droplet for region 416.

As seen in a graph at the bottom most portion of the page, thishypothetical scanning process produces expected aggregate fills of 49.99pL, 50.00 pL, 49.96 pL, 49.99 pL and 50.02 pL, easily within the desiredrange of a target value (50.00 pL) plus or minus ½ percent (49.75pL-50.25 pL). Note that in this example, nozzles were used to depositink into multiple target regions on a generally concurrent basis foreach scan, with particular combinations of droplet volumes for eachdepicted region (i.e., as identified by the graphics at numerals413-417) planned so that multiple droplets could be deposited in eachtarget region with many of the passes. The eight depicted passestogether correlate with particular sets (or a particular combination) ofdroplet volumes that produce a fill volume within the specifiedtolerance range (for example, combinations of droplets from nozzles (1),(2), (2), (7) and (9) in the case of region 413), but other sets ofpossible droplets could have been also possibly used. For example, forregion 413, it would have alternatively been possible to use fivedroplets from nozzle (2) (5×10.01 pL=50.05 pL); this alternative wouldhave been inefficient, however, as additional scans would have beenrequired because (for example) nozzle (3) (9.89 pL) could not have beenextensively used on a concurrent basis during this time (i.e., theresult from five droplets from this nozzle would have been 5×9.89=49.45pL, outside the desired tolerance range). In the example relayed by FIG.4B, the particular scans and their sequence were chosen so as to useless print time, a smaller number of passes, smaller geometric steps andpotentially small aggregate geometric step distance, or according tosome other criteria. Note that the depicted example is used fornarrative discussion only, and that it might be possible to furtherreduce the number of scans using the presented droplet volumes to fewerthan eight scans to obtain target fill. In some embodiments, the scanprocess is planned in a manner that avoids a worst-case scenario withthe number of scans required (e.g., one scan per row of target regionswith the printhead rotated by ninety degrees). In other embodiments,this optimization is applied to a degree based on one or more maximumsor minimums, for example, planning scans in a manner that results in thefewest number of scans possible given all possible droplet combinationsfor each target region for a given ink.

FIG. 4C presents a diagram similar to FIG. 4B, but which corresponds tothe use of different nozzle-drive waveforms for each nozzle. As shouldbe appreciated, in an ink jet printhead, ink is typically ejected usinga piezoelectric actuator, which expands and contracts a fluid reservoirin order to expel ink from a respective print nozzle. Ink is usuallymaintained in the reservoir under slight negative pressure to avoidflooding the nozzle plate, with a voltage pulse applied to the actuatorto eject a droplet with properties that depend on the size and shape ofthe voltage pulse. Different pulse characteristics can thus result indifferent volume, velocity and other characteristics of the ejecteddroplet. In FIG. 4C, it should be assumed that different preplannedvoltage pulse waveforms have been determined to produce a series ofdifferent droplet volumes (and associated droplet volume probabilitydistributions). Scanning is generally referenced by numeral 441, witheach of scans 443-447 occurring in a direction perpendicular to bars443-447; within each scan bar (e.g., box 443) a numeral designationrepresents a particular printhead nozzle and a letter designationrepresents a different waveform for the particular nozzle. For example,reference “1-A” denotes a first drive waveform “A” used for an actuatorfor nozzle (1) whereas reference “1-C” denotes a third drive waveform“C” used for the actuator for nozzle (1). Note that during a calibrationprocedure, any desired number of waveforms can be tested to select awaveform that produces an expected droplet volume (or set of multipledroplets) matching an ideal target droplet volume. In FIG. 4C, forexample, testing of multiple waveforms for nozzle (1) might yield aresult that two specific waveforms (e.g., “A” and “C” produce expecteddroplet volumes close to a desired 10.00 pL mean, e.g., 9.94 pL and10.01 pL means, respectively). That is, if an expected mean cannot beproduced through testing which exactly matches an ideal droplet volume(e.g., 10.00 pL), then two or more waveforms can be selected whichbracket the desired idealized volume, for example, 9.94 pL/10.01 pL,9.99 pL/10.01 pL, 10.03 pL/9.95 pL, and 9.95/10.04 pL as depicted fornozzles (1), (3), (4) and (5). Much as with the examples above,different droplets can then be combined using the different nozzle drivewaveforms to specifically plan aggregate fills for each target regionwhich are within desired tolerance. Note that for the example of FIG.4C, it is not necessary to offset the printhead assembly between scansto achieve these combinations; in many embodiments, however, the use ofmultiple nozzle waveforms can be combined with fractional-swath-widthoffsets to develop many possible droplet combinations that can be usedto produce target fills using a minimal number of scans (and thus,minimal per-substrate print time). In FIG. 4C, the depicted process isseen to produce hypothetical fills that are very tightly grouped, e.g.,49.99 pL-50.02 pL expected fill volumes.

FIG. 4D presents an illustrative view 471 of a printhead 474 and tworelated diagrams seen below the printhead 474, in analogy to FIG. 4A,but here having nozzles that are not specially aligned to specificwells. The printhead is optionally used in an embodiment that providesnon-fixed geometric steps of printhead relative to substrate, and sonumeral 472 is used to denote offsets that align specific printheadnozzles (e.g., 16 total nozzles with nozzles (1)-(5) depicted in theFIG.) with different target regions (two in this example, 474 and 475).Following again the hypothetical of FIG. 4A, if nozzles (1)-(16)respectively produce expected droplet volumes of 9.80, 10.01, 9.89,9.96, 10.03, 9.99, 10.08, 10.00, 10.09, 10.07, 9.99, 9.92, 9.97, 9.81,10.04 and 9.95 pL of fluidic ink, and if it is desired to deposit 50.00pL per target region, ±0.5 percent of this value, the printhead could beused to deposit droplets in three passes or scans, respectively usinggeometric steps of 0, −1, and −3, and firing one or two drops into eachtarget region per scan. This would result in total fill values perregion of 49.93 and 50.10, as depicted in the FIG, which is againclearly within the desired tolerance range of 49.75-50.25 pL for each ofthe depicted target regions. Thus, as seen, the same approach appliesequally to the case of nozzles that are not aligned to the wells, andcombining of droplets in a deliberate manner that depends on respectivedroplet volumes and the desired fill for each target region can be usedto achieve precise, regulated fills. Furthermore, just as describedabove for the hypothetical of FIG. 4A, this same FIG. can be used torepresent nozzle drive waveform variation and/or the use of multipleprintheads. For example, if the nozzle references (1)-(16) refer todroplet volumes for a single nozzle produced by sixteen different drivewaveforms (i.e., using waveforms 1-16), the per-region fill volumes canin theory be obtained simply by using different drive waveforms. One ofordinary skill in the art can see that the same approaches as describedabove with reference to FIGS. 4B-4C also apply equally to the case ofnozzles that are not specially aligned to the wells, i.e., with groupsof one or more nozzles being used for concurrent droplet deposition intorespective wells. Note finally that FIGS. 4A-D also represent relativelysimple examples; in a typical application, there may be hundreds tothousands of nozzles, and millions of target regions. For example, in anapplication where the disclosed techniques are applied in thefabrication of each pixel color component of a current high-definitiontelevision screen (e.g., pixels each having red, green and blue wells,with pixels arranged in 1080 horizontal lines of vertical resolution and1920 vertical lines of horizontal resolution), there are approximatelysix million wells that might receive ink (i.e., three overlapping arrayseach of two million wells). Next generation televisions are expected toincrease this resolution by a factor of four or more. In such a process,to improve the speed of printing, printheads may use thousands ofnozzles for printing, e.g., there will typically be a staggering numberof possible print process permutations. The simplified examplespresented above are used to introduce concepts but it should be notedthat, given the staggering numbers presented in a typical combination,permutations represented by a real-life television application are quitecomplex, with print optimization typically being applied by software andusing complex mathematical operations. FIGS. 5-7 are used to providenon-limiting examples of how these operations can be applied.

An exemplary process for planning printing is introduced by FIG. 5. Thisprocess and associated methods and devices are generally referencedusing the numeral 501.

More specifically, the droplet volume for each nozzle (and for eachnozzle for each waveform if multiple drive waveforms are applied) isspecifically determined (503). Such measurement can be performed forexample using a variety of techniques, including without limitation anoptical-imaging or laser-imaging or non-imaging device built into aprinter (or a factory-resident machine) that measures droplets duringflight (e.g., during a calibration printing operation or a live printingoperation) and that calculates volume with precision based on dropletshape, velocity, trajectory and/or other factors. In specificembodiments, as mentioned, each measurement is only approximatelyaccurate, as even droplet volume from a single nozzle produced using asingle drive waveform can vary from droplet-to-droplet. To this effect,droplet measurement techniques can be used to develop a statisticalmodel for droplet from each nozzle and for each nozzle-waveformcombination, each specific droplet volumes expressed as a mean expecteddroplet volume from a given nozzle and a given nozzle drive waveform.Other measurement techniques can also be used including printing ink andthen using post-printing imaging or other techniques to calculateindividual droplet volumes based on pattern recognition. Alternatively,identification can be based on data supplied by a printer or printheadmanufacturer, for example, based on measurements taken at a factory wellprior to the fabrication process and supplied with a machine (oron-line). In some applications, droplet volume characteristics canchange over time, for example, dependent on ink viscosity or type,temperature, nozzle clogging or other degradation, or because of otherfactors; therefore, in one embodiment, droplet volume measurement can bedynamically performed in situ, for example, upon power up (or atoccurrence of other types of power cycle events), with each new printingof a substrate, upon expiration of a predetermined time or on anothercalendared or uncalendared basis. In one embodiment, such measurement iscontinuously performed on an intermittent basis, as referenced earlier,by performing measurements for a moving window of print nozzles andnozzle-waveform combinations each time a new flat panel substrate isloaded or unloaded, to obtain dynamic updates. As denoted by numeral504, this data (measured or provided) is stored for use in anoptimization process.

In addition to per-nozzle (and optionally, per-drive-waveform) dropletvolume data, information (505) is also received concerning desired fillvolume for each target region. This data can be a single target fillvalue to be applied to all target regions, respective target fill valuesto be applied to individual target regions, rows of target regions orcolumns of target regions, or values broken down in some other manner.For example, as applied to fabricating a single “blanket” layer ofmaterial that is large relative to individual electronic devicestructures (such as transistors or pathways), such data could consist ofa single thickness to be applied to an entire layer (e.g., whichsoftware then converts to a desired ink fill volume per target regionbased upon predetermined conversion data specific to the pertinent ink);in such a case, the data could be translated to a common value for each“print cell” (which in this case might be equivalent to each targetregion or consist of multiple target regions). In another example, thedata could represent a specific value (e.g., 50.00 pL) for one or morewells, with range data either being provided or understood based oncontext. As should be understood from these examples, the desired fillcan be specified in many different forms including, without limitation,as thickness data or volume data. Additional filtering or processingcriteria can also optionally be provided to or performed by a receivingdevice; for example, as referenced earlier, random variation in fillvolumes could be injected by a receiving device into one or moreprovided thickness or volume parameters to render line effect invisibleto the human eye in a finished display. Such variation could beperformed in advance (and provided as respective, per-target regionfills that vary from region to region) or could be independently andtransparently derived from a recipient device (e.g., by a downstreamcomputer or printer).

Based on the target fill volumes for each region and individual dropletvolume measurements (i.e., per-printhead nozzle and per nozzle drivewaveform), the process then optionally proceeds to calculatecombinations of various droplets that sum to a fill volume within thedesired tolerance range (i.e., per process block 506). As mentioned,this range can be provided with target fill data or can be “understood”based on context. In one embodiment, the range is understood to be ±onepercent of a provided fill value. In another embodiment, the range isunderstood to be ±one-half percent of a provided fill value. Clearly,many other possibilities exist for tolerance ranges, whether larger orsmaller than these exemplary ranges.

At this point, an example would help convey one possible method forcalculating sets of possible droplet combinations. Returning tosimplified examples described earlier, it should be assumed that thereare five nozzles, each having respective hypothetical mean dropletvolumes of 9.80 pL, 10.01 pL, 9.89 pL, 9.96 pL, and 10.03 pL, and thatit is desired to deposit a target volume of 50.00 pL, ±½ percent (49.75pL-50.25 pL) in five wells. This method begins by determining the numberof droplets that can be combined to reach but not exceed the tolerancerange and, for each nozzle, the minimum and maximum number of dropletsfrom that nozzle that can be used in any acceptable permutation. Forexample, in this hypothetical, no more than a single droplet from nozzle(1), two droplets from nozzle (3) and four droplets from nozzle (4)would be expected to be usable in any combination, given the minimum andmaximum droplet volumes of the nozzles under consideration. This steplimits the number of combinations that need be considered. Armed withsuch constraints on set consideration, the method then considerscombinations of the required number of droplets (five in this example),taking each nozzle in turn. For example, the method first starts withnozzle (1) with an understanding that the only acceptable combinationsinvolving this nozzle, given calculated means, feature one drop or fewerfrom this nozzle. Considering combinations involving a single dropletfrom this nozzle, the method then considers minimum and maximum dropvolumes of the other respective nozzle-waveform combinations underconsideration; for example, given that nozzle (1) is determined toproduce a mean droplet volume of 9.80 pL for a given drive waveform, nomore than one droplet from nozzle (3) or two droplets from nozzle (4)can be used in combination with a droplet from nozzle (1) to reach thedesired tolerance range. The method proceeds to consider combinations ofthe droplet from nozzle (1) and a combination of four droplets fromother nozzles, for example, four from nozzles (2) or (5), three dropletsfrom nozzle (2) and one droplet from nozzle (4), and so on. Consideringcombinations involving nozzle (1) only, to simplify discussion, any ofthe following different combinations involving the first nozzle couldpotentially be used within the tolerance range:

{1(1),4(2)}, {1(1),3(2),1(4)}, {1(1),3(2),1(5)}, {1(1),2(2), 1(4),1(5)}, {1(1), 1(2),1(3),2(5)}, {1(1),1(2),1(4),2(5)}, {1(1),1(2),3(5)},{1(1),1(3),3(5)}, {1(1),2(4),2(5)}, {1(1), 1(4),3(5)} and {1(1),4(5)}.

In the mathematical expression set forth above, the use of bracketsdenotes a set of five droplets representing droplet volume combinationsfrom one or more nozzles, with each parenthetical within these bracketsidentifying the specific nozzle; for example, the expression {1(1),4(2)}represents one droplet from nozzle (1) and four droplets from nozzle(2), 9.80 pL+(4×10.01 pL)=49.84 pL, which is expected to produce acomposite fill within the specified tolerance range. In effect, themethod in this example considers the highest number of droplets from thenozzle (1) that can be used to produce the desired tolerance, evaluatescombinations involving this highest number, reduces the number by one,and repeats the process of consideration, based on the various means. Inone embodiment, this process is repeated to determine all possible setsof non-redundant droplet combinations that can be used. Whencombinations involving nozzle (1) have been fully explored, the methodproceeds to combinations involving nozzle (2) but not nozzle (1) andrepeats the process, and so forth, testing the combined mean of eachpossible nozzle combination to determine whether it can achieve thedesired tolerance range. In this embodiment for example, the method hasdetermined that combinations of two or more droplets from nozzle (1)cannot be used, so it begins with consideration of combinationsinvolving one droplet from nozzle (1) and four droplets from othernozzles in various combination. The method in effect evaluates whetherfour droplets of nozzle (2) can be used, determines that it can{1(1),4(2)}, then drops this number by one (three droplets from nozzle2), and determines that this number can be used in combination with asingle droplet from nozzles (4) or (5), yielding acceptable sets of{1(1),3(2),1(4)}, {1(1),3(2),1(5)}. The method then further reduces thenumber of acceptable droplets from nozzle (2) by one, and evaluatescombinations of {1(1),2(2) . . . }, and then {1(1),1(2) . . . }, and soforth. Once combinations involving nozzle (2) have been considered incombination with a droplet from nozzle (1), the method then takes thenext nozzle, nozzle (3), and considers combinations of nozzle (1)involving this nozzle but not nozzle (2) and determines that the onlyacceptable combination is given by {1(1),1(3),3(5)}. Once allcombinations involving a droplet from nozzle (1) have been considered,the method then considers 5-droplet combinations involving droplets fromnozzle (2) but not nozzle (1), e.g., {5(2)}, {4(2),1(3)}, {4(2),1(4)},{4(2),1(5)}, {3(2),2(3)}, {3(2),1(3),1(4)} and so on.

It is also noted that the same approach applies equally in the case thatthe nozzles can be driven by multiple firing waveforms (each generatingdifferent droplet volumes). These additional nozzle-waveformcombinations simply provide additional droplet volume means for use inselecting the set of droplet combinations that are within the targetvolume tolerance range. The use of multiple firing waveforms can alsoimprove the efficiency of the printing process by making available alarger number of acceptable droplet combinations and thereby increasingthe likelihood of concurrently firing droplets from a large fraction ofthe nozzles on each pass. In the case that nozzles have multiple drivingwaveforms and geometric steps are also used, the selection of a set ofdroplet combinations will incorporate both the geometric offset to beused in a given scan and the nozzle waveform that will be used for eachnozzle.

Note that, for purposes of narration, a brute force approach has beendescribed and that a staggering number of possible combinations willtypically be presented in practice, e.g., where the number of nozzlesand target regions are large (e.g., more than 128 each). However, suchcomputation is well within the capabilities of a high-speed processorhaving appropriate software. Also, note that there exist variousmathematical shortcuts that can be applied to reduce computation. Forexample, in a given embodiment, the method can exclude fromconsideration any combination that would correspond to use of less thanhalf of the available nozzles in any one pass (or alternatively, canlimit consideration to combinations that minimize volume variance acrosstarget regions (TR) in any single pass). In one embodiment, the methoddetermines only certain sets of droplet combinations that will produceacceptable composite fill values; in a second embodiment, the methodexhaustively calculates every possible set of droplet combinations thatwill produce acceptable composite fill values. It is also possible touse an iterative approach where, in multiple repetitions, a print scanis performed, and volumes of ink still remaining to be deposited toreach the desired tolerance range(s) are considered for purposes ofoptimizing a next, succeeding scan. Other processes are also possible.

Note also that as an initial operation, if the same fill value (andtolerance) applies to each target region, it suffices to compute thecombinations once (e.g. for one target region) and to store thesepossible droplet combinations for initial use with each target region.This is not necessarily the case for all set computation methods and forall applications (e.g., in some embodiments, the acceptable fill rangecan vary for every target region).

In yet another embodiment, the method uses mathematical shortcuts, suchas approximations, matrix math, random selection or other techniques, todetermine sets of acceptable droplet combinations for each targetregion.

As denoted by process block 507, once sets of acceptable combinationshave been determined for each target region, the method then effectivelyplans scanning in a way that correlates with a particular set (ordroplet combination) for each target region. This particular setselection is performed in a manner where the particular set (one foreach target region) represents process savings through the use of atleast one scan to deposit droplet volumes concurrently in multipletarget regions. That is to say, in an ideal case, the method selects oneparticular set for each target region, where the particular setrepresents particular droplet volume combinations in a manner where aprinthead can simultaneously print into multiple rows of target regionsat once. The particular droplet choices in the selected combinationsrepresent a print process matching a predetermined criterion, such asminimal printing time, minimal number of scans, minimal sizes ofgeometric steps, minimal aggregate geometric step distance, or othercriteria. These criteria are represented by numeral 508 in FIG. 5. Inone embodiment, optimization is pareto optimal, with the particular setsselected in a manner that minimizes each of number of scans, aggregategeometric step distance and sizes of geometric steps, in that order.Again, this selection of particular sets can be performed in any desiredmanner, with several non-limiting examples further discussed below.

In one example, the method selects a droplet from each set for eachtarget region corresponding to a particular geometric step or waveformapplied to all regions being considered, and it then subtracts thisdroplet from available sets and determines a remainder. For example, ifchoices of available sets is initially {1(1),4(2)}, {1(1),3(2),1(4),{1(1),3(2),1(5)}, {1(1),2(2),1(4),1(5)}, {1(1),1(2),1(3),2(5)},{1(1),1(2),1(4),2(5)}, {1(1),1(2),3(5)}, {1(1),1(3),3(5)},{1(1),2(4),2(5)}, {1(1),1(4),3(5)} and {1(1),4(5)} for each of fivetarget regions, this embodiment would subtract one droplet (1) from thisinitial set to obtain a remainder specific to a first of the five targetregions, one droplet (2) from the initial set to obtain a remainderspecific to a second of the five target regions, one droplet (3) fromthe initial set to obtain a remainder specific to the third of thetarget regions, and so on. This evaluation would represent a geometricstep of “0.” The method would then evaluate the remainders and repeatthe process for other possible geometric steps. For example, if ageometric step of “−1” was then applied, the method would subtract onedroplet (2) from the initial set for the first of the five targetregions, one droplet (3) from the initial set from the second of thetarget regions and so forth, and evaluate the remainders.

In selecting a particular geometric step (and nozzle firing) as part ofprint planning, the method analyzes the various remainders according toa scoring or priority function, and selects the geometric step with thebest score. In one embodiment, scoring is applied to more heavily weighta step that (a) maximizes the number of nozzles used simultaneously and(b) maximizes the minimum number of combinations remaining for affectedtarget regions. For example, a scan that used droplets from four nozzlesduring a scan would be more heavily favored than one that used dropletsfrom just two nozzles. Similarly, if using the subtraction processdiscussed above in considering different steps resulted in 1, 2, 2, 4and 5 remaining combinations for respective target regions for onepossible step, and 2, 2, 2, 3 and 4 remaining combinations forrespective target regions for a second possible step, the method wouldmore heavily weight the latter (i.e., the largest minimum number is“2”). In practice, suitable weighting coefficients can be empiricallydeveloped. Clearly, other algorithms can be applied, and other forms ofanalysis or algorithmic shortcuts can be applied. For example, matrixmath can be used (e.g., using an eigenvector analysis) to determineparticular droplet combinations and associated scanning parameters thatsatisfy predetermined criteria. In another variation, other formulae canused, for example, that factor in use of planned random fill variationto mitigate line effect.

Once the particular sets and/or scan paths have been selected pernumeral 507, printer actions are sequenced, per numeral 509. Forexample, it is noted that a set of droplets can typically be depositedin arbitrary order if aggregate fill volumes were the onlyconsideration. If the printing is planned to minimize the number ofscans or passes, the order of geometric steps can also be selected tominimize printhead/substrate motion; for example, if acceptable scans ina hypothetical example involve relative geometric steps of {0,+3,−2,+6and −4}, these scans can be reordered to minimize printhead/substratemotion and thus further improve printing speed, for example, orderingthe scans as a sequence of steps of {0,+1,+2,0 and +4}. Compared to thefirst sequence of geometric steps {0,+3,−2,+6 and −4}, involving anaggregate step increment distance of 15, the second sequence ofgeometric steps {0,+1,+2,+0 and +4} involves an aggregate step incrementdistance of 7, facilitating faster printer response.

As denoted by numeral 510, for applications involving large numbers ofrows of target regions which are to receive the same target fill, aparticular solution might also be expressed as a repeatable patternwhich is then reproduced over subset areas of the substrate. Forexample, if in one application there were 128 nozzles arranged in asingle row and 1024 rows of target regions, it is expected than anoptimal scan pattern could be determined for a subset area of 255 rowsof target regions or fewer; thus, the same print pattern could beapplied to four or more subset areas of the substrate in this example.Some embodiments therefore take advantage of repeatable patterns asexpressed by optional process block 510.

Note the use of non-transitory machine-readable media icon 511; thisicon denotes that the method described above is optionally implementedas instructions for controlling one or more machines (e.g., software orfirmware for controlling one or more processors). The non-transitorymedia can include any machine-readable physical medium, for example, aflash drive, floppy disk, tape, server storage or mass storage, dynamicrandom access memory (DRAM), compact disk (CD) or other local or remotestorage. This storage can be embodied as part of a larger machine (e.g.,resident memory in a desktop computer or printer) or on an isolatedbasis (e.g., flash drive or standalone storage that will later transfera file to another computer or printer). Each function mentioned inreference to FIG. 5 can be implemented as part of a combined program oras a standalone module, either stored together on a single mediaexpression (e.g., single floppy disk) or on multiple, separate storagedevices.

As represented by numeral 513 in FIG. 5, once the planning process iscompleted, data will have been generated that effectively represent aset of printer instructions, comprising nozzle firing data for theprinthead and instructions for relative movement between printhead andsubstrate to support the firing pattern. This data, effectivelyrepresenting the scan path, scan order and other data, is an electronicfile (513) that can either be stored for later use (e.g., as depicted bynon-transitory machine-readable media icon 515), or immediately appliedto control a printer (517) to deposit ink representing the selectedcombinations (particular sets of nozzles per target region). Forexample, the method can be applied on a standalone computer, with theinstruction data being stored in RAM for later use, or for download toanother machine. Alternatively, the method could be implemented anddynamically applied by a printer to “inbound” data, to automaticallyplan scanning dependent on printer parameters (such asnozzle-droplet-volume data). Many other alternatives are possible.

FIGS. 6A-6D provide diagrams that generally relate to the nozzleselection and scan planning process. Note again that scans do not haveto be continuous or linear in direction or speed of movement and do nothave to proceed all the way from one side of a substrate to another.

A first block diagram is denoted by numeral 601 in FIG. 6A; this FIG.represents many of the exemplary processes discussed in the previousnarration. The method first begins by retrieving from memory sets ofacceptable droplet volume combinations for each target region, pernumeral 603. These sets can be dynamically computed or could have beencomputed in advance, for example, using software on a different machine.Note the use of a database icon, 605, representing either a local-storeddatabase (for example, stored in local RAM) or a remote database. Themethod then effectively selects a particular one of the acceptable setsfor each target region (607). This selection in many embodiments isindirect, that is, the method processes the acceptable combinations toselect particular scans (for example, using the techniques referencedabove), and it is these scans that in effect define the particular sets.Nevertheless, by planning scanning, the method selects particular setsof combinations for each respective target region. This data is thenused to order scans and finalize motion and firing patterns (609) asreferenced above.

The middle and right of FIG. 6A illustrate a few process options forplanning scan paths and nozzle firing patterns and, in effect, selectinga particular droplet combination for each target region in a manner thatrepresents printing optimization. As denoted by numeral 608, theillustrated techniques represent but one possible methodology forperforming this task. Per numeral 611, analysis can involve determiningminimum and maximum use of each nozzle (or nozzle-waveform combination,in those instances in which a nozzle is driven by more than one firingwaveform) in acceptable combinations. If a particular nozzle is bad(e.g., does not fire, or fires at an unacceptable trajectory), thatnozzle can optionally be ruled out for use (and for consideration).Second, if a nozzle has either a very small or very large expecteddroplet volume, this may limit the number of droplets that can be usedfrom that nozzle in acceptable combinations; numeral 611 representsadvance processing that reduces the number of combinations that will beconsidered. As represented by numeral 612, processes/shortcuts can beused to limit the number of sets of droplet combinations that will beevaluated; for example, instead of considering “all” possible dropletcombinations for each nozzle, the method can be configured to optionallyrule out combinations involving fewer than half of the nozzles (oranother quantity of the nozzles, such as ¼), combinations where morethan one-half of the droplets come from any particular nozzle-waveform,or combinations representing a high variance in droplet volume orrepresenting a large variance in simultaneous droplet volumes appliedacross target regions. Other metrics can also be used.

Subject to any limitations to the number of sets to becomputed/considered, the method then proceeds to calculate and consideracceptable droplet combinations, per numeral 613. As referenced bynumerals 614 and 615, various processes can be used to plan scanningand/or otherwise effectively select a particular set of droplet volumesper target region (TR). For example, as introduced above, one methodassumes a scan path (e.g., particular geometric step selection) and thenconsiders the maximum of the fewest remaining set choices across all TRsbeing considered; the method can favorably weight those scan paths(alternative geometric steps) that maximize ability of ensuing scans tocover multiple target regions at-once. Alternatively or in addition, themethod can favorably weight geometric steps that maximize the number ofnozzles used at once; returning to the simplified five-nozzle discussionabove, a scan that would apply five nozzles to a target region can beweighted more favorably that a scan or pass that would fire only threenozzles in a pass. Thus, in one embodiment, the following algorithm canbe applied by software:S _(i)=[w ₁ f{max{#RemCombs_(TR,i) }+w ₂ f{max{#Simult.Nozzles_(i)}].

In this exemplary equation, “i” represents the particular choice ofgeometric step or scan path, represents one empirically-determinedweighting, w₂ represents a second empirically-determined weighting,#RemCombs_(TR,i) represents the number of remaining combinations pertarget region assuming scan path i, and #Simult.Nozzles_(i) represents ameasure of the number of nozzles used for scan path i; note that thislatter value need not be an integer, e.g., if fill values per TR arevaried (for example, to hide potentially visible artifacts in a displaydevice), a given scan path could feature varying numbers of nozzles usedper column of target region, e.g., an average or some other measure canbe used. Note also that these factors and the weightings areillustrative only, i.e., it is possible to use different weightingand/or considerations than these, use only one variable but not theother, or to use a completely different algorithm.

FIG. 6A also shows a number of further options. For example,consideration of droplet sets in one implementation is performedaccording to an equation/algorithm, per numeral 617. A comparativemetric can be expressed as a score that can be calculated for eachpossible alternative geometric step in order to select a particular stepor offset. For example, another possible algorithmic approach involvesan equation with three terms, as shown below:S _(i) =W _(v)(S _(v,min) /S _(v))+W _(e)(S _(e) /S _(e,max))+W _(d)(S_(d,min) /S _(d)),where the terms based on S_(v), S_(e) and S_(d) are scores respectivelycomputed for variance in deposited droplet volumes, efficiency (maximumnozzles used per-pass) and variation in geometric step. In oneformulation, the term “(S_(v,min)/S_(v))” seeks to minimize variation infill volume from a per-pass target value in a manner dependent on thetotal number of droplets.

Numeral 619 in FIG. 6A represents that, in one embodiment, dropletcombination selection can be performed using matrix math, for example,through the use of mathematical techniques that simultaneously considerall droplet volume combinations and that use a form of eigenvectoranalysis to select scan paths.

As represented by numeral 621, an iterative process can be applied toreduce the number of considered droplet combinations. That is, forexample, as represented by the earlier narration of one possibleprocessing technique, geometric steps can be computed one at a time.Each time a particular scan path is planned, the method determines theincremental volume still needed in each target region underconsideration, and then proceeds to determine a scan or geometric offsetbest suited to producing aggregate volumes or fill volumes per targetregion that are within desired tolerances. This process can then berepeated as respective iterations until all scan paths and nozzle firingpatterns have been planned.

Per numeral 622, use of a hybrid process is also possible. For example,in one embodiment, a first set of one or more scans or geometric stepscan be selected and used, for example, based on minimized deviation inper-nozzle droplet volume and maximum efficiency (e.g., nozzles used perscan). Once a certain number of scans have been applied, e.g., 1, 2, 3or more, a different algorithm can be invoked, for example, thatmaximizes nozzles used per scan (e.g., irrespective of deviation inapplied droplet volumes). Any of the specific equations or techniquesdiscussed above (or other techniques) can optionally be applied one ofthe algorithms in such a hybrid process, and other variations will nodoubt occur to those skilled in the art.

Note that as referenced earlier, in an exemplary display-manufacturingprocess, per-target region fill volumes can have planned randomizationdeliberately injected (623) to mitigate line effect. In one embodiment,a generator function (625) is optionally applied to deliberately varytarget fill volumes (or to skew aggregate volumes produced for thedroplet combination for each target region) in a manner that achievesthis planned randomization or other effect. As noted earlier, in adifferent embodiment, it is also possible for such variation to befactored into target fill volumes and tolerances, i.e., before dropletcombinations are even analyzed, and to apply, for example, algorithmicapproaches as indicated earlier to meet per-target-region fillrequirements. As will be discussed below in connection with FIG. 8B, itis also possible to consider randomization as a probability distributionand to plan droplet measurements (and development of per-nozzle,per-waveform distributions) dependent on such randomization in a mannercalculated to meet composite fill tolerances. For example, ifrandomization of planned fills is to vary normally between ±0.2% oftarget composite fill, and specified tolerance is ±0.5% of targetcomposite fill, then droplet measurement for each nozzle and eachnozzle-waveform combination can be planned to produce a 3σ value foreach nozzle/nozzle-waveform that is within 0.3% of target(0.2%+0.3%=0.5%).

FIG. 6B and numeral 631 refer to a more detailed block diagram relatedto the iterative droplet combination selection process referenced above.As represented by numerals 633 and 635, possible droplet combinationsare once again first identified, stored, and retrieved as appropriate,for evaluation by software. For each possible scan path (or geometricstep), per numeral 637, the method stores a footprint identifying thescan path (639) and nozzles applied, and it subtracts per nozzle firingsfrom the per-target region sets (641) to determine remaindercombinations for each target region (643). These are also stored. Then,per numeral 645, the method evaluates the stored data according topredefined criteria. For example, as indicated by optional (dashed-line)block 647, σ method that seeks to maximize the minimum number of dropletcombinations across all pertinent target regions can assign a scoreindicating whether the just-stored combination is better than, or worsethan, previously considered alternatives. If the specified criteria aremet (645), the particular scan or geometric step can be selected, withthe remainder combinations being stored or otherwise flagged for use inconsideration of another printhead/substrate scan or pass, asrepresented by numerals 649 and 651. If the criteria are not met (orconsideration is incomplete), another step can be considered and/or themethod can adjust consideration of the geometric step underconsideration (or a previously selected step), per numeral 653. Again,many variations are possible.

It was noted earlier that the order in which scans are performed ordroplets are deposited is unimportant to ultimate composite fill valuefor each target region. While this is true, to maximize printing speedand throughput, scans are preferably ordered so as to result in thefastest or most efficient printing possible. Thus, if not previouslyfactored into geometric step analysis, the sorting and/or ordering ofscans or steps can then be performed. This process is represented byFIG. 6C.

In particular, numeral 661 is used to generally designate the method ofFIG. 6C. Software, for example, running on a suitable machine, causes aprocessor to retrieve (663) the selected geometric steps, particularsets, or other data that identifies the selected scan paths (and asappropriate, nozzle firing patterns, which can further include dataspecifying which of a plurality of firing waveforms is to be used foreach droplet, in those embodiments in which certain nozzles can bedriven by more than one firing waveforms). These steps or scans are thensorted or ordered in a manner that minimizes incremental step distance.For example, again referring to the hypothetical example introducedearlier, if the selected steps/scan paths were {0,+3,−2,+6 and −4},these might be reordered to minimize each incremental step and tominimize overall (aggregate) distance traversed by a motion system inbetween scans. Without reordering for example, the incremental distancebetween these offsets would be equivalent to 3, 2, 6 and 4 (such thatthe aggregate distances traversed would be “15” in this example). If thescans (e.g., scans “a,” “b,” “c,” “d” and “e”) were reordered in themanner described (e.g., in order of “a,” “c,” “b,” “e” and “d”), theincremental distances would be +1,+2, 0 and +4 (such that the aggregatedistances traversed would be “7”). As denoted by numeral 667, at thispoint, the method can assign motion to a printhead motion system and/ora substrate motion system, and can reverse the order of nozzle firing(e.g., if alternating, reciprocal scan path directions are used, pernumerals 339 and 340 of FIG. 3B). As noted earlier and represented byoptional process block 669, in some embodiments, planning and/oroptimization can be performed for a subset of the target regions, with asolution then applied on a spatially-repeating basis over a largesubstrate.

This repetition is represented in part by FIG. 6D. As implied by FIG.6D, it should be assumed for this narration that it is desired tofabricate an array of flat panel devices. A common substrate isrepresented by numeral 681, and a set of dashed-line boxes, such as box683, represents geometry for each flat panel device. A fiducial 685,preferably with two-dimensional characteristics, is formed on thesubstrate and used to locate and align the various fabricationprocesses. Following eventual completion of these processes, each panel683 will be separated from the common substrate using a cutting orsimilar process. Where the arrays of panels represent respective OLEDdisplays, the common substrate 681 will typically be glass, withstructures deposited atop the glass, followed by one or moreencapsulation layers; each panel will then be inverted such that theglass substrate forms the light emitting surface of the display. Forsome applications, other substrate materials can be used, for example, aflexible material, transparent or opaque. As noted, many other types ofdevices can be manufactured according to the described techniques. Asolution can be computed for a specific subset 687 of a flat panel 683.This solution can then be repeated for other, similarly-sized subsets689 of the flat panel 683, and the entire solution set can then also berepeated for each panel to be formed from a given substrate.

Reflecting on the various techniques and considerations introducedabove, a manufacturing process can be performed to mass produce productsquickly and at low per-unit cost. Applied to display device manufacture,e.g., flat panel displays, these techniques enable fast, per-panelprinting processes, with multiple panels produced from a commonsubstrate. By providing for fast, repeatable printing techniques (e.g.,using common inks and printheads from panel-to-panel), it is believedthat printing can be substantially improved, for example, reducingper-layer printing time to a small fraction of the time that would berequired without the techniques above, all while guaranteeing per-targetregion fill volumes are within specification. Again returning to theexample of large HD television displays, it is believed that each colorcomponent layer can be accurately and reliably printed for largesubstrates (e.g., generation 8.5 substrates, which are approximately 220cm×250 cm) in one hundred and eighty seconds or less, or even ninetyseconds or less, representing substantial process improvement. Improvingthe efficiency and quality of printing paves the way for significantreductions in cost of producing large HD television displays, and thuslower end-consumer cost. As noted earlier, while display manufacture(and OLED manufacture in particular) is one application of thetechniques introduced herein, these techniques can be applied to a widevariety of processes, computer, printers, software, manufacturingequipment and end-devices, and are not limited to display panels.

One benefit of the ability to deposit precise target region volumes(e.g., well volumes) within tolerance is the ability to injectdeliberate variation within tolerance, as mentioned. These techniquesfacilitate substantial quality improvements in displays, because theyprovide the ability to hide pixelated artifacts of the display,rendering such “line effect” imperceptible to the human eye. FIG. 7provides a block diagram 701, associated with one method for injectingthis variation. As with the various methods and block diagrams discussedabove, the block diagram 701 and related method can optionally beimplemented as software, either on standalone media, or as part of alarger machine.

As denoted by numeral 703, variation can be made to depend on specificcriteria. For example, it is generally understood that sensitivity ofthe human eye to contrast variation is a function of brightness,expected viewing distance, display resolution, color and other factors.As part of the specified criteria, a measure is used to ensure that,given typical human-eye sensitivity to spatial variation in contrastbetween colors at different brightness levels, such variation will besmoothed in a manner not perceptible to the human eye, e.g., varied in amanner that does not contribute human-observable patterns in (a) anydirection or directions, or (b) between color components given expectedviewing conditions. This can be achieved optionally using a plannedrandomization function, as referenced earlier. With minimum criteriaspecified, the target fill volumes for each color component and eachpixel can be deliberately varied in a manner calculated to hide anyvisible artifacts from the human eye, as represented by numeral 705.Note that the right side of FIG. 7 represents various process options,for example, that variation can be made independent across colorcomponents (707), with tests for perceptible patterns applied on analgorithmic basis to ensure that fill variations do not give rise toperceptible patterns. As noted by numeral 707, for any given colorcomponent (e.g., any given ink), variation can also be made independentin each of multiple spatial dimensions, for example, x and y dimensions(709). Again, in one embodiment, not only is the variation smoothed foreach dimension/color component so as to not be perceptible, but anypattern of differences between each of these dimensions is alsosuppressed so as to not be visible. Per numeral 711, σ generatorfunction or functions can be applied to ensure that these criteria aremet, for example, by optionally assigning minor target fill variationsto each target region's fill prior to droplet volume analysis, using anydesired criteria. As denoted by numeral 713, in one embodiment, thevariation can optionally be made to be random.

Per numeral 715, selection of the particular droplet combinations foreach target region are thus weighted in favor of the selected variationcriteria. This can be performed, as mentioned, via target fillvariation, or at the time of droplet (e.g., scan path, nozzle-waveformcombination, or both) selection. Other methods for imparting thisvariation also exist. For example, in one contemplated implementation,per numeral 717, the scan path is varied in a nonlinear manner,effectively varying droplet volumes across mean scan path direction. Pernumeral 719, nozzle firing patterns can also be varied, for example byadjusting firing pulse rise time, fall time, voltage, pulse width orusing multiple signal levels per pulse (or other forms of pulse shapingtechniques) to provide minor droplet volume variations; in oneembodiment, these variations can be calculated in advance, and in adifferent embodiment, only waveform variations that create very minorvolume variations are used, with other measures employed to ensure thataggregate fills stay within specified tolerance ranges. In oneembodiment, for each target region, a plurality of droplet combinationsthat fall within specified tolerance ranges are computed and for eachtarget region, the selection of which droplet combination is used inthat target region is varied (e.g. randomly or based on a mathematicalfunction) or a specific waveform (i.e., used to produce a droplet ofgiven volume) is varied for one nozzle that contributes to a selectedcombination, for example, providing a slight volume variation, therebyeffectively varying the droplet volumes across the target regions butwithout varying planned scan path. Such variation can be implementedalong the scan path direction over a row of target regions, over acolumn of target regions, or over both.

FIGS. 8A-8B are used to explain methods for developing statisticalmodels used to evaluate droplets produced by each nozzle ornozzle-waveform combination, and optionally to plan combination ofmultiple droplets according to statistical means determined frommeasurement. Note that in the examples of FIGS. 8A-8B, statisticalmodels are built up for droplet volumes that can be expected from agiven nozzle-drive waveform pairing; in alternate embodiments, similarstatistical models can be built for droplet velocity, droplet flighttrajectory (e.g., relative to normal) or for some other parameter.

A method depicted by FIG. 8 is generally designated by numeral 801. Perfunction block 803, the method in this embodiment begins withestablishment of a specification range, for example, a maximum andminimum fill for a given target region that will receive ink. Inexamples presented earlier, this specification range can be expressed asa mean plus or minus a specific value (e.g., 50.00 pL±0.5%), but nearlyany range or expression of acceptable values can be used. In onecontemplated implementation, the specified tolerance about a target is±0.5%, but other values such as without limitation 1.0% or 2.0% can alsobe used. In keeping in line with earlier examples, for this embodiment,it will be assumed that the target is 50.00 pL and that the tolerance is±0.5% (such that the acceptable range is 49.75 pL-50.25 pL), but nearlyany range or acceptance criteria can be used.

Per numeral 805, one or more candidate waveforms are selected for eachnozzle of a printhead or printhead assembly. In an embodiment which usesa single drive waveform only (e.g., a square voltage pulse of fixedvoltage), there is no selection that need be performed. In an embodimentwhich permits customized waveform definition (see e.g., the discussionbelow associated with FIG. 14B and FIGS. 15A-B), it is typically desiredto evaluate several selective waveforms representing a range of values(e.g., that can be interpolated between to ultimately identify pluralacceptable waveforms for each nozzle under consideration). Thisselection can be performed according to a manual design process (807)(i.e., with waveforms selected by a designer and preprogrammed into asystem), or a selection process can also be automated, per numeral 809.

With one or more waveforms defined for each nozzle, droplet measurementsare planned for different droplet ejections for a given nozzle-waveformpairing. For example, in one embodiment, a number of droplets (e.g.,“24”) could be required for each nozzle, providing a basis forevaluation of a measured statistical distribution for the variousdroplets. A droplet measurement device (e.g., imaging or non-imaging)can be used for this purpose, as discussed herein. The 24 (or othernumber of) measurements could be planned for at-once measurement, or forexecution in respective or multiple measurement cycles or iterations.Furthermore, in one embodiment, a threshold number of measurements canbe planned for initialization, with the system then increasing ameasurement dataset over time to develop strong confidence regardingmeasured statistical distribution; in an alternative embodiment, eachmeasurement can be planned for a moving window of time (e.g.,remeasurement can be planned “every 3 hours” or measurement data can beretained only for some limited interval of time used for analysis); thusin one embodiment, each measurement is stored with a time stamp toindicate its validity and expiration during evaluation. Whichevermeasurement and/or measurement retention criteria are used, the numberof measurements can be planned for each nozzle-waveform pairing forpurposes of statistical analysis (811). Advantageously, the respectivemeasurements for droplets resulting from each nozzle-waveform pairingare grouped as a set and planned in a manner conducive to developing aknown, common distribution format with well-understood rules formathematical processing (including aggregation). For example, Normal,Student's-T and Poisson distributions all have associated parametersthat can be combined according to known mathematical processes in orderto predict an aggregate or composite distribution of fill volume thatwould result from a combination of individual droplets (for respectivenozzle-waveform pairings). Measurement planning can thus be performedaccording to the techniques described herein in order to develop dropletdatasets that permit statistical combination of droplets associated withpotentially-different nozzle-waveform pairings in order to achieveprecise fills within specified tolerance with a very high degree ofconfidence (e.g., typically greater than 99% confidence, per numeral813). Accordingly, in one implementation of the described techniques,droplet measurements for each nozzle-waveform combination are planned tosatisfy a set of parameters that describe a known probabilitydistribution type (e.g., number of measurements or members n,statistical mean p and standard deviation a in the case of a Normaldistribution), with measurement data (once obtained) being stored forevery possible nozzle and nozzle-waveform pairing under consideration.In one embodiment, planning and measurement can be iterative, i.e.,repeated until some desired criteria is reached, such as a minimumnumber of raw measurements (n), a minimum number of measurementssatisfying some criteria, a minimum statistical spread (e.g., 3σ valuemeeting some criteria or desired confidence interval) or something else.Whichever planning criteria is applied (e.g., by software), the systemincluding a droplet measurement device and printhead assembly underconsideration is then subjected to droplet measurements, individuallyapplied to each nozzle (and each drive waveform for a given nozzle) todevelop a statistically-significant number of droplets measurements(815). As noted by numerals 817 and 819, such measurement is optionallyperformed in situ (e.g., in a printer or OLED device fabricationapparatus, optionally in presence of a controlled atmosphere), and in amanner sufficient to develop statistical confidence. Collected data canthen be stored as an aggregate probability distribution (821) and/oroptionally in a manner that retains individual-measurement data (e.g.,including any time stamp used to window per-nozzle measurements).

As noted earlier, in one embodiment, droplets from potentially-differentnozzles and/or nozzle-drive-waveforms are intelligently combined toobtain precise fills within a high degree of statistical confidence.With probability distributions of a common format being built for eachnozzle, this combination (and related planning) is effectuated bycombining statistical parameters for respective droplets in order toobtain precise fills (and a well-understood probability distribution foreach fill). This is represented by numerals 823, 825 and 827 in FIG. 8A.More specifically, droplet means are combined in one embodiment (e.g.,corresponding to associated Normal distributions) to obtain a predictedaggregate fill for a target region. As an example, if for given firstand second nozzle-waveform pairings mean droplet volumes are measured as9.98 pL and 10.03 pL, respectively, then the mean aggregate fill basedon one droplet associated with each pairing is expected to be 20.01 pL(μ_(c)=μ₁+μ₂, where Normal distributions are involved); if in this samehypothetical example, standard deviations are 0.032 pL (σ₁) and 0.035 pL(σ₂) for the respective droplets, then the expected standard deviationof the aggregate would be 0.0474 pL (i.e., based on σ² _(c)=σ² ₁+σ² ₂)and the 3σ value of the aggregate would be approximately 0.142 pL (notethat 1σ equates to a confidence interval of approximately 68.27%, while3σ equates to a confidence interval of approximately 99.73%). Similartechniques can be applied to any common distribution format via thetreatment of droplet measurements for each nozzle-waveform pairing asindependent random variables. Thus, techniques employed herein usedroplet measurement techniques to build a statistical model for eachnozzle-waveform pairing, to plan for various droplet combinations basedon the analysis of aggregated random variables as represented by box 825(in the case of a Normal Distribution). Nearly any distribution type canbe used, provided the probability distribution type is amenable torandom variable aggregation. As indicated by function block 827, in viewof the desired specification range (e.g., 0.5% about a target), theproposed combination is analyzed (e.g., by software) to ensure that itsatisfies the desired range with a high degree of statisticalconfidence. For example, in one embodiment, as mentioned, a desiredconfidence criteria (e.g., 3σ, representing a 99.73% confidenceinterval) is tested to ensure it fits within the desired tolerancerange. As an example, if desired tolerance was 49.75-50.25 pL per theexample introduced above, and a possible droplet combination wasrepresented as a mean of 49.89 pL with a 3σ value equated to 0.07 pL,this would translate to a 99% confidence that aggregate fill would liebetween 49.82 pL and 49.96 pL, well within the desired tolerance range,and the particular combination would be deemed an acceptable combination(per the droplet combination analysis functions described above). Onceagain, any desired statistical criteria or goodness of fit data can beused; in another embodiment, a 4σ value (99.993666%) or other value isanalyzed relative to a desired tolerance range. With acceptable dropletcombinations determined for each print well, specific, particularcombinations of droplets for each well (representing concurrentdeposition by multiple nozzles of a printhead assembly) can then beplanned (see FIGS. 5-7), with ensuing printing (829) according topreplanned droplet combinations for each well.

FIG. 8B provides another method 851 for accommodating deliberate targetregion fill variation according to desired criteria, and optionally, foralso performing a variable number of droplet measurements per nozzle (orper nozzle-waveform). More specifically, the method can be implementedonce again as instructions stored on non-transitory machine-readablemedia that control at least one processor to perform a set of functionsdictated by the instructions. A desired tolerance range is received as afirst operand, “x,” per numeral 853; for example, it could be specifiedthat target region (e.g., pixel well) fill should be within a givenpercentage of a target volume, e.g., 50.00 pL±0.5%. This tolerance rangecan be dictated by customer or industry specification, as indicated byfunction 855. If it is desired to plan for a deliberate variation ofcomposite volume (e.g., random variation within a small range to avoidline effect or other noticeable artifacts in a finished display), thatrange is received as a second operand “y,” per function 857. Based onthese two operands, the method computes an effective allowable maximumvariation, standard deviation or other measure, per block 859. In oneembodiment, y is subtracted from x as depicted in the FIG. and equatedto the effective permitted fill variation; for example, if thespecification requires a fill within ±0.5% per the example above, and adeliberate random variation of ±0.1% is to be injected into a plannedcomposite mean for a well fill (e.g., 49.95 pL-50-05 pL), then thepermitted variation (prior to random variation) could be restricted to49.80 pL-50.20 pL, again using the example of a target of 50.00 pL±0.5%.Note that other techniques are also possible, e.g., instead of simplysubtracting these measures, another set of bounding criteria could beused, for example, based on mathematics associated with statisticalcombination of standard deviation or variance for independent randomvariables; many other criteria can be applied depending on embodiment.Per block 859, the remaining range (e.g., ±0.4% of target) can then beequated with a desired confidence interval (e.g., a 3σ interval or otherstatistical measure) and used to assess whether possible dropletcombinations are acceptable or are to be excluded from consideration perthe examples given above.

Alternatively, as indicated by function blocks 861 and 863, theremaining range and associated confidence interval can be applied ascriteria governing droplet measurement, in order to build desiredstatistical models for each droplet. For example, as represented byblock 861, with a desired confidence interval defined (e.g., 3σ<=0.4% oftarget), a desired variance or maximum permitted variance can beidentified, effectively defining a baseline number n of dropletmeasurements that need be taken for each nozzle-waveform combination ina manner calculated to produce statistical models meeting desiredstatistical criteria. For example, whether or not fill is to bedeliberately varied, the desired effective tolerance range can be usedto identify a number of measurements (e.g., 24, 50 or another number)that are calculated to produce statistical distributions that will betight, and thus lead to a large number of possible droplet combinationsthat can be used for print planning. This calculation can be applied ina number of ways, for example (a) identifying a threshold number ofmeasurements to be applied for each nozzle-waveform combination (e.g.,24 droplet measurements for each), or (b) identifying a thresholdstatistical criteria that must be met for each nozzle-waveformcombination (e.g., with a potentially-variable number of measurementsperformed per nozzle or nozzle-waveform until the threshold criteria,e.g., variance, standard deviation, etc.). A drop test function is thenapplied (863) using a droplet measurement device to perform measurement,with various, exemplary functions represented by this test set forth infunction box 865. For example, n_(i) droplets can be measured for eachnozzle (or nozzle-waveform pairing) “i” as indicated in box 865. Foreach measurement, software controlling the droplet measurement devicecan perform an incremental droplet volume measurement (867) and storedata in memory (869). Following each measurement (or after a thresholdnumber of measurements), the collective measurements for a givennozzle-waveform combination can be aggregated to compute (871)statistical parameters (e.g., mean and standard deviation, μ and σ inthe case of a Normal distribution-type) for the specific nozzle-waveformcombination. These values can then be stored in memory (873).Optionally, these same or different measurement techniques can beapplied to store one or multiple droplet measurements for velocity, v,and x and y dimension trajectory (α and β), per function box 874. Asreflected by numeral 875, σ decision criteria can then be applied todetermine whether sufficient measurements have been taken for the givenparameter (e.g., volume) for the particular nozzle-waveform combination(i), or whether additional measurements are desired. If additionalmeasurements are needed, the method loops per flow arrow 877 to procuresuch additional measurements, i.e., so that a statistical model meetingdesired robustness criteria can be built for the particularnozzle-waveform combination. If no additional measurements are needed,the method can then proceed to the next nozzle 879, looping asappropriate per flow arrow 881 until all nozzles and/or nozzle-waveformcombinations have been processed. Note that this order is not requiredfor all embodiments; for example, loops 877 and 881 can be changed inorder, e.g., with droplet measurements performed for each nozzle insuccession, with this process repeated until sufficiently robust datahas been obtained; such a process provides certain advantages forexample, for embodiments where droplet measurement is to beincrementally performed, in a manner stacked against other systemprocesses (see, e.g., the discussion of FIG. 19, below). Once allnozzles or nozzle-waveform combinations have been sufficiently tested,the method ends or temporarily halts if run on an intermittent basis,per numeral 883. For the described droplet testing, the obtained dataincluding measured data and/or calculated statistical parameters arestored in machine-readable memory 885, for use for example in dropletcombination planning as discussed above. The procured data can alsooptionally be used in other manner in lieu of or in addition tointelligent mixing of different droplet volumes. In one embodiment, asmentioned, the stored data can represent any desired droplet parameterincluding one or more of droplet volume, droplet volume and/or droplettrajectory, again, in the form of individual measurements and/orstatistical parameters.

FIGS. 9A-10C are used to provide simulation data for techniquesdiscussed here. FIGS. 9A-9C represent expected composite fill volumesbased on five droplets, whereas FIGS. 10A-10C represent expectedcomposite fill volumes based on ten droplets. For each of these figures,the letter designation “A” (e.g., FIGS. 9A and 10A) represents asituation where nozzles are used to deposit droplets withoutconsideration as to volume differences. By contrast, the letterdesignation “B” (e.g., FIGS. 9B and 10B) represents situations where arandom combination of (5 or 10) droplets are selected to “average out”expected volume differences between nozzles. Finally, the letterdesignation “C” (e.g., FIGS. 9C and 10C) represents situations wherescans and nozzle firings are dependent on specific aggregate ink volumesper target region that seek to minimize aggregate fill variance acrosstarget regions. In these various FIGS., the variation per nozzle isassumed to be consistent with variation observed in actual devices, eachvertical axis represents aggregate fill volumes in pL, and eachhorizontal axis represents the number of target regions, for example,pixel wells or pixel color components. Note that the emphasis of theseFIGS. is to show variation in aggregate fill volumes, assuming randomlydistributed droplet variations about an assumed average. For FIGS.9A-9C, the average volume per nozzle is assumed to be slightly below10.00 pL per nozzle, and for FIGS. 10A-10C, the average droplet volumeper nozzle is assumed to be slightly above 10.00 pL per nozzle.

A first graph 901 represented in FIG. 9A shows per-well volumevariations assuming differences in nozzle droplet volumes with noattempt to mitigate these differences. Note that these variations can beextreme (e.g., per peak 903), with a range of aggregate fill volumes ofabout ±2.61%. As mentioned, the average of five droplets is slightlybelow 50.00 pL; FIG. 9A shows two sets of sample tolerance rangescentered about this average, including a first range 905 representing arange of ±1.00% centered about this value, and a second range 907representing a range of ±0.50% centered about this value. As is seen bythe numerous peaks and troughs that exceed either range (e.g., peak903), such a printing process results in numerous wells that would failto meet specification (e.g., either one or the other of these ranges).

A second graph 911 represented in FIG. 9B shows per-well volumevariations using a randomized set of five nozzles per well, in an effortto statistically average out the effects of droplet volume variation.Note that such a technique does not permit precise production of aspecific volume of ink in any particular well, nor does such a processguarantee aggregate volumes within range. For example, although thepercentage of fill volumes falling outside of specification represents amuch better case than represented by FIG. 9A, there are still situationswhere individual wells (such as identified by trough 913) fall outsideof specification, for example the ±1.00% and ±0.50% variationrepresented by numerals 905 and 907, respectively. In such a case, themin/max error is ±1.01%, reflecting the improvement with random mixingrelative to the data presented in FIG. 9A.

FIG. 9C represents a third case, using specific combinations ofper-nozzle droplets according to techniques above. In particular, agraph 921 shows that variation is entirely within a ±1.00% range andquite close to meeting a ±0.50% range for all represented targetregions; once again, these ranges are represented by numerals 905 and907, respectively. In this example, five specifically elected dropletvolumes are used to fill the wells in each scan line, with theprinthead/substrate shifts as appropriate for each pass or scan. Themin/max error is ±0.595%, reflecting further improvement with this formof “smart mixing.” Note that the improvements and data observations willbe consistent for any form of intelligent, droplet volume combinationsto achieve specific fills or tolerance ranges, e.g., where offsetsbetween nozzle rows (or multiple printheads) are used, or where multiplepreselected drive waveforms are used to permit combination ofspecifically selected droplet volumes.

As mentioned, FIGS. 10A-10C present similar data, but assumingcombinations of 10 droplets per well, with an average droplet volume ofabout 10.30 pL per nozzle. In particular, graph 1001 in FIG. 10Arepresents a case where no attention is given to mitigating dropletvolume differences, graph 1011 in FIG. 10B represents a case wheredroplets are applied randomly in an effort to statistically “averageout” volume differences, and graph 1021 in FIG. 10C represents a case ofplanned mixing of specific droplets (to achieve the average fill volumesof FIGS. 10A/10B, i.e., approximately 103.10 pL). These various FIGS.show tolerance ranges of ±1.00% and ±0.50% variation about this average,respectively denoted using range arrows 1005 and 1007. Each of the FIGS.further shows respective peaks 1003, 1013 and 1023 represented byvariation. Note however, that FIG. 10A represents a variation of ±2.27%about target, FIG. 10B represents a variation of ±0.707% about targetand FIG. 10C represents a variation of ±0.447% about target. With theaveraging of a larger number of droplets, the “random droplet” solutionof FIG. 10B is seen to achieve a ±1.00% tolerance range about theaverage but not a ±0.50% range. By contrast, the solution depicted byFIG. 10C is seen to meet both tolerance ranges, demonstrating thatvariation can be constrained to lie within specification while stillpermitting variation in droplet combinations from well-to-well.

One optional embodiment of the techniques described in this disclosureis as follows. For a printing process in which nozzles with a dropletvolume standard deviation of x % are used to deposit aggregate fillvolumes having a maximum variation of ±y %, conventionally, there existfew means of guaranteeing that aggregate fill volumes will vary by ±y %.This presents a potential problem. A droplet averaging technique (e.g.,as represented by the data seen in FIGS. 9B and 10B) statisticallyreduces the standard deviation of aggregate volumes across targetregions to x %/(n)^(1/2), where n is the average number of dropletsneeded per target region to achieve desired fill volumes. However, evenwith such a statistical approach, there is no mechanism for reliablyensuring that actual target region fill volumes will in fact sit withina maximum error bound of ±y %, particularly if y and n are small. Thetechniques discussed herein provide a mechanism for providing suchreliability by guaranteeing a known percentage of target regions andachieve composite fills within ±y %. One optional embodiment thereforeprovides a method of generating control data, or controlling a printer,and related apparatuses, systems, software and improvements where thestandard deviation of volume across target regions is better than x%/(n)^(1/2) (e.g., substantially better than x %/(n)^(1/2)). In aspecific implementation, this condition is met under circumstances whereprinthead nozzles are concurrently used to deposit droplets inrespective rows of target regions (e.g., respective pixel wells) witheach scan.

With a set of basic techniques for combining droplets such that the sumof their volumes is specifically chosen to meet specific targets thusdescribed, this document will now turn to a more detailed discussion ofspecific devices and applications that can benefit from theseprinciples. This discussion is intended to be non-limiting, i.e., todescribe a handful of specifically contemplated implementations forpracticing the methods introduced above.

As seen in FIG. 11, a multi-chambered fabrication apparatus 1101includes several general modules or subsystems including a transfermodule 1103, σ printing module 1105 and a processing module 1107. Eachmodule maintains a controlled environment, such that printing forexample can be performed by the printing module 1105 in a firstcontrolled atmosphere and other processing, for example, anotherdeposition process such an inorganic encapsulation layer deposition or acuring process (e.g., for printed materials), can be performed in asecond controlled atmosphere. The apparatus 1101 uses one or moremechanical handlers to move a substrate between modules without exposingthe substrate to an uncontrolled atmosphere. Within any given module, itis possible to use other substrate handling systems and/or specificdevices and control systems adapted to the processing to be performedfor that module.

Various embodiments of the transfer module 1103 can include an inputloadlock 1109 (i.e., a chamber that provides buffering between differentenvironments while maintaining a controlled atmosphere), a transferchamber 1111 (also having a handler for transporting a substrate), andan atmospheric buffer chamber 1113. Within the printing module 1105, itis possible to use other substrate handling mechanisms such as aflotation table for stable support of a substrate during a printingprocess. Additionally, an xyz-motion system, such as a split axis organtry motion system, can be used for precise positioning of at leastone printhead relative to the substrate, as well as providing a y-axisconveyance system for the transport of the substrate through theprinting module 1105. It is also possible within the printing chamber touse multiple inks for printing, e.g., using respective printheadassemblies such that, for example, two different types of depositionprocesses can be performed within the printing module in a controlledatmosphere. The printing module 1105 can comprise a gas enclosure 1115housing an inkjet printing system, with means for introducing an inertatmosphere (e.g., nitrogen, a noble gas, another similar gas, or acombination thereof) and otherwise controlling the atmosphere forenvironmental regulation (e.g., temperature and pressure), gasconstituency and particulate presence.

A processing module 1107 can include, for example, a transfer chamber1116; this transfer chamber also has a handler for transporting asubstrate. In addition, the processing module can also include an outputloadlock 1117, σ nitrogen stack buffer 1119, and a curing chamber 1121.In some applications, the curing chamber can be used to cure a monomerfilm into a uniform polymer film, for example, using a heat or UVradiation cure process.

In one application, the apparatus 1101 is adapted for bulk production ofliquid crystal display screens or OLED display screens in bulk, forexample, the fabrication of an array of eight screens at once on asingle large substrate. These screens can be used for televisions and asdisplay screens for other forms of electronic devices. In a secondapplication, the apparatus can be used for bulk production of solarpanels in much the same manner.

Applied to the droplet-volume combination techniques described above,the printing module 1105 can advantageously be used in display panelmanufacture to deposit one or more layers, such as light filteringlayers, light emissive layers, barrier layers, conductive layers,organic or inorganic layers, encapsulation layers and other types ofmaterials. For example, the depicted apparatus 1101 can be loaded with asubstrate and can be controlled to move the substrate back and forthbetween the various chambers to deposit and/or cure or harden one ormore printed layers, all in a manner uninterrupted by interveningexposure to an uncontrolled atmosphere. Optionally, ink dropletmeasurement (if used in connection with the depicted system) can beperformed as a substrate is being moved or processed in any chamber. Forexample, a first substrate can be loaded via the input loadlock 1109,and during this process, a printhead assembly within printing module1105 can be engaged with a droplet measurement device to perform dropletmeasurements for a subset of print nozzles; in an embodiment having manyprint nozzles, droplet measurement can be made periodic andintermittent, such that in between various printing cycles, differentnozzles representing a circular-progressive subset of all nozzles of theprint assembly are calibrated, and associated droplets measured todevelop statistical models for each of droplet volume, angle of ejection(relative to normal) and velocity. A handler positioned in the transfermodule 1103 can move the first substrate from the input loadlock 1109 tothe printing module 1105, at which time droplet measurement isdisengaged, and the printhead assembly moved to a position for activeprinting. Following completion of a printing process, the firstsubstrate can then be moved to the processing module 1107 for cure. Onceagain, a new cycle of droplet measurement can be performed, and a secondsubstrate can optionally be loaded into the input loadlock 1109 (ifsupported by the system). Many other alternatives and processcombinations are possible. By repeated deposition of subsequent layers,e.g., by moving the first substrate back and forth for repeatediterations of printing and cure, each of controlled volume per targetregion, aggregate layer properties can be built up to suit any desiredapplication. In an alternate embodiment, the output loadlock 1117 can beused to transfer the first substrate to a second printer (e.g., forsequential, pipelined printing a new layer, e.g., a new OLED materiallayer or an encapsulation or other layer. Note once again that thetechniques described above are not limited to display panelmanufacturing processes, and that many different types of tools can beused. For example, the configuration of the apparatus 1101 can be variedto place the various modules 1103, 1105 and 1107 in differentjuxtaposition; also, additional modules or fewer modules can also beused. As denoted by numerals 1121 and 1123, σ computing device (e.g., aprocessor) running suitable software can be used to control variousprocesses and to perform optional droplet measurement as described abovein tandem with other processes, i.e., to minimize downtime of theapparatus, to maintain droplet measurements as current as possible whilemaintaining a robust statistical model, and to stack droplet measurementprocesses as much as possible to overlap other system processes.

While FIG. 11 provides one example of a set of linked chambers orfabrication components, clearly many other possibilities exist. The inkdroplet measurement and deposition techniques introduced above can beused with the device depicted in FIG. 11, or indeed, to control afabrication process performed by any other type of deposition equipment.

FIG. 12 provides a block diagram showing various subsystems of oneapparatus that can be used to fabricate devices having one or morelayers as specified herein. Coordination over the various subsystems isprovided by a processor 1203, acting under instructions provided bysoftware (not shown in FIG. 12). During a fabrication process, theprocessor feeds data to a printhead 1205 to cause the printhead to ejectvarious volumes of ink depending on nozzle firing instructions. Theprinthead 1205 typically has multiple ink jet nozzles, arranged in a row(or rows of an array), and associated reservoirs that permit jetting ofink responsive to activation of a piezoelectric or other transducer pernozzle; such a transducer causes a nozzle to eject a controlled amountof ink in an amount governed by an electronic nozzle drive waveformsignal applied to the corresponding piezoelectric transducer. Ifmultiple printheads are present, there can be a processor for eachprinthead, or one processor can control an entire printhead assembly.Other firing mechanisms can also be used. Each printhead applies the inkto a substrate 1207 at various x-y positions corresponding to the gridcoordinates within various print cells, as represented by the halftoneprint image. Variation in position is effected both by a printheadmotion system 1209 and substrate handling system 1211 (e.g., that causethe printing to describe one or more swaths across the substrate). Inone embodiment, the printhead motion system 1209 moves the printhead(s)back-and-forth along a traveler, while the substrate handling systemprovides stable substrate support and “y” dimension transport of thesubstrate to enable “split-axis” printing of any portion of thesubstrate; the substrate handling system provides relatively fasty-dimension transport, while the printhead motion system 1209 providesrelatively slow x-dimension transport. In another embodiment, thesubstrate handling system 1211 can provide both x- and y-dimensiontransport. In yet another embodiment, primary transport can be providedentirely by the substrate handling system 1211. An image capture device1213 can be used to locate any fiducials and assist with alignmentand/or error detection.

The apparatus also comprises an ink delivery system 1215 and a printheadmaintenance system 1217 to assist with the printing operation. Theprinthead can be periodically calibrated or subjected to a maintenanceprocess; to this end, during a maintenance sequence, the printheadmaintenance system 1217 is used to perform appropriate priming, purge ofink or gas, testing and calibration, and other operations, asappropriate to the particular process.

As was introduced previously, the printing process can be performed in acontrolled environment, that is, in a manner that presents a reducedrisk of contaminants that might degrade effectiveness of a depositedlayer. To this effect, the apparatus includes a chamber controlsubsystem 1219 that controls atmosphere within the chamber, as denotedby function block 1221. Optional process variations, as mentioned, caninclude performing jetting of deposition material in presence of anambient nitrogen gas atmosphere.

As previously mentioned, in embodiments disclosed herein, individualdroplet volumes are combined to achieve specific fill volumes per targetregion, selected in dependence on a target fill volume. A specific fillvolume can be planned for each target region, with fill value varyingabout a target value within an acceptable tolerance range. For suchembodiments, droplet volumes are specifically measured, in a mannerdependent on ink, nozzle, drive waveform, and other factors. To thisend, reference numeral 1223 denotes an optional droplet volumemeasurement system, where droplet volumes 1225 are measured for eachnozzle and for each drive waveform and are then stored in memory 1227.Such a droplet measurement system, as mentioned earlier, can be anoptical strobe camera or laser scanning device (or other volumemeasurement tool) incorporated into a commercial printing device. In oneembodiment, such a device uses non-imaging techniques (e.g., usingsimple optical detectors instead of image processing software thatoperates on pixels) to achieve real-time or near real time measurementof individual droplet volumes, deposition flight angle or trajectory anddroplet velocity. This data is provided to processor(s) 1203 eitherduring printing, or during a one-time, intermittent or periodiccalibration operation. As indicated by numeral 1229, σ prearranged setof firing waveforms can also optionally be associated with each nozzle,for later use in producing specific per-target region dropletcombinations; if such a set of waveforms is used for the embodiment,droplet volume measurements are advantageously computed duringcalibration using the droplet measurement system 1223 for each nozzle,for each waveform. Providing a real-time or near-real-time dropletvolume measurement system greatly enhances reliability in providingtarget region volume fills within the desired tolerance range, asmeasurements can be taken as needed and processed (e.g., averaged) tominimize statistical volume measurement error.

Numeral 1231 refers to the use of print optimization software running onprocessor 1203. More specifically, this software, based on statisticalmodels of droplet volumes 1225 (measured in situ or otherwise provided),uses this information to plan printing in a way that combines dropletvolumes as appropriate to obtain per target region specific fillvolumes. In one embodiment, per the examples above, the aggregate volumecan be planned down to the resolution of 0.01 pL or better, within acertain error tolerance, notwithstanding that the droplet measurementdevice may have a lower precision associated with individual dropletmeasurement; that is, by using techniques described herein to build astatistical model of droplet volume per-nozzle and per-nozzle/waveformcombination, a degree of statistical accuracy can be deduced thanrepresented by the precision of the droplet measurement system. Onceprinting has been planned, the processor(s) calculate(s) printingparameters such as number and sequence of scans, droplet sizes, relativedroplet firing times, and similar information, and builds a print imageused to determine nozzle firing for each scan. In one embodiment, theprint image is a halftone image. In another embodiment, a printhead hasmultiple nozzles, as many as 10,000. As will be described below, eachdroplet can be described according to a time value and a firing value(e.g., data describing a firing waveform or data indicating whether adroplet will be “digitally” fired). In an embodiment where geometricsteps and binary nozzle firing decisions are relied upon to vary dropletvolumes per well, each droplet can be defined by a bit of data, a stepvalue (or scan number) and a positional value indicating where thedroplet is to be placed. In an implementation where scans representcontinuous motion, a time value can be used as the equivalent of apositional value. Whether rooted in time/distance or absolute position,the value describes a position relative to a reference (e.g., asynchronization mark, position or pulse) that specifies with precisionwhere and when a nozzle should be fired. In some embodiments, multiplevalues can be used. For example, in one specifically contemplatedembodiment, a sync pulse is generated for each nozzle in a manner thatcorresponds to each micron of relative printhead/substrate motion duringa scan; relative to each sync pulse, each nozzle is programmed with (a)an offset value describing an integer clock cycle delay before thenozzle is fired, (b) a 4-bit waveform selection signal, to describe oneof fifteen waveform selections preprogrammed into memory dedicated tothe particular nozzle driver (i.e., with one of the sixteen possiblevalues specifying an “off” or non-firing state of the nozzle), and (c) arepeatability value specifying whether the nozzle should be fired onceonly, once for every sync pulse or once for every n sync pulses. In sucha case, the waveform selection and an address for each nozzle areassociated by the processor(s) 1203 with specific droplet volume datastored in memory 1227, with firing of a specific waveform from aspecific nozzle representing a planned decision that a specific,corresponding droplet volume is to be used to supply aggregate ink to aspecific target region of the substrate.

FIGS. 13A-15D will be used to introduce other techniques that can beused to combine different droplet volumes to obtain precisionwithin-tolerance fill volumes for each target region. In a firsttechnique, rows of nozzles can be selectively offset relative to oneanother within a printhead assembly during printing (e.g., in betweenscans). This technique is introduced with reference to FIGS. 13A-13B. Ina second technique, nozzle drive waveforms can be used to adjustpiezoelectric transducer firing and thus properties of each ejecteddroplet (including volume). FIGS. 14A-14B are used to discuss severaloptions. Finally, in one embodiment, a set of multiple, alternativedroplet firing waveforms are computed in advance and made available foruse with each print nozzle. This technique and related circuitry isdiscussed with reference to FIGS. 15A-B.

FIG. 13A provides a plan diagram 1301 of a printhead 1303 traversing asubstrate 1305 in a scanning direction indicated by arrow 1307. Thesubstrate is seen here to consist of a number of pixels 1309 with eachpixel having wells 1309-R, 1309-G and 1309-B associated with respectivecolor components. Note again that this depiction is an example only,i.e., techniques as used herein can be applied to any layer of a display(e.g., not limited to individual color components, and not limited tocolor imparting layers); these techniques can also be used to makethings other than display devices. In this case, it is intended that theprinthead deposit one ink at a time, and assuming that the inks arecolor component-specific, separate printing processes will be performed,each for one of the color components, for respective wells of thedisplay. Thus, if a first process is being used to deposit an inkspecific to red light generation, only a first well of each pixel, suchas well 1309-R of pixel 1309 and a similar well of pixel 1311, willreceive ink in the first printing process. In a second printing process,only the second well (1309-G) of pixel 1309 and a similar well of pixel1311 will receive a second ink, and so forth. The various wells are thusseen as three different overlapping arrays of target regions (in thiscase, fluid receptacles or wells).

The printhead 1303 includes a number of nozzles, such as denoted usingnumbers 1313, 1315 and 1317. In this case, each of numbers refers to aseparate row of nozzles, with the rows extending along a column axis1318 of the substrate. Nozzles 1313, 1315 and 1317 are seen to form afirst column of nozzles, relative to the substrate 1305, and nozzles1329 represent a second column of nozzles. As depicted by FIG. 13A, thenozzles do not align with the pixels and, as the printhead traverses thesubstrate in a scan, some nozzles will pass over target regions whileother nozzles will not. Furthermore, in the FIG., while print nozzles1313, 1315 and 1317 will precisely align to the center of a row ofpixels beginning with pixel 1309 and while the print nozzles 1329 willalso pass over the row of pixels beginning with pixel 1311, thealignment of print nozzles 1329 is not precise to the center of thepixel 1311 and its associated row. This alignment/misalignment of thecolumns of nozzles with the rows of wells is respectively depicted bylines 1325 and 1327, which denote centers of print wells that are toreceive ink. In many applications, the precise location at which thedroplet is deposited within a target region is not important, and suchmisalignments are acceptable (e.g., it may be desired to roughly alignsome group of multiple nozzles with each row, as discussed in connectionwith FIGS. 1B and 4D).

FIG. 13B provides a second view 1331, in which it is seen that all threerows of nozzles (or individual printheads) have been rotated byapproximately thirty degrees relative to axis 1318. This optionalcapability was referenced earlier by numeral 338 in FIG. 3B. Morespecifically, because of the rotation, the spacing of the nozzles alongthe column axis 1318 has now changed, with each column of nozzlesaligning with well centers 1325 and 1327, or otherwise adjusted so as toincrease nozzle apparent density per target print region during a scan.Note however, that because of such rotation and scanning motion 1307,nozzles from each column of nozzles will cross a column of pixels (e.g.,1309 and 1311) at different relative times, and thus potentially havedifferent positional firing data (e.g., different timing for firingdroplets). Methods for adjusting firing data for each nozzle will bediscussed below in connection with FIGS. 15A-B.

As represented in FIG. 13C, in one embodiment, a printhead assemblyoptionally endowed with multiple printheads or rows of nozzles can havesuch rows selectively offset from one another. That is, FIG. 13Cprovides another plan view, where each of printheads (or nozzle rows)1319, 1321 and 1323 are offset relative to one another, as representedby offset arrows 1353 and 1355. These arrows represent use of anoptional motion mechanism, one for each row of nozzles, to permitselective offset of the corresponding row, relative to the printheadassembly. This provides for different combinations of nozzles (andassociated specific droplet volumes) with each scan, and thus fordifferent specific droplet combinations (e.g., per numeral 1307). Forexample, in such an embodiment, and as depicted by FIG. 13C, such anoffset permits both of nozzles 1313 and 1357 to align with center line1325 and thus have their respective droplet volumes combined in a singlepass. Note that this embodiment is considered a specific instance ofembodiments which vary geometric steps, e.g., even if the geometric stepsize between successive scans of a printhead assembly 1303 relative tothe substrate 1305 is fixed, each such scan motion of a given row ofnozzles is effectively positioned at a variable offset or step using themotion mechanism relative to a given row's position in other scans. Alsoor alternatively, such offset can be performed to adjust an effectiveprint grid, to provided varied spacings between deposited droplets.Consistent with the principles introduced earlier, the use of optionaloffsets permits individual-per-nozzle droplet volumes to be aggregatedin particular combinations (or droplet sets) for each well, but with areduced number of scans or passes. For example, with the embodimentdepicted in 13C, three droplets could be deposited in each target region(e.g., wells for red color component) with each scan, and further, theoffsets permit planned variation of droplet volume and/or spatialcombinations.

FIG. 13D illustrates a cross-section of a finished display for one well(e.g., well 1309-R from FIG. 13A), taken in the direction of scanning.In particular, this view shows the substrate 1352 of a flat paneldisplay, in particular, an OLED device. The depicted cross-section showsan active region 1353 and conductive terminals 1355 to receiveelectrical signals to control the display (including color of eachpixel). A small elliptical region 1361 of the view is seen magnified atthe right side of the FIG. to illustrate layers in the active regionabove the substrate 1352. These layers respectively include an anodelayer 1369, σ hole injection layer (“HIL”) 1371, σ hole transport layer(“HTL”) 1373, an emissive or light emitting layer (“EML”) 1375, anelectron transport layer (“ETL”) 1377 and a cathode layer 1378.Additional layers, such as polarizers, barrier layers, primers and othermaterials can also be included. In some cases, the OLED device caninclude only a subset of these layers. When the depicted stack iseventually operated following manufacture, current flow causes therecombination of electrons and “holes” in the EML, resulting in theemission of light. The anode layer 1369 can comprise one or moretransparent electrodes common to several color components and/or pixels;for example, the anode can be formed from indium tin oxide (ITO). Theanode layer 1369 can also be reflective or opaque, and other materialscan be used. The cathode layer 1378 typically consists of patternedelectrodes to provide selective control to each color component for eachpixel. The cathode layer can comprise a reflective metal layer, such asaluminum. The cathode layer can also comprise an opaque layer or atransparent layer, such as a thin layer of metal combined with a layerof ITO. Together, the cathode and anode serve to supply and collect theelectrons and holes that pass into and/or through the OLED stack. TheHIL 1371 typically functions to transport holes from the anode into theHTL. The HTL 1373 typically functions to transport holes from the HILinto the EML while also impeding the transport of electrons from the EMLinto the HTL. The ETL 1377 typically functions to transport electronsfrom the cathode into the EML while also impeding the transport ofelectrons from the EML into the ETL. Together these layers thereby serveto supply electrons and holes into the EML 1375 and confine thoseelectrons and holes in that layer, so that they can recombine togenerate light. Typically, the EML consists of separately-controlled,active materials for each of three primary colors, red, green and blue,for each pixel of the display, and as mentioned, is represented in thiscase by a red light producing material.

Layers in the active region can be degraded through exposure to oxygenand/or moisture. It is therefore desired to enhance OLED lifetime byencapsulating these layers, both on faces and sides (1362/1363) of thoselayers opposite the substrate, as well as lateral edges. The purpose ofencapsulation is to provide an oxygen and/or moisture resistant barrier.Such encapsulation can be formed, in whole or in part, via thedeposition of one or more thin film layers.

The techniques discussed herein can be used to deposit any of theselayers, as well as combinations of such layers. Thus, in onecontemplated application, the techniques discussed herein provide theink volume for the EML layer for each of the three primary colors. Inanother application, the techniques discussed herein are used to provideink volume for the HIL layer, and so on. In yet another application, thetechniques discussed herein are used to provide ink volume for one ormore OLED encapsulation layers. The printing techniques discussed hereincan be used to deposit organic or inorganic layers, as appropriate tothe process technology, and layers for other types of displays andnon-display devices.

FIG. 14A is used to introduce nozzle drive waveform adjustment and theuse of alternate nozzle drive waveforms to provide different ejecteddroplet volumes from each nozzle of a printhead. A first waveform 1403is seen as a single pulse, consisting of a quiet interval 1405 (0Volts), a rising slope 1413 associated with a decision to fire a nozzleat time t₂, a voltage pulse or signal level 1407, and a falling slope1411 at time t₃. Effective pulse width, represented by numeral 1409, isof duration approximately equal to t₃-t₂, depending on differencesbetween the rising and falling slopes of the pulse. In one embodiment,any of these parameters (e.g., rising slope, voltage, falling slope,pulse duration) can be varied to potentially change droplet volumeejection characteristics for a given nozzle. A second waveform 1423 issimilar to the first waveform 1403, except it represents a largerdriving voltage 1425 relative to the signal level 1407 of the firstwaveform 1403. Because of a larger pulse voltage and finite rising slope1427, it takes longer to reach this higher voltage, and similarly, afalling slope 1429 typically lags relative to a similar slope 1411 fromthe first waveform. A third waveform 1433 is also similar to the firstwaveform 1403 except, in this case, a different rising slope 1435 and ora different falling slope 1437 can be used instead of slopes 1413 and1411 (e.g., through adjustment of nozzle firing path impedances). Thedifferent slopes can be made either steeper or shallower (in thedepicted case, steeper). With a fourth waveform 1443, by contrast, thepulse is made longer, for example using delay circuits (e.g., avoltage-controlled delay line) to increase both time of pulse at a givensignal level (as denoted by numeral 1445) and to delay the falling edgeof the pulse, as represented by numeral 1447. Finally, a fifth waveform1453 represents the use of multiple, discrete signal levels as alsoproviding a means of pulse shaping. For example, this waveform is seento include time at the first-mentioned signal level 1407, but then aslope that rises to a second signal level 1455, applied halfway betweentimes t₃ and t₂. Because of the larger voltage, a trailing edge of thiswaveform 1457 is seen to lag behind falling edge 1311.

Any of these techniques can be used in combination with any of theembodiments discussed herein. For example, drive waveform adjustmenttechniques can optionally be used to vary droplet volumes within a smallrange after scan motion and nozzle firing has already been planned, tomitigate line effect. The design of the waveform variation in a mannersuch that the second tolerance conforms to specification facilitates thedeposition of high-quality layers with planned non-random or plannedrandom variation. For example, returning to the hypothetical introducedearlier where a television maker specifies fill volumes of 50.00pL±0.50%, per-region fill volumes can be calculated within a first rangeof 50.00 pL±0.25% (49.785 pL-50.125 pL), with non-random or randomtechniques applied to waveform variation where the variationstatistically contributes no more than ±0.025 pL volume variation perdroplet (given 5 droplets required to reach the aggregate fill volume).Alternatively or in addition, drive waveform variation can be used toinfluence velocity or trajectory (flight angle) of ejected droplet. Forexample, in one process, droplets are required to meet a predeterminedset of criteria as to volume and/or velocity and/or trajectory; if adroplet falls outside of accepted norms, then a nozzle drive waveformcan be adjusted until compliance is achieved. Alternatively, a set ofpredetermined waveforms can be measured, with a subset of thesewaveforms selected based on conformance to desired norms. Clearly, manyvariations exist.

As noted above, in one embodiment, represented by the fifth waveform1453 from FIG. 14A, multiple signal levels can be used to shape a pulse.This technique is further discussed in reference to FIG. 14B.

That is, in one embodiment, waveforms can be predefined as a sequence ofdiscrete signal levels, e.g., defined by digital data, with a drivewaveform being generated by a digital-to-analog converter (DAC). Numeral1451 in FIG. 14B refers to a waveform 1453 having discrete signallevels, 1455, 1457, 1459, 1461, 1463, 1465 and 1467. In this embodiment,each nozzle driver includes circuitry that receives and stores up tosixteen different signal waveforms, with each waveform being defined aseries of up to sixteen signal levels, each expressed as a multi-bitvoltage and a duration. That is to say, in such an embodiment, pulsewidth can effectively be varied by defining different durations for oneor more signal levels, and drive voltage can be waveform-shaped in amanner chosen to provide subtle droplet size variation, e.g., withdroplet volumes gauged to provide specific volume gradations incrementssuch as in units of 0.10 pL. Thus, with such an embodiment, waveformshaping provides ability to tailor droplet volumes to be close to atarget droplet volume value; when combined with other specific dropletvolumes, such as using the techniques exemplified above, thesetechniques facilitate precise fill volumes per target region. Inaddition, however, these waveform shaping techniques also facilitate astrategy for reducing or eliminating line effect; for example, in oneoptional embodiment, droplets of specific volumes are combined, asdiscussed above, but the last droplet (or droplets) is selected in amanner that provides variation relative to the boundaries of the desiredtolerance range. In another embodiment, predetermined waveforms can beapplied with optional, further waveform shaping or timing applied asappropriate to adjust droplet volume, velocity and/or trajectory. In yetanother example, the use of nozzle drive waveform alternatives providesa mechanism to plan volumes such that no further waveform shaping isnecessary.

Typically, the effects of different drive waveforms and resultantdroplet volumes are measured in advance. For each nozzle, up to sixteendifferent drive waveforms are then stored in a per-nozzle, 1 ksynchronous random access memory (SRAM) for later, elective use inproviding discrete volume variations, as selected by software. With thedifferent drive waveforms on hand, each nozzle is then instructeddroplet-by-droplet as to which waveform to apply via the programming ofdata that effectuates the specific drive waveform.

FIG. 15A illustrates such an embodiment, generally designated by numeral1501. In particular, a processor 1503 is used to receive data definingintended fill volumes per target region for a particular layer ofmaterial that is to be printed. As represented by numeral 1505, thisdata can be a layout file or bitmap file that defines droplet volumesper grid point or positional address. A series of piezoelectrictransducers 1507, 1508 and 1509 generate associated ejected dropletvolumes 1511, 1512 and 1513, that are respectively dependent on manyfactors, including nozzle drive waveform and print-head-to-print-headmanufacturing variations. During a calibration operation, each one of aset of variables is tested for its effects on droplet volume, includingnozzle-to-nozzle variation and the use of different drive waveforms,given the particular ink that will be used; if desired, this calibrationoperation can be made dynamic, for example, to respond to changes intemperature, nozzle clogging, or other parameters. This calibration isrepresented by a droplet measurement device 1515, which providesmeasured data to the processor 1503 for use in managing print planningand ensuing printing. In one embodiment, this measurement data iscalculated during an operation that takes literally minutes, e.g., nomore than thirty minutes for thousands of nozzles and preferably muchless (e.g., for thousands of printhead nozzles and potentially dozens ofpossible nozzle firing waveforms). In another embodiment, as mentioned,such measurement can be performed iteratively, that is to updatedifferent subsets of nozzles at different points in time. A non-imaging(e.g., interferometric) technique can optionally be used as describedearlier, potentially resulting in dozens of droplet measurements pernozzle, covering dozens to hundreds of nozzles per second. This data andany associated statistical models (and means) can be stored in memory1517 for use in processing the layout or bitmap data 1505 when it isreceived. In one implementation, processor 1503 is part of a computerthat is remote from the actual printer, whereas in a secondimplementation, processor 1503 is either integrated with a fabricationmechanism for products (e.g., a system for fabricating displays) or witha printer.

To perform the firing of droplets, a set of one or more timing orsynchronization signals 1519 are received for use as references, andthese are passed through a clock tree 1521 for distribution to eachnozzle driver 1523, 1524 and 1525 to generate the drive waveform for theparticular nozzle (1527, 1528 and 1529, respectively). Each nozzledriver has one or more registers 1531, 1532 and 1533, respectively,which receive multi-bit programming data and timing information from theprocessor 1503. Each nozzle driver and its associated registers receiveone or more dedicated write enable signals (we_(n)) for purposes ofprogramming the registers 1531, 1532 and 1533, respectively. In oneembodiment, each of the registers comprises a fair amount of memory,including a 1 k SRAM to store multiple, predetermined waveforms, andprogrammable registers to select between those waveforms and otherwisecontrol waveform generation. The data and timing information from theprocessor is depicted as multi-bit information, and although thisinformation can be provided either via a serial or parallel bitconnection to each nozzle (as will be seen in FIG. 15B, discussed below,in one embodiment, this connection is serial as opposed to the parallelsignal representation seen in FIG. 15A).

For a given deposition, printhead or ink, the processor chooses for eachnozzle a set of sixteen drive waveforms that can be electively appliedto generate a droplet; note that this number is arbitrary, e.g., in onedesign, four waveforms could be used, while in another, four thousandcould be used. These waveforms are advantageously selected to providedesired variation in output droplet volume for each nozzle, e.g., tocause each nozzle to have at least one waveform choice that produces anear-ideal droplet volume (e.g., a mean droplet volume of 10.00 pL) andto provide a range of deliberate volume variation for each nozzle. Invarious embodiments, the same set of sixteen drive waveforms are usedfor all of the nozzles, though in the depicted embodiment, sixteen,possibly-unique waveforms are each separate defined in advance for eachnozzle, each waveform conferring respective droplet volumecharacteristics.

During printing, to control deposition of each droplet, data selectingone of the predefined waveforms is then programmed into each nozzle'srespective registers 1531, 1532 or 1533 on a nozzle-by-nozzle basis. Forexample, given a target droplet volume of 10.00 pL, nozzle driver 1523can be configured through writing of data into registers 1531 to set oneof sixteen waveforms corresponding to one of sixteen different dropletvolumes. The volume produced by each nozzle would have been measured bythe droplet measurement device 1515, with nozzle-by-nozzle (andwaveform-by-waveform) droplet volumes and associated distributionsregistered by the processor 1503 and stored in memory in aid ofproducing desired target fills. The processor can, by programming theregister 1531, define whether or not it wants the specific nozzle driver1523 to output a processor-selected one of the sixteen waveforms. Inaddition, the processor can program the register to have a per-nozzledelay or offset to the firing of the nozzle for a given scan line (e.g.,to align each nozzle with a grid traversed by the printhead, to correctfor error including velocity or trajectory error, and for otherpurposes); this offset is effectuated by counters which skew theparticular nozzle (or firing waveform) by a programmable number oftiming pulses for each scan. To provide an example, if the result ofdroplet measurement indicates that one particular droplet tends to havea lower than expected velocity, then corresponding nozzle waveform canbe triggered earlier (e.g., advanced in time, by reducing a dead timebefore active signal levels used for piezoelectric actuation);conversely, if the result of droplet measurement indicates that the oneparticular droplet has a relatively high velocity, then the waveform canbe triggered later, and so forth. Other examples are clearlypossible—for example, a slow droplet velocity can be counteracted insome embodiments by increasing drive strength (i.e., signal levels andassociated voltage used to drive a given nozzle's piezoelectricactuator). In one embodiment, a sync signal distributed to all nozzlesoccurs at a defined interval of time (e.g., one microsecond) forpurposes of synchronization and in another embodiment, the sync signalis adjusted relative to printer motion and substrate geography, e.g., tofire every micron of incremental relative motion between printhead andsubstrate. The high speed clock (cp_(hs)) is run thousands of timesfaster than the sync signal, e.g., at 100 megahertz, 33 megahertz, etc.;in one embodiment, multiple different clocks or other timing signals(e.g., strobe signals) can be used in combination. The processor alsoprograms values defining a grid spacing; in one implementation, the gridspacing is common to the entire pool of available nozzles, though thisneed not be the case for each implementation. For example, in somecases, a regular grid can be defined where every nozzle is to fire“every five microns.” This grid can be unique to the printing system,the substrate, or both. Thus, in one optional embodiment, a grid can bedefined for a particular printer with sync frequency or nozzle firingpatterns used to effectively transform the grid to match a substrategeography that is a priori unknown. In another contemplated embodiment,a memory is shared across all nozzles that permits the processor topre-store a number of different grid spacings (e.g., 16), shared acrossall nozzles, such that the processor can (on demand) select a new gridspacing which is then read out to all nozzles (e.g., to define anirregular grid). For example, in an implementation where nozzles are tofire for every color component well of an OLED (e.g. to deposit anon-color-specific layer), the three or more different grid spacings canbe continuously applied in round robin fashion by the processor.Clearly, many design alternatives are possible. Note that the processor1503 can also dynamically reprogram the register of each nozzle duringoperation, i.e., the sync pulse is applied as a trigger to launch anyprogrammed waveform pulse set in its registers, and if new data isasynchronously received before the next sync pulse, then the new datawill be applied with the next sync pulse. The processor 1503 alsocontrols initiation and speed of scanning (1535) in addition to settingparameters for the sync pulse generation (1536). In addition, theprocessor controls rotation of the printhead (1537), for the variouspurposes described above. In this way, each nozzle can concurrently (orsimultaneously) fire using any one of sixteen different waveforms foreach nozzle at any time (i.e., with any “next” sync pulse), and theselected firing waveform can be switched with any other of the sixteendifferent waveforms dynamically, in between fires, during a single scan.

FIG. 15B shows additional detail of the circuitry (1541) used in such anembodiment to generate output nozzle drive waveforms for each nozzle;the output waveform is represented as “nzzl-drv. wvfm” in FIG. 15B. Morespecifically, the circuitry 1541 receives inputs of the sync signal, asingle bit line carrying serial data (“data”), a dedicated write enablesignal (we) and the high speed clock (φ_(hs)). A register file 1543provides data for at least three registers, respectively conveying aninitial offset, a grid definition value and a drive waveform ID. Theinitial offset is a programmable value that adjusts each nozzle to alignwith the start of a grid, as mentioned. For example, givenimplementation variables such as multiple printheads, multiple rows ofnozzles, different printhead rotations, nozzle firing velocity andpatterns and other factors, the initial offset can be used to align eachnozzle's droplet pattern with the start of the grid, to account fordelays and other factors. Offsets can be differently applied acrossmultiple nozzles, for example, to rotate a grid or halftone patternrelative to substrate geography, or to correct for substratemisalignment. Similarly, as mentioned, offsets can also be used tocorrect for aberrant velocity or other effects. The grid definitionvalue is a number that represents the number of sync pulses “counted”before the programmed waveform is triggered; in the case of animplementation that prints flat panel displays (e.g., OLED panels), thetarget regions to be printed in presumably have one or more regularspacings relative to the different printhead nozzles, corresponding to aregular (constant spacing) or irregular (multiple spacing) grid. Asmentioned earlier, in one implementation, the processor keeps its ownsixteen-entry SRAM to define up to sixteen different grid spacings thatcan be read out on demand to the register circuitry for all nozzles.Thus, if the grid spacing value was set to two (e.g., every twomicrons), then each nozzle would be fired at this interval. The drivewaveform ID represents a selection of one of the pre-stored drivewaveforms for each nozzle, and can be programmed and stored in manymanners, depending on embodiment. In one embodiment, the drive waveformID is a four bit selection value, and each nozzle has its own, dedicated1 k-byte SRAM to store up to sixteen predetermined nozzle drivewaveforms, stored as 16×16×4B entries. Briefly, each of sixteen entriesfor each waveform contains four bytes representing a programmable signallevel, with these four bytes representing a two-byte resolution voltagelevel and a two-byte programmable duration, used to count a number ofpulses of the high-speed clock. Each programmable waveform can thusconsist of (zero to one) discrete pulses to up to sixteen discretepulses each of programmable voltage and duration (e.g., of durationequal to 1-255 pulses of a 33 megahertz clock).

Numerals 1545, 1546 and 1547 designate one embodiment of circuitry thatshows how a specified waveform can be generated for a given nozzle. Afirst counter 1545 receives the sync pulse, to initiate a countdown ofthe initial offset, triggered by start of a new line scan; the firstcounter 1545 counts down in micron increments and, when zero is reached,a trigger signal is output from the first counter 1545 to a secondcounter 1546; this trigger signal essentially starts the firing processfor each nozzle for each scan line. The second counter 1546 thenimplements a programmable grid spacing in increments of microns. Thefirst counter 1545 is reset in conjunction with a new scan line, whereasthe second counter 1546 is reset using the next edge of the high-speedclock following its output trigger. The second counter 1546, whentriggered, and activates a waveform circuit generator 1547 whichgenerates the selected drive waveform shape for the particular nozzle.As denoted by dashed line boxes 1548-1550, seen beneath the generatorcircuit, this latter circuit is based on a high speed digital-to-analogconverter 1548, a counter 1549, and a high-voltage amplifier 1550, timedaccording to the high-speed clock (cons). As the trigger from the secondcounter 1546 is received, the waveform generator circuit retrieves thenumber pairs (signal level and duration) represented by the drivewaveform ID value and generates a given analog output voltage accordingto the signal level value, with the counter 1549 effective to hold DACoutput for a duration according to the counter. The pertinent outputvoltage level is then applied to the high-voltage amplifier 1550 and isoutput as the nozzle-drive waveform. The next number pair is thenlatched out from registers 1543 to define the next signal levelvalue/duration, and so forth.

The depicted circuitry provides an effective means of defining anydesired waveform according to data provided by the processor 1503. Ifnecessary to comply with grid geometry or to mitigate a nozzle withaberrant velocity or flight angle, the durations and/or voltage levelsassociated with any specific signal level (e.g., a first, “zero” signallevel defining an offset relative to synch) can be adjusted. As noted,in one embodiment, the processor decides upon a set of waveforms inadvance (e.g., 16 possible waveforms, per-nozzle) and it then writesdefinition for each of these selected waveforms into SRAM for eachnozzle's driver circuitry, with a “firing-time” decision of programmablewaveform then being effected by writing a four-bit drive waveform IDinto each nozzles registers.

FIG. 15C provides a flow chart 1551 that discusses methods of usingdifferent waveforms per nozzle and different configuration options. Asdenoted by 1553, σ system (e.g., one or more processors acting underinstruction from suitable software) selects a set of predeterminednozzle drive waveforms. For each waveform and for each nozzle (1555),droplet volume is specifically measured and a statistical model isbuilt, e.g., using a laser measurement device or CCD camera for example.These volumes are stored in memory accessible to the processor, such asmemory 1557. Again, measured parameters can vary depending on choice ofink and many other factors; therefore, calibration is performeddepending on those factors and planned deposition activities. Forexample, in one embodiment 1561, calibration can be performed at thefactory that manufactures the printhead or printer, and this data can bepreprogrammed into a sold device (e.g., a printer) or made available fordownload. Alternatively, for printers that possess an optional dropletmeasurement device or system, these volume measurements can be performedat first use (1562), e.g., upon initial device configuration. In stillanother embodiment, the measurements are performed with each power orsubstrate cycle (1563), for example, each time the printer is turned“on” or is awakened from a low-power state or otherwise moved into astate in which it is ready for printing. As mentioned previously, forembodiments where ejected droplet volumes are affected by temperature orother dynamic factors, calibration can be performed on an intermittentor periodic basis (1564), for example, after expiration of a definedtime interval, when an error is detected, at the state of each newsubstrate operation (e.g. during substrate loading and/or loading),every day, or on some other basis. Other calibration techniques andschedules can also be used (1565).

The calibration techniques can optionally be performed in an offlineprocess, or during a calibration mode, as represented by processseparation line 1566. As mentioned, in one embodiment, such a process iscompleted in less than thirty minutes, potentially for thousands ofprint nozzles and one or more associated nozzle firing waveforms. Duringan online operation (or during a printing mode), represented below thisprocess separation line 1566, the measured droplet volumes are used inselecting sets of droplets per target region, based on specific,measured droplet volumes, such that droplet volumes for each set sum toa specific aggregate volume within a defined tolerance range, per 1567.The volumes per region can be selected based on a layout file, bitmapdata, or some other representation, as represented by numeral 1568.Based on these droplet volumes and the permissible combinations ofdroplet volumes for each target region, a firing pattern and/or scanpath is selected, in effect representing a particular combination ofdroplets (i.e., one of the acceptable sets of combinations) for eachtarget region that will be used for the deposition process, asrepresented by numeral 1569. As part of this selection or planningprocess 1569, an optimization function 1570 can optionally be employed,for example, to reduce the number of scans or passes to fewer than theproduct of the average number of droplets per target region times thenumber of rows (or columns) of target regions (e.g., to less than whatwould be required for one row of nozzles, turned 90 degrees such thatall nozzles in the row could be used in each scan for each affectedtarget region, and depositing droplets in multiple passes for each rowof target region, proceeding one row at a time). For each scan, theprinthead can be moved, and per-nozzle waveform data can be programmedinto the nozzle to effectuate droplet deposition instructions accordingto the bitmap or layout file; these functions are variously representedby numerals 1571, 1573 and 1575 in FIG. 15C. After each scan, theprocess is repeated for an ensuing scan, per numeral 1577. Optionally,these techniques and their implementation can be embodied in a printercontrol file 1579, developed for later or repeatable used in controllingthe ejection of ink at specific times.

Note once again that several different implementations have beendescribed above which are optional relative to one another. First, inone embodiment, drive waveform is not varied, but remains constant foreach nozzle. Droplet volume combinations are produced, as necessary, byusing a variable geometric step representing printhead/substrate offsetto overlay different nozzles with different rows of target regions.Using measured per-nozzle droplet volumes, this process permitscombination of specific droplet volumes means to achieve very specificfill volumes (e.g., to 0.01 pL resolution) per target region, with highconfidence that any droplet volume variations can be accommodated withindesired tolerances. This process can be planned such that multiplenozzles are used to deposit ink in different rows of target regions witheach pass. In one embodiment, the print solution is optimized to producethe fewest scans possible and the fastest printing time possible.Second, in another embodiment, different drive waveforms can be used foreach nozzle, again, using specifically measured droplet volumes. Theprint process controls these waveforms such that specific dropletvolumes are aggregated in specific combinations. Once again, usingmeasured per-nozzle droplet volumes, this process permits combination ofspecific droplet volume means to achieve very specific fill volumes(e.g., to 0.01 pL resolution) per target region. This process can beplanned such that multiple nozzles are used to deposit ink in differentrows of target regions with each pass. In both of these embodiments, asingle row of nozzles can be used or multiple rows of nozzles can used,arranged as one or more printheads of a printhead assembly; for example,in one contemplated implementation, thirty printheads can be used, eachprinthead having a single row of nozzles, with each row having 256nozzles. The printheads can be further organized into various differentgroupings; for example, these printheads can be organized into printheadassemblies each having five printheads that are mechanically mountedtogether, and these resulting six assemblies can be separately mountedinto a printing system. In yet another embodiment, an aggregateprinthead assembly is used which has having multiple rows of nozzlesthat can further be positionally offset from each other. This embodimentis similar to the first embodiment mentioned above, in that differentdroplet volumes can be combined using variable effective positionaloffsets or geometric steps. Once again, using measured per-nozzledroplet volumes, this process permits combination of specific dropletvolume means to achieve very specific fill volumes (e.g., to 0.05 pL, oreven to 0.01 pL resolution) per target region. This does not necessarilyimply that measurements are free from statistical uncertainties, such asmeasurement error; in one embodiment, such error is small and isfactored into target region fill planning. For example, if dropletvolume measurement error is ±a %, then fill volume variation acrosstarget regions can be planned to within a tolerance range of a targetfill ±(b−an^(−1/2)) %, where ±(b) % represents the specificationtolerance range and n^(1/2) represents the square root of the averagenumber of droplets per target region or well. Perhaps otherwise stated,a range that is smaller than specification tolerance can be planned for,such that when expected measurement error is factored in, the resultantaggregate fill volumes for target region can be expected to fall withinthe specification tolerance range, e.g., as described above inconnection with FIGS. 8A-8B. Naturally, the techniques described hereincan be optionally combined with other statistical processes.

Droplet deposition can optionally be planned such that multiple nozzlesare used to deposit ink in different rows of target regions with eachpass, with the print solution optionally being optimized to produce thefewest scans possible and the fastest printing time possible. Asmentioned earlier, any combination of these techniques with each otherand/or with other techniques can also be employed. For example, in onespecifically-contemplated scenario, variable geometric stepping is usedwith per-nozzle drive waveform variation and per-nozzle,per-drive-waveform volume measurements to achieve very specific volumecombinations, planned per target region. For example, in anotherspecifically-contemplated scenario, fixed geometric stepping is usedwith per-nozzle drive waveform variation and per-nozzle,per-drive-waveform volume measurements to achieve very specific volumecombinations, planned per target region.

By maximizing the number of nozzles that can be concurrently used duringeach scan and by planning droplet volume combinations such that theynecessarily meet specification, these embodiments promise high-qualitydisplays; by also reducing printing time, these embodiments help promoteultra-low per-unit printing costs, and thus lower the price point to endconsumers.

FIG. 15D provides a flow diagram relating to nozzle qualification. Inone embodiment, droplet measurement is performed to yield statisticalmodels (e.g., distribution and mean) for each nozzle and for eachwaveform applied to any given nozzle, for any of and/or each of dropletvolume, velocity and trajectory. Thus, for example, if there are twochoices of waveforms for each of a dozen nozzles, there are up to 24waveform-nozzle combinations or pairings; in one embodiment,measurements for each parameter (e.g. volume) are taken for each nozzleor waveform-nozzle pairing sufficient to develop a robust statisticalmodel. Note that despite planning, it is conceptually possible that agiven nozzle or nozzle-waveform pairing may yield an exceptionally widedistribution, or a mean which is sufficiently aberrant that it should bespecially treated. Such special treatment applied in one embodiment isrepresented conceptually by FIG. 15D.

More particularly, a general method is denoted using reference numeral1581. Data generated by the droplet measurement device is stored inmemory 1585 for later use. During the application of method 1581, thisdata is recalled from memory and data for each nozzle or nozzle-waveformpairing is extracted and individually processed (1583). In oneembodiment, as mentioned, a normal random distribution is built for eachvariable to be qualified, as described by a mean, standard deviation andnumber of droplets measured (n), or using equivalent measures. Noteagain that other distribution formats (e.g., Student's-T, Poisson,etc.), can be used. Measured parameters are compared to one or moreranges (1587) to determine whether the pertinent droplet can be used inpractice. In one embodiment, at least one range is applied to disqualifydroplets from use (e.g., if the droplet has a sufficiently large orsmall volume relative to desired target, then that nozzle ornozzle-waveform pairing can be excluded from short-term use). To providean example, if 10.00 pL droplets are desired, then a nozzle ornozzle-waveform linked to a droplet mean more than, e.g., 1.5% away fromthis target (e.g., <9.85 pL or >10.15 pL) can be excluded from use.Range, standard deviation, variance, or another spread measure can alsoor instead be used. For example, if it is desired to have dropletstatistical models with a narrow distribution (e.g., 3σ<1.005% of mean),then droplets with measurements not meeting this criteria can beexcluded. It is also possible to use a sophisticated/complex set ofcriteria which considers multiple factors. For example, an aberrant meancombined with a very narrow spread might be okay, e.g., if spread (e.g.,3σ) away from measured (e.g., aberrant) mean p is within 1.005%, then anassociated droplet can be used. For example, if it is desired to usedroplets with 3σ volume within 10.00 pL±0.1 pL, then a nozzle-waveformpairing producing a 9.96 pL mean with ±0.8 pL 3σ value might beexcluded, but a nozzle-waveform pairing producing a 9.93 pL mean with±0.3 pL 3σ value might be acceptable. Clearly many possibilities arepossible according to any desired rejection/aberration criteria (1589).Note that this same type of processing can be applied for per-dropletflight angle and velocity, i.e., it is expected that flight angle andvelocity per nozzle-waveform pairing will exhibit statisticaldistribution and, depending on measurements and statistical modelsderived from the droplet measurement device, some droplets can beexcluded. For example, a droplet having a mean velocity or flighttrajectory that is outside of 5% of normal, or a variance in velocityoutside of a specific target could hypothetically be excluded from use.Different ranges and/or evaluation criteria can be applied to eachdroplet parameter measured and provided by storage 1585.

Note that depending on the rejection/aberration criteria 1589, droplets(and nozzle-waveform combinations) can be processed and/or treated indifferent manners. For example, a particular droplet not meeting adesired norm can be rejected (1591), as mentioned. Alternatively, it ispossible to selectively perform additional measurements for the nextmeasurement iteration of the particular nozzle-waveform pairing; as anexample, if a statistical distribution is too wide, it is possible tospecially perform additional measurements for the particularnozzle-waveform pairing so as to improve tightness of a statisticaldistribution through additional measurement (e.g., variance and standarddeviation are dependent on the number of measured data points). Pernumeral 1593, it is also possible to adjust a nozzle drive waveform, forexample, to use a higher or lower voltage level (e.g., to providegreater or lesser velocity or more consistent flight angle), or toreshape a waveform so as to produce an adjusted nozzle-waveform pairingthat meets specified norms. Per numeral 1594, timing of the waveform canalso be adjusted (e.g., to compensate for aberrant mean velocityassociated with a particular nozzle-waveform pairing). As an example(alluded to earlier), a slow droplet can be fired at an earlier timerelative to other nozzles, and a fast droplet can be fired later in timeto compensate for faster flight time. Many such alternatives arepossible. Finally, per numeral 1595, any adjusted parameters (e.g.,firing time, waveform voltage level or shape) can be stored andoptionally, if desired, the adjusted parameters can be applied toremeasure one or more associated droplets. After each nozzle-waveformpairing (modified or otherwise) is qualified (passed or rejected), themethod then proceeds to the next nozzle-waveform pairing, per numeral1597.

As should be appreciated, the nozzle drive structure just describedprovides flexibility in printing droplets of different sizes. The use ofprecision fill volumes per target region, droplet volumes, dropletvelocities and droplet trajectories enable the use of advancedtechniques that vary fill volumes and plan for nozzle/waveform and/ordroplet use according to defined criteria (within specification). Thisprovides for further quality improvements relative to conventionalmethods.

FIGS. 16-18B will now be used to provide further detail on twocontemplated droplet measurement devices (or systems), namely,predicated on shadowgraphy and interferometry, respectively. FIGS. 16-17will be used to illustrate one embodiment of a printer having a dropletmeasurement system, whereas FIGS. 18A and 18B will be used to discussshadowgraphy and interferometry, respectively.

As noted earlier, the present teachings disclose various embodiments ofan industrial inkjet thin film printing system that includes a dropmeasurement apparatus integrated into the printing system. Variousembodiments of an inkjet thin film printing system of the presentteachings can utilize imaging techniques, such as shadowgraphy, ornon-imaging techniques such as phase Doppler analysis (PDA) (a techniquebased on interferometry), which can provide a significant advantage forthe rapid measurement of a plurality of nozzles of an inkjet printhead,where various embodiments of a printhead assembly used in a thin filminkjet printing system according to the present teachings can have aplurality of printheads. Such rapid measurement can be performed in situat any time during a printing process and can provide data that caninclude the volume, velocity and trajectory for each drop from eachnozzle of each printhead. The collective data obtained from a dropmeasurement apparatus integrated into an inkjet thin-film printingsystem can be utilized to provide uniformity of ink volume delivered toeach of millions of pixels on an OLED panel display. Other techniquescan also be used to provide relatively rapid measurement of individualdroplet parameters, including without limitation pulse displacementmeasurement techniques, planar Doppler velocimetry, flow fieldvisualization with a charge coupled device, laser Doppler velocimetry,interferometric laser imaging droplet sizing and/or interferometricparticle imaging, laser Doppler anemometry, phase Doppler anemometry, orother processes. In some embodiments, these techniques are “imaging”techniques, such that a photograph (or other form of image) is taken ofa measurement area; in other embodiments, non-imaging optical techniquesare used, e.g., where optical sensors are used to detect an interferencepattern based on incident light without generating an image (such as ofa droplet's shape). Other techniques can also be used. In theembodiments discussed herein, discussion will focus on use ofinterferometry-based and shadowgraphy-based techniques (as non-imagingand imaging techniques, respectively), but any suitable dropletmeasurement technique can be used to measure droplet velocity, volume,flight trajectory, or another desired parameter.

When depositing a film in the manufacture of an OLED panel, it is oftendesirable to deposit film material having uniform thickness across thepanel because the thickness of the deposited film material often impactspanel performance, and good display uniformity is an important attributeof a good OLED panel. When using an inkjet printing method to depositthe film, drops of ink are ejected from the printing apparatus onto thepanel substrate, and the thickness of the deposited film in each area ofthe panel is typically related to the volume of ink dispensed over thatarea of the panel, which is further related to the volume and placementof drops onto a panel surface. It is therefore often desirable todispense volumes of ink uniformly, both in terms of the volume andposition of the dispensed drops, across an OLED panel display.

As noted earlier, an inkjet printing system can typically have at leastone printhead that has multiple inkjet nozzles, each nozzle capable ofdispensing drops of ink onto the panel surface. Typically, there isvariation across the multiple nozzles of a printhead with respect to thevolume, trajectory, and velocity of the drops dispensed. Such variationscan arise from a variety of sources, including, but not limited to,variations in nozzle working conditions, variations in intrinsic nozzleactuator behavior including age of a piezoelectric nozzle driver,variations in ink, and variations in intrinsic nozzle size and shape.The impact of such variations can result in non-uniformity in the volumeloading across the panel. For example, variations in drop volume canlead directly to variations in the deposited volume, whereas variationsin the drop velocity and trajectory can indirectly lead to variationsthe deposited volume of an ink by causing variation in the placement ofthe drops on an OLED panel surface. In theory, these variations can beavoided by using only a single nozzle when printing, but printing with asingle nozzle is too slow to be practical in real world manufacturingapplications. In light of such variations in the ink drops dispensedfrom different nozzles, and the practical necessity of using multiplenozzles to get reasonable processing speed when using inkjet printingfor manufacturing applications, it is desirable to have methods andassociated apparatuses to provide for dispensing of uniform volumes ofink across an OLED panel area in spite of such nozzle-to-nozzle dropvariations.

A measurement apparatus integrated into a thin film inkjet printingsystem according to the present teachings can be used to provide theactual measurements of volume, velocity and trajectory for each nozzleof an inkjet printhead at any time during or intermittent to runs of aprinting process. Such measurement can provide for mitigation ofnozzle-to-nozzle drop variations so as to achieve a more uniformdeposition of film material using the inkjet method. In someembodiments, such measurement can be used to tune printhead performanceby adjusting the drive waveforms to each of the individual nozzles so asto directly reduce the nozzle-to-nozzle drop variation. In someembodiments, such measurement can be used as an input to a print patternoptimization system that can reduce nozzle-to-nozzle variation byadjusting nozzle selection for drop deposition so as to average outnozzle-to-nozzle drop variation in the deposited film. Variousembodiments of a measurement apparatus integrated into a thin filminkjet printing system of the present teaching can utilize variousimaging techniques, such as shadowgraphy, or non-imaging techniques,such as PDA. PDA in particular can provide a significant advantage ofrapidly analyzing a plurality of nozzles of an inkjet printhead,especially useful for systems having many nozzles and/or printheads.

In this regard, an inkjet thin film printing system according to variousembodiments of the present teachings can be comprised of several devicesand apparatuses, which allow the reliable placement of ink drops ontospecific locations on a substrate. These devices and apparatuses caninclude by way of non-limiting example a printhead assembly, inkdelivery system, motion system, substrate support apparatus, such as afloatation table or chuck, substrate loading and unloading system, aprinthead maintenance system and a printhead measurement apparatus.Additionally, an inkjet thin film printing system can be mounted on astable support assembly that can include, for example, a granite ormetal base. A printhead assembly can consist of at least one inkjetprinthead, with at least one orifice capable of ejecting drops of ink ata controlled rate; such ejected drops being further characterized bytheir volume, velocity, and trajectory.

As printing requires relative motion between the printhead assembly andthe substrate, a printing system can include a motion system, such as agantry or split axis XYZ system. Either the printhead assembly can moveover a stationary substrate (gantry style), or both of the printhead andsubstrate can move, for example, in a split axis configuration. Inanother embodiment, the print station can be fixed, and the substratecan move in the X and Y axes relative to the printheads, with Z axismotion provided either at the substrate or the printhead. As theprintheads move relative to the substrate, drops of ink are ejected atthe correct time to be deposited in the desired location on thesubstrate. The substrate is inserted and removed from the printer usinga substrate loading and unloading system. Depending on the printerconfiguration, this can be accomplished with a mechanical conveyor, asubstrate floatation table, or a robot with end effector. A printheadmeasurement and maintenance system can be comprised of severalsubsystems that allow for measurements such as drop volume verification,drop volume, velocity, and trajectory measurements, as well as printheadmaintenance procedures, such as wiping of the inkjet nozzle surface,priming for ejecting ink into a waste basin. Given the variety ofcomponents that can comprise an inkjet thin film printing system,various embodiments of an inkjet thin film printing system according tovarious embodiments of the present teachings can have a variety offootprints and form factors.

As a non-limiting example, FIG. 16 depicts an inkjet thin film printingsystem according to various embodiments, which can be used for printinga substrate such as, for example, but not limited by, an OLED panel. InFIG. 16, inkjet thin film printing system 1600 utilizes a split-axismotion system. The inkjet thin film printing system 1600 can be mountedon printing system support assembly 1610, which can include a pan 1612carried by a support frame 1614. A base 1616 is mounted above the pan,where the base can be optionally constructed from granite or metal. Theinkjet thin film printing system can include a motion system 1620, forexample, a split axis motion system as indicated.

The motion system 1620 is seen to include a bridge 1622 which supportsan X-axis carriage 1624, which in turn mounts a Z-axis mounting plate1626. The Z-axis mount plate in turn supports a printhead mounting andclamping assembly 1628, used to mount an interchangeable printheadassembly 1640. For the split-axis motion system 1620, σ Y-axis track1623 can be mounted upon the base 1616, so as to provide support for aY-axis carriage 1625, which in turn carries a substrate support assembly1630; these various components provide for Y-axis travel of a substratemounted on substrate support assembly 1630. As shown in FIG. 16, forvarious embodiments of a thin film printing system, the substratesupport assembly 1630 can be a chuck. A substrate support assembly canbe provided by a floatation table, for example, as described in detailin U.S. Pat. No. 8,383,202, which is incorporated herein by reference.The inkjet thin film printing system 1600 can utilize a system assemblythat supports one or more modular inkjet printhead assemblies, such asthe various printhead assemblies shown mounted in a tool carousel 1645.Providing for selective interchange of various printhead assemblies canprovide an end user with flexibility for the efficient sequentialprinting of a variety of inks of various formulations on a substrateduring a print process, such as during the printing of an OLED panelsubstrate. Note that this is not required for all embodiments, i.e.,other embodiments can feature a single printhead assembly that is notchanged in between different printing processes. For example, onecontemplated embodiment features an assembly line of multiple printers,each performing a respective print process (for example, usingrespective inks); techniques described herein can be applied to eachsuch printer.

A printhead assembly can include a fluidic system having an inkreservoir in fluid communication with at least one inkjet printhead fordelivering, for example, OLED film-forming material onto substrates. Inthat regard, as shown in FIG. 16, a printhead assembly 1640 can includeat least one printhead 1642. In various embodiments, a printheadassembly can optionally include fluidic and electronic connections toeach printhead. Each printhead, in turn, can have a plurality of nozzlesor orifices capable of ejecting ink droplets at a controlled rate, witha measurable droplet volume, velocity and trajectory. Variousembodiments of printhead assembly 1640 can have between about 1 to about30 printheads per printhead assembly. A printhead 1642 can have betweenabout 16 to about 2048 nozzles, each of which can expel a drop volume ofbetween about 0.10 pL to about 200.00 pL.

Measuring the performance of each nozzle of a given printhead caninclude checking for nozzle firing, as well as measuring drop volume,velocity and trajectory. As previously mentioned, having suchmeasurement data can provide for either tuning a head before printing toprovide for more uniform performance for each nozzle, or for using themeasurement data to provide for printing algorithms that can compensatefor the difference during printing, or combinations of such approaches.Clearly, having reliable and up to date sets of measurement data canprovide for a variety of approaches that can use the measurement data tocompensate for nozzle-to-nozzle drop volume variations and permitplanned printing processes that combine droplets of different volumes(from the same nozzle using different drive waveforms or from respectivenozzles). As noted earlier, measurement data is advantageously collectedto develop a population of measurements representing a distribution foreach nozzle, such that an expectation of mean droplet volume, trajectoryand velocity can be developed and used in print planning, with awell-formed understanding of expected variation for each such dropletparameter.

In this regard, the depicted inkjet thin film printing system caninclude a droplet measurement device or system 1650, which can bemounted on a support 1655. It is contemplated that various embodimentsof the droplet measurement system 1650 can be based on imaging ornon-imaging techniques as mentioned, for example, a shadowgraphy- orinterferometry-based method. Embodiments which utilize non-imaging PDAtechniques can provide a significant advantage of rapidly analyzingbetween about 16 to about 2048 nozzles of each printhead, such asprinthead 1642 (e.g., which is approximately 50 times more rapid thantypical imaging techniques). Recalling that a printhead assembly caninclude, e.g.,thirty printheads (i.e., with the printing system usingmore than 10,000 nozzles), this permits rapid, in situ, dynamicmeasurement within a printer of all nozzles (and all alternate drivewaveforms if pertinent to the embodiment), with droplet re-calibrationevery 2-24 hours, or more frequently. Moreover, various embodiments ofsystems and methods according to the present teachings can utilize a PDAmeasurement device integrated into a gas enclosure assembly and systemthat can house a printing apparatus. Such systems and methods utilizinga PDA measurement device integrated into a gas enclosure assembly andsystem housing a printing apparatus can provide for rapid in situmeasurement of a plurality of nozzles in a printhead. This is especiallyuseful for ensuring uniform deposition volumes over a large substrate,for example, having one or more OLED devices, and reducing any Muraeffects. As will be discussed further below, note that the dropletmeasurement system includes at least one measurement device foroptically measuring droplet parameters; a second imaging device can beused to obtain more accurate measurements or differential measurement(for example, to compute nozzle position or droplet velocity or flighttrajectory), or for purposes of precisely aligning the dropletmeasurement system, such that each time it is moved to the maintenancebay, system software can precisely locate any individual nozzle to anearest-micron resolution. This will be discussed further below.

Numeral 1617 is used to designate an area of the ink jet printingapparatus associated with the droplet measurement system 1650. Thisregion is illustrated in enlarged detail in FIG. 17.

As shown in FIG. 17, a printhead assembly 1740 can be held duringprinting by a printhead mounting and clamping assembly 1728, itselfcarried once again by a Z-axis mount 1726 of a motion system. In thisregard, the motion system is used to position the printhead assembly1740 for measurement proximate to droplet measurement system 1750, e.g.,in a service area or service station. As noted earlier, the dropletmeasurement system 1750 can be designed for selective engagement anddisengagement while the printhead assembly 1740 is in this position.With a large printhead assembly (e.g., having thousands or nozzles),such a structure permits a droplet measurement system to perform testswhile the printhead assembly 1740 is “parked,” with other tests beingconcurrently performed by other test or calibration equipment orprocesses (not shown). For example, a printhead nozzle can be purged,cleaned, or otherwise managed, with the use of concurrent processesapplied to help minimize any downtime of the overall ink jet printingsystem; this helps maximize manufacturing productivity. As noted earlier(and as explained below relative to FIG. 19), droplet measurement (andother servicing) can be performed while substrates are beingtransported, dried, cured, loaded or unloaded, further minimizing anysystem downtime by stacking droplet measurement against other,unavoidable tasks associated with the printing/manufacturing operation.Each nozzle of a printhead 1742 of the printhead assembly 1740 can beadjusted to a measurement area 1756 for measurement of drops ejectedfrom each nozzle using droplet measurement system 1750. Note that inthis embodiment, individual printheads 1742 can be moved relative toother printheads for analysis, but once again, this is not required forall embodiments. For example, it is also possible to have each printheadstatically mounted during measurement, with the droplet measurementsystem advanced to each printhead location and each nozzle locationwithin a given printhead; as noted earlier, this permits concurrentprocessing or “stacking” of multiple servicing operations while theprinthead assembly is parked. It is also possible to use multipledroplet measurement systems to independently measure different nozzles,for example, of different, spatially-separated printheads.

For purposes of illustration, it should be assumed that the dropletmeasurement system is a PDA apparatus (i.e., an interferometry-baseddevice), having a light source such as a laser source and lighttransmission optics a beam splitter and a transmission lens.Additionally, such a PDA apparatus can also have receiving opticsincluding a receiving lens and a plurality of photodetectors. Forexample, a first optical side 1752 of droplet measurement system 1750can source one or more light beams for measurement, and focus light on ameasurement area 1756, as indicated by the hatched lines, while a secondoptical side 1754 can pass measurement light which has been scatteredfrom a droplet in the measurement area 1756 to receiving optics and oneor more light detectors.

The droplet measurement system 1750 can be interfaced to a computer orcomputing device (not shown), either directly or remotely. Such acomputing device can be configured to receive signals representingmeasured droplet volume, velocity and trajectory for each dropletproduced by a nozzle (or nozzle-waveform combination) from eachprinthead 1742 of the printhead assembly 1740. Once again, multiplemeasurements of many droplets from each nozzle/nozzle-waveform pairingare advantageously performed, in order to develop statisticalpopulations representing the various producible droplets.

As noted earlier in connection with FIGS. 11 and 12, various embodimentsof a printing system can be housed in a gas enclosure providing aninert, low-particle environment, with droplet measurement preferablyoccurring in such an environment. In one embodiment, droplet measurementis performed in a common atmosphere used for printing, e.g., in the samegeneral (enclosed) chamber. In a second embodiment, a separate,fluidically isolated chamber is used for measurement, for example, aspart of a service station area.

FIG. 18A shows a layout of a droplet measurement system 1801specifically configured to use shadowgraphy techniques. In particular, aprinthead 1803 is seen at a position where it will jet a droplet 1805into a spittoon (not shown in FIG. 18A). During flight of the droplet1805, the droplet traverses a measurement area where the droplet isilluminated by a light source; in FIG. 18A, the light source is seen toconsist of a strobe light 1807 and optional light source optics 1809,employed for example to direct light from the strobe light 1807 to themeasurement area (e.g., from below the measurement plane as exemplifiedearlier in connection with FIGS. 2A-E or FIGS. 16-17). The optics directthe light to illuminate a relatively large area, represented by focusingor redirection paths 1811, to expose the droplet repeatedly in rapidsuccess at different positions for capture in a single image frame; FIG.18A therefore shows three different positions of the same droplet,representing different flashes of the strobe, which are collectivelyimaged together. Thus, for example, an image frame under analysis willshow what appears to be multiple droplets at different positions (i.e.,per multiple instances of numeral 1805), but these are in reality thesame droplet at different positions along a flight trajectory. A secondset of optics 1813 provide for light collection and focus, such that acaptured image clearly depicts both droplet contour and a variableamount of shadow representing droplet diameter, used by image processingsoftware to compute droplet volume. As should be appreciated, by imagingthe same droplet during its flight at multiple positions, the dropletmeasurement system can use one image from to compute droplet volume,velocity and trajectory; shadow parameters are used to calculate dropletmass, and thus volume, and relative positions of the droplet are used tocalculate both velocity and trajectory. For example, a droplet thatincreases in apparent diameter at a “lower position” within the capturedimage frame is traveling toward light receiving optics 1813, andconversely one that decreases in diameter is traveling away. The lightreceiving optics 1813, in turn, convey captured light to a camera 1815,for example, a high-resolution CCD camera that images droplet contoursand shadows as depicted by graphic 1817. The droplet measurement systemoptionally provides control over zoom/focus (1819) and/or XY position(1821) of the receiving optics, all under the control of a governingcomputer system 1823 (and instructions stored on non-transitory machinereadable media used by one or more processors of the computer system forsuch control). In one embodiment, as mentioned, the receiving optics andlight source are mounted to a common chassis and transported together,providing for a fixed focal path, but this need not be the case for eachembodiment. The depicted system captures the travel of each droplet in afew microseconds, while image processing application software 1825 runby the computer system 1823 then calculates droplet parameters. As anexample, the computer can provide for display and visualization (1827)of the droplet and/or measured parameters and can calculated values forthe various parameters, such as volume, velocity and trajectory (1829,1831 and 1833), or other parameters. Note that the computer system 1823can be part of the ink jet printing system, or it can also be remote(for example, connected by a local area network “LAN” or wide areanetwork “WAN,” e.g., the Internet, to collect data on a remote basis);similarly, display and visualization 1827 can also be provided at alocation remote from the computer system 1823, also via a LAN or WAN. Asindicated by numeral 1835, the computer system 1823 compiles themeasured parameters to form a statistical population of measurements fora given nozzle that produced the droplet (and for a givennozzle-waveform pairing if alternate drive waveforms are used by theparticular embodiment of the printing system). The computer system 1823optionally stores the individual measurements themselves and/or astatistical summary (e.g., mean and standard deviation or variance incase of a Normal Distribution, and comparable metrics if otherdistribution types are supported) in a database 1837. With sufficientlyrobust populations measured, the database can then be applied inplanning and/or optimization of the printing process as described above,e.g., using specific combinations of droplet means to obtain compositefills per target region, where the composite fills can be based ondifferent droplet volumes (e.g., from different nozzles and/or drivewaveforms).

FIG. 18B shows a layout of a droplet measurement system 1851specifically configured to use PDA (interferometry) techniques. Aprinthead is illustrated in position for measurement, as referenced bynumeral 1853. The printhead will jet droplets from a specific nozzle(e.g., using a specific drive waveform) downward into a dropletmeasurement area, as indicated by numeral 1855. As with priorembodiments, the droplet measurement system can be optionally designedfor three dimensional transport relative to a parked printhead, suchthat the droplet measurement area is effectively “brought to” theparticular nozzle's droplet flight path. A light source, in this case alaser 1857, generates a beam of light 1859, which is directed to becomeincident on a beam splitter 1861. The beam splitter produces two or morelight beams 1863 and 1864 (only two are illustrated in FIG. 18B), whichlight optics 1865 then redirects in a convergent manner, i.e., such thatthe beams intersect as represented by numerals 1866 and 1867 at aposition incident with an in-flight droplet. Note that the light optics1865 optionally provides for the laser 1857 to be mounted below themeasurement plane (see the discussion of FIGS. 2D and 2E, above), andoptionally redirects the light path 1859 or 1863/1864 so as to arrive atthe measurement area (e.g., by redirecting one or more of the lightpaths around the periphery of a spittoon). Note that numeral 1869 isused to represent the general, continued dimension of the illuminationoptics (such as light paths 1866 and 1867). As noted earlier, with aninterferometry-based technique, a diffraction pattern is captured from adirection angle offset to this continued dimension 1869, as representedby angle measure 1873. This angular deviation is typically ninetydegrees, but other directions of capture can also be used. Accordingly,measurement light 1871 is received at this angular deviation fromincident light by a second set of optics 1875 (labeled “Optics 2”), andredirected for below deposition-plane-measurement by non-imagingdetectors 1877. These detectors produce data representing a diffractionpattern, as illustrated by graphic 1879; as should be appreciated (e.g.,by contrasting this graphic 1879 with graphic 1817 from FIG. 18A), thespacing of lines in the diffraction pattern provides a measure ofdroplet volume, with this spacing much more rapidly processed to measuredroplet volume than with the imaging technique represented by FIG. 18A.Note that, while FIG. 18B illustrates the use of one light source 1857and two incident beams 1866 and 1867, other embodiments use more thanone light source and more than two incident beams, e.g., to capturedroplet velocity, trajectory and other parameters. As with theembodiment of FIG. 18A, in FIG. 18B, a computer (1881) optionallyprovides for zoom/focus (1883) and XY transport of the measurementoptics, runs suitable application software (1887) to compute variousdroplet parameters, and provides for display and visualization (1889).Just as before, these various elements can be integrated with a printeror manufacturing device, or can be dispersed across a WAN or LAN,controlled by multiple, separated processors of respective computers orservers. As before, measured parameters can include droplet volume(1891), velocity (1893) and trajectory (1895), with data representingstatistical populations (1897) stored in a database (1899) for purposesof scan planning. This scan planning can once again combine dropletparameters from different nozzles and/or waveforms to perform precisefills of target regions which are deliberately based on multiple,different droplet volumes.

It was earlier mentioned that droplet parameters can change over time,for example, according to system parameters, ambient conditions or inkcharacteristics. An industrial printing system therefore advantageouslyupdates droplet measurement, not just of a single droplet, but of astatistical population for each droplet (and of an expected meanvolume/velocity and trajectory of each droplet) on a relatively frequentbasis; this helps ensure precise droplet data that is always accurateand up to date, permitting planned droplet combinations that reliablyconform to maximum tolerances for composite ink fills. It has been foundthat droplet parameters in practice change somewhat slowly, for example,with detectable variation every 2 to 12 hours. The use of an in situdroplet measurement makes it possible to repeatedly perform dynamicmeasurement and construction of new statistical populations of measuredparameters within this time range; note that with conventionaltechniques, it may take many hours to measure a large scale printhead orprinthead assembly; through the use of fast techniques, such as PDA asdiscussed above, it becomes possible to update all statisticalmeasurements on a very rapid basis, e.g., with 30 minutes lead time orless, even where thousands of print nozzles are involved. Systems whichutilize some or all of the techniques discussed above thereforefacilitate and enable industrial printers having recalibrated dropletmeasurement parameters based on statistical distributions within thementioned 2-to-12 hour time frame, and therefore facilitate moreaccurate printing within maximum tolerances for target region fillvariation.

As noted earlier, in one contemplated embodiment, the printer isintermittently or continuously controlled to perform droplet parametermeasurement any time the printer is not actively printing. This helpsmaximize uptime of a manufacturing line. As mentioned, in oneembodiment, any time a printhead assembly of the printer is not in use,that printhead assembly can be diverted for droplet parametermeasurement. For example, any time a substrate is being loaded orunloaded, advanced between chambers, or dried, cured or otherwiseprocessed, a print carriage can transport the printhead assembly to aservice station for droplet measurement and/or other servicingoperations. Such operation helps further provide for frequent, dynamicupdate of droplet statistical populations for each nozzle, as justdescribed; optionally employed with a PDA-based droplet measurementdevice (e.g., interferometry-based techniques), such a control schemecan render the droplet measurement task transparent to any desiredprinting operation. Note that in a contemplated system, this control isimplemented by control software, running on at least one processor, thatmanages the printing process; note further that this software can beresident on a printer, one or more computers or servers, or both.

FIG. 19 shows one example 1901 of flow for such a control process. Asmentioned, this process can be optionally implemented by instructionsstored on non-transitory machine-readable media that, when executed,cause at least one processor to perform/provide the depicted processes.

FIG. 19 is split into three general regions 1903, 1905 and 1907,respectively representing startup and offline initialization processes,online printing, and offline special operations. As a system ispowered-on, the system is typically subjected to an initializationprocess 1909 where new measurements are taken for each nozzle to developstatistical populations, as has been described above. At the same time,a calibration process (not shown) can also be called upon to selectmultiple nozzle firing waveforms for each nozzle (e.g., using aniterative process as previously described to select 16 waveforms thatproduce droplet volumes within ±10.0% of a target droplet volume).Statistical populations are thus developed for each such waveform and/ornozzle which include a mean droplet volume as well as desired spread. Asnoted previously, in one embodiment, a fixed number of measurements areperformed for each droplet, whereas in another embodiment, the numbercan vary from nozzle-to-nozzle (or per nozzle-waveform pairing) toachieve a sufficiently tight statistical spread; also, in oneembodiment, a validation or qualification process can be optionallyapplied where nozzles (or nozzle-waveform pairings) not producingdroplets having desired parameters can be disqualified from use in printplanning. The measurements and/or statistical measures are then stored(1911) for each nozzle and for each nozzle-waveform pairing, asapplicable. Note that this startup calibration can be performed the veryfirst time the system is turned on (e.g. on a one time basis), and inother embodiments, it is performed every time the system is powered-upanew. For example, it can be advantageous (if a production line is onlyrun during a portion of each day) to store previously computed dropletparameters (and then to update these parameters, according to theprocess discussed below). Alternative, new parameters can be computedanew with each power cycle.

The system also optionally receives parameters defining the printprocess and substrate parameters (1913) and automatically plans dropletcombination and scan processes as previously described (1915). In othercontemplated implementations, e.g., where the printer is part of anassembly line for a specific OLED display product, these parameters andplanning may be invariant. However, if droplet parameters can change,then so to can print planning, and process 1915 is therefore optionallyre-performed any time statistical parameters change, e.g., as anautomated background process each time a droplet measurement system isengaged (as indicated by numeral 1917).

With system print parameters and means for droplet parameters available(i.e., for each nozzle or nozzle-waveform pairing), the system may thenenter an online mode in which it performs printing as desired, pernumeral 1919. That is, a substrate can be loaded or transported into theprinter, and printing of one or more OLED device thin film layers canthen be performed as desired. However, to minimize device downtime, eachtime printing is stopped (e.g., to load or unload a substrate), thevarious printhead nozzles are subjected to renewed droplet measurementto update statistical droplet populations on an intermittent or periodicbasis. For example, it is expected that a typical print process for alarge HDTV substrate (representing several large size TV screens) can becompleted in about 90 seconds, with the completed substrate then beingunloaded or advanced to another chamber (1920) during a process thattakes, e.g., 15-30 seconds. During this 15-30 second intermission, theprinter is not being used to print and, accordingly, dropletmeasurements can be performed during this time. For example, controlsoftware for the printer controls a substrate transport mechanism tomove an old substrate out from outside the reach of a print headcarriage, and simultaneously, the control software moves the print headassembly to a service station for droplet measurement and/or otherservicing functions. As soon as the printhead assembly is parked (1921),the control software selectively engages the droplet measurement systemper numeral 1923 to perform droplet measurement. As noted earlier,measurement can develop statistical populations for droplets produced bydifferent nozzles or different nozzle-waveform pairings. To supplementany previously stored measurements, the droplet measurement system isoperated in a loop where it takes as many droplet measurements aspossible until the next substrate is loaded or it is otherwise time forprinting to recommence. For example, per function blocks 1925, 1927,1929 and 1931, the droplet measurement system (1) measures multipledroplets for a given nozzle or nozzle/waveform pairing, (2) stores orupdates results in memory (i.e., either storing the new, additionalmeasurement data as raw data or storing updated means or statisticalsummaries, or both), (3) identifies a nozzle address (or nozzle-waveformidentifier for an ensuing measurement cycle) and (4) then proceeds asappropriate to another nozzle or nozzle-waveform pairing for another setof measurements. The process of loading/unloading a substrate canpotentially take a variable amount of time and, therefore, when thesystem is ready for a new printing cycle, control software issues aninterrupt or function call (1933) to disengage service operations (1935)as appropriate (e.g., including the droplet measurement system) andreturn the printhead assembly to active printing (1919). As mentioned,control software also transparently updates or recomputes dropletcombinations which might no longer be valid due to updates in per-nozzledroplet means. Note that because the droplet measurement loop stores anaddress or location for an ensuing measurement cycle (1930), the systemeffectively performs droplet measurement for a small window ofnozzles/droplets, precessing on a circular basis through the thousandsof different nozzles/nozzle-waveform pairings available for use inproducing droplets. Printing is then performed until the next substrateiteration is completed, at which time that substrate is unloaded and themeasurement/servicing cycle continues. By stacking droplet measurementas described behind other printer operations, these techniques helpsubstantially reduce any system downtime, once again, maximizingmanufacturing throughput. Note that while the depicted method engagesthe droplet measurement system with every load cycle, this need not bethe case for all embodiments, i.e., it may be desired to update dropletmeasurements at a specific rate (e.g., every 8 hours) and thus, ifdroplet statistical populations are built more quickly using thementioned stacking operations, it may be desired to instead rundifferent servicing operations during substrate loads and/or transportand/or curing operations. FIG. 19 also shows a special maintenance box1937, associated with special ad-hoc actions, for example the need tochange a printhead, or another offline process. Finally, as notedearlier, nearly any type of print head maintenance or other nozzle-basedanalysis can be performed as part of an “online” process, e.g., inbetween successive substrates in a manufacturing line. Per-nozzle and/orper-drive waveform droplet parameter measurement is provided as oneexample only.

FIG. 20 illustrates another embodiment of a method of dropletmeasurement, generally represented by numeral 2001. When a printhead ismounted or it is otherwise desired to calibrate the droplet measurementsystem to correct for positional offset, a calibration routine can berun in order to precisely match droplet measurements with a givenprinthead nozzle. In a typical embodiment, this alignment process isperformed with the aid of an “upward facing camera” or other imagingdevice that takes an image of a printhead from beneath, that is, lookingupward from the perspective of a substrate at the nozzle plate toidentify one or more fiducials or alignment marks (2003). As notedbefore, in one embodiment, the camera (imaging system) can be the samedevice as used for droplet measurement, but it can also be a separateimaging device. For an exemplary printhead having, e.g., 1024 nozzlesarranged in four rows of 256 nozzles, the fiducials are used todetermine offset, rotation and skew between the nozzle plate and a gridsystem corresponding to the imaging device. Note that in one embodiment,the fiducials can optionally be specific nozzles (2005), for example,the nozzles closest to the corners of the printhead (e.g., first andfourth rows, nozzles 1 and 256); other mechanisms can also be used. In atypical implementation, printhead configuration data (2007) is loadedinto the system by software and used to identify these corner nozzlesand used to map address of all nozzles to the imaging system's grid2009, with interpolation relied upon to initially estimate position ofeach nozzle (2011). To provide an example, in one embodiment, systemsoftware is designed to accommodate different printheads with differentnozzle configurations, and to this effect, the system software loads theprinthead configuration data to identify number of rows, presence offiducials (if any), number of nozzles per-row, average vertical andhorizontal offset between rows and columns of nozzles, and so forth.This data enables the system software to estimate the position of eachnozzle on the printhead, as mentioned. In one contemplated system, thiscalibration process is performed once a printhead is changed, but not inbetween print processes; in a different embodiment, this calibrationprocess is performed each time the droplet measurement system isinitialized, e.g., with each new measurement run in between two printoperations.

It was earlier-mentioned that nozzle (and nozzle-waveform) measurementcan be performed on a rolling basis, precessing through a range ofnozzles with each break in between substrate print operations. Whetherengaged to measure all nozzles anew, or on such a rolling basis, thesame basic process of FIG. 20 can be employed for measurement. To thiseffect, per numerals 2013 and 2015, when the droplet measurement deviceis engaged for a new measurement (either on the heels of priormeasurement or a substrate print operation), the system software loads apointer which identifies the next nozzle for which measurements are tobe taken (e.g., for a second printhead, “nozzle 2,312”). In the case ofinitial measurement (e.g., responsive to installation of a newprinthead, or a recent boot-up, or a periodic process such as a dailymeasurement process), the pointer would point to a first nozzle for aprinthead, e.g., “nozzle 2, 001.” This nozzle either is associated witha specific imaging grid access or one is looked-up from memory. Thesystem uses the provided address to advance the droplet measurementsystem (e.g., the spittoon and measurement area referenced earlier) to aposition corresponding to the expected nozzle position. Note that in atypical system, the mechanical throws associated with this movement arequite precise, i.e., to approximately micron resolution. The systemoptionally at this time searches for nozzle position about the expectedmicron-resolution position, and finds the nozzle and centers on itsposition (2017) based on image analysis of the printhead within a smallmicron-distance from the estimated grid position. For example, azig-zag, spiral or other search pattern can be used to search about theexpected position for a nozzle. A typical pitch distance between nozzlesmight be on the order of 250 microns, whereas nozzle diameter might beon the order of 10-20 microns. Once the nozzle of interest isidentified, the software fires a droplet from the nozzle in question andrelies on the droplet measurement system to confirm that the nozzlein-question did indeed fire (which then confirms the nozzle's identity).FIG. 20 shows this process as being performed every time a new nozzle isidentified for measurement (e.g., every time the droplet measurementsystem moves), but it is also possible in some embodiments to performthis measurement once (e.g., in situations where the droplet measurementsystem grid is very tight) during an off-line configuration, to storethe grid position for each nozzle, and then to update this position onlywhen the printhead is changed or in response to error processing. Insystems where the mechanics of the droplet measurement system and/orprinthead position are not very precise, it can be advantageous to usean estimate and search function for each nozzle anytime there is achange in the nozzle under scrutiny. Note that as implied by numeral2019, in one embodiment, the estimate and search function aligns thedroplet measurement device (and its associated optics) in each of threedimensions (xyz) with the printhead nozzle under scrutiny.

The precise z position of each nozzle (distance relative to dropletmeasurement area) is then adjusted (2021) in order to ensure consistentdroplet measurement and/or image capture.

For example, it was mentioned earlier that a droplet measurement systemtypically determines droplet velocity and flight trajectory by measuringeach droplet multiple times, and calculating these parameters based ondistance (e.g., relative to a centroid of each droplet image). Variousparameters can affect proper droplet measurement, including error instrobe timing (e.g., for a shadowgraphy-based droplet measurementsystem), uncorrected offset between the droplet imaging system and thenozzle plate, nozzle process corners and other factors. In oneembodiment, a variety of statistical processes are used to compensatefor such errors, for example, in a manner that normalizes strobe firingrelative to droplet measurement locations across all droplets; forexample, if a hypothetical printhead has 1,000 nozzles, then the systemcan normalize z-axis offset from the printhead plate by picking anaverage offset which produces a minimum of positional error whilecentering a desired number of droplets (on average across the 1,000nozzles or subsets thereof) in the measurement area, in terms of averagedroplet image position. Analogous techniques can be applied to aninterferometry-based system or to other droplet measurement systems.

FIG. 20 shows a droplet measurement area 2023 and a hypothetical passageof two droplets 2024 and 2026 through that measurement area, alongrespective hypothetical trajectories 2025 and 2027. Several thingsshould be noted about the example provided by this FIG. First, velocityand trajectory measurement is seen to be dependent on measuring the samedroplet multiple times (three each in the case of droplets 2024 and2026). This requirement can be used to properly position the measurementarea relative to the strobe (or imaging source) firing, by one or moreof changing the timing of the strobe (or light source), changing thedrive waveform used to launch the associated droplets, changing z-axisposition of the droplet measurement system, and/or changing z-axisposition of the printhead. For example, if three droplet images areexpected for a single droplet as the strobe is repeatedly fired (duringa single exposure, in the case of a shadowgraphy-based system), but onlytwo are observed, the measurement area is misaligned in height, and isadjusted to effectively redefine where droplet positions are capturedrelative to the measurement area until three representations of adroplet are obtained. Naturally, this hypothetical provides an exampleonly and other implementations might measure more than 3 strobed dropletrepresentations or less than three. Note also deviation in trajectory2025 relative to trajectory 2027 might be due to statistical variationin the way the droplets are produced, and so can be optionally used tobuild a statistical model representing mean droplet trajectory (in termsof alpha and beta angle) and standard deviation in each of thesedimensions. As should be appreciated, while droplet measurement areas2023 shows a two-dimensional droplet depiction (e.g., a yz plane as perthe drawing page), trajectory angle relative to the x axis can bederived from changes in apparent droplet size or focus in a given imageframe amongst the multiple strobed droplet representations, indicatingthat droplet is getting nearer or farther away from the plane of thedrawing sheet represented by FIG. 20; analogous interference patternchanges are applied in the case of interferometry-based techniques.

The scheme represented within measurement 2023 can also be used tomeasure nozzle bow. That is, as an example, if it is assumed thatdroplets 2024 and 2026 originate from a common exact nozzle position,but the reverse trajectory does not align with the expected y-axiscenter of the droplet measurement area (i.e., from the left-to-rightrelative to the drawing page) that the nozzle in question could beoffset in its y-axis position relative to other nozzles in the same rowor column. As implied by the discussion earlier, such aberration canlead to idealized droplet firing deviations that can be taken intoaccount in planning precise combinations of droplets, i.e., preferably,any such “bow” or individual nozzle offset is stored and used as part ofprint scan planning, as discussed earlier, with the printing systemusing the differences of each individual nozzle in a planned mannerrather than averaging out those differences. In an optional variation,the same technique can be used to determine non-regular nozzle spacingalong the x-axis, although for the depicted embodiment, any such erroris subsumed in correction for droplet velocity deviations (e.g., anysuch spacing error can be corrected for by adjustments to nozzlevelocity or per nozzle firing delays). To determine y-axis bow of anozzle producing droplets 2024 and 2026, the respective trajectories2025 and 2027 are effectively reverse plotted (or otherwisemathematically applied) with other measurement trajectories for the samenozzle and used to identify a mean y-axis position of the specificnozzle under scrutiny. This position may be offset from an expectedlocation for such a nozzle, which could be evidence of nozzle bow.

As stated before and as implied by this discussion, one embodimentbuilds a statistical distribution for each nozzle for each parameterbeing measured, for example, for volume, velocity, trajectory, nozzlebow, and potentially other parameters (2029). As part of thesestatistical processes, individual measurements can be thrown out or usedto identify errors. To cite a few examples, if a droplet measurement isobtained having a value that is so far removed from other measurementsof the same nozzle that the measurement could represent a firing error;in one implementation, the system discards this measurement if deviantto a point that exceeds a statistical error parameter. If no droplet isseen at all, this could be evidence that the droplet measurement systemis at the wrong nozzle (wrong position), or has a firing waveform erroror that a nozzle under scrutiny is inoperative. Measurement handlingprocess 2031 is employed to make appropriate adjustments includingtaking any new or additional measurements as necessary. Per numeral2033, each measurement is advantageously stored and used to build thepertinent statistical distributions, with the system then looping toperform measurement for additional droplets from the same nozzle untilsufficient robustness to measurement error is obtained. This loop (2035)is seen in FIG. 20 to indicate that this (inner) loop is performed untiln droplets are obtained for each nozzle or each nozzle-waveform pairing.When a sufficiently robust distribution has been obtained, the systemcalculates (stores) the desired statistical parameter(s) (e.g., mean,standard distribution for each measure parameter) for the given nozzle(2037) and executes any appropriate error handling process 2039 (such asvalidating the nozzle just measured or deeming it or an associatedwaveform inoperative) and then moves on to the next firing waveform ornext nozzle (2041), as appropriate. That is, with a measurementdistribution for a given nozzle or nozzle-waveform pairing having beencompleted, the system software updates an address pointer to the nextnozzle to be measured (2041) and then returns per numeral 2045 to movethe droplet measurement system and to perform the next measurement, asappropriate. Alternatively, per numeral 2043, if time is up, and thesystem is being called upon to print another substrate as part of amanufacturing line, the system updates any scanning operations based onnewly procured data (if any), stores the “next” nozzle's address, andreturns to substrate printing (2043). In one embodiment, after such aprinting operation is complete, during a prospective break (ormaintenance downtime), the system retrieves the stored nozzle addressand particulars of droplet measurement and continues where it left off.

Note that, although not separately called out by FIG. 20, the depictedmeasurement process would typically be performed for each alternatewaveform available for use with each nozzle. For example, if each nozzlehad four different piezoelectric drive waveforms that could be selected,the inner process loop 2035 of FIG. 20 would generally be repeated 4*ntimes; if a particular implementation called for the building of astatistical distribution based on 24 droplets for each waveform, thenthere might be 96 such measurements for one nozzle (24 for each of fourwaveforms, with each measurement being used to develop statistical meanand spread measures for each of droplet velocity, trajectory and volume,and for estimated nozzle position (e.g., for purposes of assessingnozzle bow).

Through the use of precision mechanical systems and droplet measurementsystem alignment techniques, the disclosed methodology permits very highaccuracy measurement of individual nozzle characteristics, includingmean droplet metrics for each of the mentioned parameters (e.g., volume,velocity, trajectory, nozzle position, and other parameters).

As should be appreciated, the mentioned techniques facilitate a highdegree of uniformity in manufacturing processes, especially OLED devicemanufacture processes, and therefore enhanced reliability. Thesetechniques in some embodiments are at least partially facilitated usingdroplet measurement techniques that enable precision dropletcombinations and Mura suppression through the use of dissimilar nozzlecombinations and droplet volume combinations. In addition, by providingfor control efficiencies, particularly as to speed of dropletmeasurement and the stacking of such measurement against other systemprocesses in a manner calculated to reduce overall system downtime, theteachings presented above help provide for a faster, less expensivemanufacturing process designed to provide both flexibility and precisionin the fabrication process.

While many embodiments described above feature planning of printprocesses based on combinations of droplets from respective nozzles of aprint head or print head assembly, this need not be used for allembodiments; as one non-limiting example, for an embodiment that makesdifferent (alternate) drive waveforms available for use by print headnozzles, droplet combinations used to achieve precise fills can be basedon the use of multiple droplets from a single nozzle, where thosedroplets represent the use of different waveforms, each calibrated inadvance, and each associated (for example) with a specific mean dropletvolume. Thus, one alternate embodiment provides a method of producing athin film in target regions of a substrate using an ink jet printerhaving a print head with nozzles, where the nozzles are to ejectrespective droplets of ink, the ink carrying a material that will form apermanent part of the desired thin film. A droplet measurement device isused measure multiple droplets from each one of the nozzles of the printhead, for each one of a set of preplanned drive waveforms available foruse by the specific nozzle. A processor is used to generate printercontrol data, dependent on a statistical parameter for each drivewaveform for each nozzle; based on the available data, some drivewaveforms are used, some nozzles are used, and some aren't. The printercontrol data is of a nature that it can be used by a downstream process(or optionally, a printer) to control printing in a manner that utilizescombinations of droplets created using different waveforms, where thecombinations selected dependent on the statistical parameters.Naturally, as with the other embodiment described herein, contemplatedimplementations also include software operable to perform the describedmethod, an apparatus having related components, or a printer, OLEDfabrication system or other machine having related components. Theseexamples are intended to be non-limiting rather than exhaustive.

The foregoing description and in the accompanying drawings, specificterminology and drawing symbols have been set forth to provide athorough understanding of the disclosed embodiments. In some instances,the terminology and symbols may imply specific details that are notrequired to practice those embodiments. The terms “exemplary” and“embodiment” are used to express an example, not a preference orrequirement.

As indicated, various modifications and changes may be made to theembodiments presented herein without departing from the broader spiritand scope of the disclosure. For example, features or aspects of any ofthe embodiments may be applied, at least where practical, in combinationwith any other of the embodiments or in place of counterpart features oraspects thereof. Thus, for example, not all features are shown in eachand every drawing and, for example, a feature or technique shown inaccordance with the embodiment of one drawing should be assumed to beoptionally employable as an element of, or in combination of, featuresof any other drawing or embodiment, even if not specifically called outin the specification. Accordingly, the specification and drawings are tobe regarded in an illustrative rather than a restrictive sense.

What is claimed is:
 1. A method of fabricating layers on respectivesubstrates, each layer and respective substrate to form part of arespective electronic device, the method comprising: moving a print headof an inkjet printer from a printing region to a region adjacent to adroplet measurement system; measuring a characteristic of a droplet ofthe liquid ejected from a selected one of nozzles of the print headduring droplet flight, using the droplet measurement system, wherein thedroplet measurement system comprises a beam source and a detector,wherein the detector provides an electronic output representingmeasurement of the characteristic; printing liquid from a print head ofa printer onto each of the respective substrates in dependence on themeasured characteristic; transporting each of the respective substratesin succession to-and-from a printing region in which each of therespective substrates can be printed on by the print head, using asubstrate transport mechanism; and processing the liquid deposited oneach of the respective substrates with a processing device, to convert amaterial provided by the liquid to a form that will persist at the layerin each respective electronic device.
 2. The method of claim 1, whereinthe method further comprises selectively moving the droplet measurementsystem relative to the print head in at least two independent dimensionswhile the print head is in a stationary position.
 3. The method of claim1, wherein the method further comprises selectively moving the dropletmeasurement system in at least three independent dimensions while theprint head is in the stationary position, including in a dimensionextending between (1) a point of the intersection between the beam andthe droplet and (2) the selected one of the nozzles, so as position thepoint of intersection at a selective height from the selected one of thenozzles.
 4. The method of claim 1, wherein the nozzles lie within afirst plane, and wherein: the droplet measurement system furthercomprises mirrors; the beam source, the detector, and the mirrors areall mounted by the droplet measurement system in fixed positionalrelationship relative to one another; the method further comprisesmoving the droplet measurement system in the at least two dimensions soas to move a segment of a path of the beam in a manner relative to theprint head, within a plane; and each of the beam source and the detectorare mounted by the droplet measurement system outside of the plane. 5.The method of claim 1, wherein the beam source is a laser and the beamis a laser beam, and wherein method further comprises using a collectorto collect droplets ejected from the selected one of the nozzles whilethe laser beam is positioned to intersect the flight path of the dropletof the liquid ejected from the selected one of the nozzles, and whereinthe laser, the detector, and the collector are each mounted in fixedpositional relationship relative to one another and are moved as a unitby the droplet measurement system.
 6. The method of claim 1, wherein:the method further comprises, using at least one processor, calculatingvolume of the droplet from the measured characteristic; the print headis a first print head; printing the liquid is performed using at leastone thousand nozzles carried by at least one print head, the at leastone print head including the first print head; and the method furthercomprises iteratively measuring droplet volumes for dropletsrespectively produced by each one of the at least one thousand nozzles.7. The method of claim 6, wherein the method further comprisesselectively moving the droplet measurement system relative to the printhead in at least two independent dimensions while the print head is in astationary position.
 8. The method of claim 1, wherein the processingsystem is a curing system comprising a source of radiation, and whereinthe method further comprises exposing the liquid deposited onto each ofthe respective substrates to the source of radiation in order to curethe liquid and thereby convert the liquid to the form.
 9. The method ofclaim 1, further comprising printing the liquid onto each of therespective substrates and processing of the liquid deposited onto eachof the respective substrates in a manner such that each of therespective substrates is not exposed to an uncontrolled atmosphere inbetween the printing and the processing.
 10. The method of claim 1,wherein the liquid comprises a liquid monomer and wherein the formcomprises a polymer.
 11. The method of claim 1, wherein the electronicdevice comprises a light emitting device, and wherein said method isembodied as a method of fabricating respective light emitting devices onthe respective substrates.
 12. The method of claim 1, wherein: the printhead is a first print head; printing of the liquid is performed using atleast one thousand nozzles carried by at least one print head, the atleast one print head including the first print head; and the methodfurther comprises automatically controlling the droplet measurementsystem on an iterative basis when none of the respective substrates areat the printing region, to automatically measure droplet volumes forrespective droplets from a cyclically iterated subset of the at leastone thousand nozzles during times in between printing of the liquid ontosuccessive ones of the respective substrates, as a function of positionof at least one of the successive ones, and intermittently updatingstored measurement of the measured droplet volume for each one of the atleast one thousand nozzles, in dependence on the automated measurements.13. The method of claim 12, wherein said automatically controlling isperformed at times when the print head has been moved to a maintenancestation.
 14. The method of claim 1, wherein the method further comprisesstoring in memory at least one value for each one of the nozzlesrepresenting measurement of droplet volume for that one of the nozzles,and planning printing of the liquid according to a predetermined printfile using at least one processor, and wherein printing the liquid isperformed in a manner such that the at least one processor controlswhich of the nozzles are used to eject the droplets according tovariation in expected droplet volume from nozzle-to-nozzle, asrepresented by the at least one value for each of the nozzles stored inthe memory.
 15. The method of claim 14, wherein the method furthercomprises, for at least one target region on each of the respectivesubstrates, causing the print head to deposit an aggregate volume of theliquid within a predetermined tolerance range, and wherein planning theprinting is performed in a manner where droplet selection to obtain theaggregate volume is restricted, such that a sum of expected volumes forrespective ones of the droplets used to print within the target regionnecessarily lies within the predetermined tolerance range, in dependenceon respective ones of the values stored in the memory.
 16. The method ofclaim 1, wherein each respective electronic device is an electronicdisplay device having pixels.
 17. An apparatus for fabricating layers onrespective substrates, each layer and respective substrate to form partof a respective electronic device, said apparatus comprising: a dropletmeasurement system to measure a characteristic of a droplet of theliquid ejected from a selected one of nozzles of a print head duringdroplet flight, the droplet measurement system comprising a beam sourceand a detector, wherein the detector is to provide an electronic outputrepresenting measurement of the characteristic; a printer having a printhead to print liquid onto each of the respective substrates independence on the measured characteristic; a substrate transportmechanism to transport each of the respective substrates in successionto-and-from a printing region, separated from the droplet measurementsystem, in which each of the respective substrates can be printed on bythe print head; and a processing device to process the liquid depositedon each of the respective substrates, to convert a material provided bythe liquid to a form that will persist at the layer in each respectiveelectronic device.
 18. The apparatus of claim 17, wherein said apparatusis to selectively move the droplet measurement system relative to theprint head in at least two independent dimensions while the print headis in a stationary position.
 19. The apparatus of claim 17, wherein saidapparatus is to selectively move the droplet measurement system in atleast three independent dimensions while the print head is in thestationary position, including in a dimension extending between (1) apoint of the intersection between the beam and the droplet and (2) theselected one of the nozzles, so as position the point of intersection ata selective height from the selected one of the nozzles.
 20. Theapparatus of claim 17, wherein the nozzles lie within a first plane, andwherein: the droplet measurement system further comprises mirrors; thebeam source, the detector, and the mirrors are all mounted by thedroplet measurement system in fixed positional relationship relative toone another; said apparatus is to move the droplet measurement system inthe at least two dimensions so as to move a segment of a path of thebeam in a manner relative to the print head, within a plane; and each ofthe beam source and the detector are mounted by the droplet measurementsystem outside of the plane.
 21. The apparatus of claim 17, wherein thebeam source is a laser and the beam is a laser beam, wherein theapparatus further comprises a collector, wherein said apparatus is tomove the collector to collect droplets ejected from the selected one ofthe nozzles while the laser beam is positioned to intersect the flightpath of the droplet of the liquid ejected from the selected one of thenozzles, and wherein the laser, the detector, and the collector are eachmounted in fixed positional relationship relative to one another and aremoved as a unit by the droplet measurement system.
 22. The apparatus ofclaim 17, wherein: the apparatus further comprises at least oneprocessor to calculate volume of the droplet from the measuredcharacteristic; the print head is a first print head; the printercomprises at least one thousand nozzles carried by at least one printhead, the at least one print head including the first print head; andthe droplet measurement unit is to iteratively measure droplet volumesfor droplets respectively produced by each one of the at least onethousand nozzles.
 23. The apparatus of claim 22, wherein said apparatusis to selectively move the droplet measurement system relative to theprint head in at least two independent dimensions while the print headis in a stationary position.
 24. The apparatus of claim 17, wherein theprocessing system is a curing system comprising a source of radiation,and wherein the curing system is to expose the liquid deposited ontoeach of the respective substrates to the source of radiation in order tocure the liquid and thereby convert the liquid to the form.
 25. Theapparatus of claim 17, wherein said apparatus is configured to use theprinter to print the liquid onto each of the respective substrates andto process of the liquid deposited onto each of the respectivesubstrates in a manner such that each of the respective substrates isnot exposed to an uncontrolled atmosphere in between the printing andthe processing.
 26. The apparatus of claim 17, wherein the liquidcomprises a liquid monomer and wherein the form comprises a polymer. 27.The apparatus of claim 17, wherein the electronic device comprises alight emitting device, and wherein said apparatus is to fabricaterespective light emitting devices on the respective substrates.
 28. Theapparatus of claim 17, wherein: the print head is a first print head;the printer comprises at least one thousand nozzles carried by at leastone print head, the at least one print head including the first printhead; and said apparatus is further to automatically control the dropletmeasurement system on an iterative basis when none of the respectivesubstrates are at the printing region, to automatically measure dropletvolumes for respective droplets from a cyclically iterated subset of theat least one thousand nozzles during times in between printing of theliquid onto successive ones of the respective substrates, as a functionof position of at least one of the successive ones, and intermittentlyupdate stored measurement of the measured droplet volume for each one ofthe at least one thousand nozzles, in dependence on the automatedmeasurements.
 29. The apparatus of claim 28, wherein said apparatus isto perform said intermittent control at times when the print head hasbeen moved to a maintenance station.
 30. The apparatus of claim 17,further comprising a memory, wherein at least one processor is to storein the memory at least one value for each one of the nozzlesrepresenting measurement of droplet volume for that one of the nozzles,and is to plan printing of the liquid according to a predetermined printfile using the at least one processor, and wherein the printer is toprint the liquid in a manner such that the at least one processorcontrols which of the nozzles are used to eject the droplets accordingto variation in expected droplet volume from nozzle-to-nozzle, asrepresented by the at least one value for each of the nozzles stored inthe memory.
 31. The apparatus of claim 30, wherein said apparatus isfurther to, for at least one target region on each of the respectivesubstrates, cause the print head to deposit an aggregate volume of theliquid within a predetermined tolerance range, and wherein the at leastone processor is to plan the printing in a manner where dropletselection to obtain the aggregate volume is restricted, such that a sumof expected volumes for respective ones of the droplets used to printwithin the target region necessarily lies within the predeterminedtolerance range, in dependence on respective ones of the values storedin the memory.
 32. The apparatus of claim 17, wherein each respectiveelectronic device is an electronic display device having pixels.